多光束激光外差高精度测量玻璃厚度的方法

利用基于激光外差测量技术和激光多普勒技术的非接触式多光束激光外差测量方法,得到了光电探测器输出电流的谐波表达式.讨论了该测量方法用于玻璃厚度超精密测量的可行性及理论依据,并利用Matlab软件对不同情况进行了仿真实验.结果表明：该方法在不同入射角时测量平板玻璃厚度最大的误差为0.3%,明显比其他测量方法精度高. 关键词： 外差探测 多光束激光外差 激光多普勒技术 非接触式测量     

Numerical investigation of multi-beam laser heterodyne measurement with ultra-precision for linear expansion coefficient of metal based on oscillating mirror modulation

This paper proposes a novel method of multi-beam laser heterodyne measurement for metal linear expansion coefficient. Based on the Doppler effect and heterodyne technology, the information is loaded of length variation to the frequency difference of the multi-beam laser heterodyne signal by the frequency modulation of the oscillating mirror, this method can obtain many values of length variation caused by temperature variation after the multi-beam laser heterodyne signal demodulation simultaneously. Processing these values by weighted-average, it can obtain length variation accurately, and eventually obtain the value of linear expansion coefficient of metal by the calculation. This novel method is used to simulate measurement for linear expansion coefficient of metal rod under different temperatures by MATLAB, the obtained result shows that the relative measurement error of this method is just 0.4%.