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中频脉冲磁控溅射制备氮化铝薄膜   总被引:10,自引:0,他引:10  
使用中频脉冲磁控溅射技术分别在Si(111)、玻璃以及高速钢基底上沉积A1N薄膜,利用X射线衍射、X射线光电子谱、扫描电镜、紫外荧光、FTIR、精密阻抗分析仪等研究了薄膜的结构、光学及电学性质,结果表明,生成的(002)取向多晶A1N薄膜在可见光区域平均透过率超过75%,在紫外区域也具有较高的透过经,在低频交流区域具有良好的绝缘性。  相似文献   
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李承斌  黎明锴  尹东  刘福庆  范湘军 《中国物理》2005,14(11):2287-2292
A first principles study of the electronic properties and bulk modulus (B0) of the fcc and bcc transition metals, transition metal carbides and nitrides is presented. The calculations were performed by plane-wave pseudopotential method in the framework of the density functional theory with local density approximation. The density of states and the valence charge densities of these solids are plotted. The results show that B0 does not vary monotonically when the number of the valence d electrons increases. B0 reaches a maximum and then decreases for each of the four sorts of solids. It is related to the occupation of the bonding and anti-bonding states in the solid. The value of the valence charge density at the midpoint between the two nearest metal atoms tends to be proportional to B0.  相似文献   
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