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结合李萨如图像扫描和微机电系统(MEMS)二维谐振式扫描镜,提出一种新颖的投影显示方法。相比于传统的投影显示技术,该技术具有控制简单、能耗低、体积小及重量轻等优点。首先阐述了该投影显示技术中像素的定义与划分,然后从理论上分析了刷新率、分辨率和谐振频率之间的关系,以及选择谐振频率的约束条件,最后通过Matlab软件进行仿真验证,并使用研制出的扫描镜样件搭建了投影显示样机,成功投影出分辨率为260×180的图像,从而验证谐振频率选择约束的有效性以及该投影显示方法的可行性,为实际工程应用奠定基础。 相似文献
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The design of a two-dimensional high-frequency electrostatic microscanner is presented, and an improved method for routing isolation trenches is investigated to increase the reliability and mechanical stability of the resulting device. A sample device is fabricated and tested using an optimized micromachining process. Measurement results indicate that the sample device oscillates at inherent frequencies of 11586 and 2047 Hz around the two rotational axes, thereby generating maximum twisting angles of ±7.28° and ±5.63°, respectively, under two square waves of 40 V. These characteristics confirm the validity of our design and satisfy the requirements of a laser projector with VGA standards. 相似文献
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