基于石墨烯谐振沟道晶体管的高频纳米机电系统信号读取研究

结合石墨烯场效应晶体管和机械谐振原理,研究了基于本地背栅石墨烯谐振沟道晶体管(RCT) 的高频机械信号直接读取方法.利用机械剥离法获得的石墨烯,提出了一种基于刻蚀技术的器件制备方法, 并实现了栅长和栅宽分别为1 μm的本地背栅RCT.实验结果表明,在室温下RCT的谐振频率范围为57.5–88.25 MHz.研究结果对加速石墨烯纳米机电系统和高频低噪声器件的应用有着重要作用. 关键词： 石墨烯 谐振沟道晶体管 纳米机电系统     

A terahertz on-chip InP-based power combiner designed using coupled-grounded coplanar waveguide lines

This article presents the design and performance of a terahertz on-chip coupled-grounded coplanar waveguide (GCPW) power combiner using a 50 μm-thick InP process. The proposed topology uses two coupled-GCPW lines at the end of the input port to substitute two quarter-wavelength GCPW lines, which is different from the conventional Wilkinson power combiner and can availably minimize the coverage area. According to the results obtained, for the frequency range of 210-250 GHz, the insertion losses for each two-way combiner and four-way combiner were lower than 1.05 dB and 1.35 dB, respectively, and the in-band return losses were better than 11 dB. Moreover, the proposed on-chip GCPW-based combiners achieved a compromise in low-loss, broadband, and small-size, which can find wide applications in terahertz bands, such as power amplifiers and signal distribution networks.     

High frequency doubling efficiency THz GaAs Schottky barrier diode based on inverted trapezoidal epitaxial cross-section structure

A high-performance terahertz Schottky barrier diode (SBD) with an inverted trapezoidal epitaxial cross-sectional structure featuring high varactor characteristics and reverse breakdown characteristics is reported in this paper. Inductively coupled plasma dry etching and dissolution wet etching are used to define the profile of the epitaxial layer, by which the voltage-dependent variation trend of the thickness of the metal-semiconductor contact depletion layer is modified. The simulation of the inverted trapezoidal epitaxial cross-section SBD is also conducted to explain the physical mechanism of the electric field and space charge region area. Compared with the normal structure, the grading coefficient M increases from 0.47 to 0.52, and the capacitance modulation ratio (C_max/C_min) increases from 6.70 to 7.61. The inverted trapezoidal epitaxial cross-section structure is a promising approach to improve the variable-capacity ratio by eliminating the accumulation of charge at the Schottky electrode edge. A 190 GHz frequency doubler based on the inverted trapezoidal epitaxial cross-section SBD also shows a doubling efficiency of 35% compared to that 30% of a normal SBD.