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Influence of Fe Contamination on the Minority Carrier Lifetime of Multi-crystalline Silicon 下载免费PDF全文
We investigate the influence of Fe contamination on the minority carrier lifetimes of multi-crystalline silicon. The minority carrier lifetime is measured by the microwave photoconductive decay method. The original bulk lifetime is about 30μs after passivation with iodine solution. After intentional Fe contamination, the bulk lifetime declines with increasing temperature. Fast cooling in air conduces to the formation of more interstitial Fe ([Fe]i). Slow cooling through the control of the furnace temperature limits the formation of more [Fe]i, but leads to the formation of precipitation. The data support the idea that the minority carrier lifetime in multi-crystalline silicon mainly depends on the distribution of Fe but not the total amount. A favorite effect of [Fe]i gettering is discovered after conventional phosphorus diffusion, and the [Fe]i concentration remaining in the silicon wafer is acceptable for solar cell applications. 相似文献
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