微压痕尺度效应的理论和实验

对压入深度为亚微米量级的微压痕实验来说,硬度与压入深度的关系将表现出强烈的尺度效应,然而,由传统的弹塑性理论无法预测.采用塑性应变梯度理论对微压痕实验中的尺度效应进行预测;同时对单晶铜和单晶铝进行微压痕实验研究.通过将理论预测结果应用于实验,获得塑性应变梯度理论中的微尺度参量值,该值对于常规金属材料（如铜、铝、银等）来说,取值范围为0.8～1.5　μm.另外,对微压痕边界附近所出现的挤出现象（pile-up）和沉陷现象（sink-in）进行了预测和详细分析.     

Theoretical and experimental researches of size effect in micro-indentation test

Micro-indentation tests at scales on the order of sub-micron have shown that the measured hardness increases strongly with the indent depth or indent size decreasing, which is frequently referred to as the size effect. However, the trend is at odds with the size-independence implied by conventional elastic-plastic theory. In this paper, strain gradient plasticity theory is used to model the size effect for materials undergoing the micro-indenting. Meanwhile, the micro-indentation experiments for single crystal copper and single crystal aluminum are carried out. By the comparison of the theoretical predictions with experimental measurements, the micro-scale parameter of strain gradient plasticity theory is predicted, which is fallen into the region of 0.8–1.5 micron for the conventional metals such as copper (Cu), aluminum (Al) and silver (Ag). Moreover, the phenomena of the pile-up and sink-in near micro-indent boundary are investigated and analyzed in detail.     

SIZE EFFECT AND GEOMETRICAL EFFECT OF SOLIDS IN MICRO—INDENTATION TEST

Micro-indentation tests at scales of the order of sub-micron show that the measured hardness increases strongly with decreasing indent depth or indent size,which is frequently referred to as the size effect.At the same time,at micron or sub-micron scale,another effect,which is referred to as the geometrical size effects such as crystal grain size effect,thin flim thickness effect,etc.,also influences the measured material hardness.However,the trends are at odds with the size-independence implied by the conventional elastic-plastic theory.In the present research,the strain gradient plasticity theory(Fleck and Hutchinson)is used to model the composition effects(size effect and geometrical effect) for polycrystal material and metal thin film/ceramic substrate systems when materials undergo micro-indenting.The phenomena of the “pile-up“ and “sink-in“ apeared in the indentation test for the polycrystal materials are also discussed.Meanwhile,the micro-indentation experiments for the polycrystal Al and for the Ti/Si3N4 thin film/substrate system are carried out.By comparing the theoretical predictions with experimental measuremtns.the values and the variation trends of the micro-scale parameter included in the strain gradient plasticity theory are predicted.