The optimal amount of isotopic spike solution for ultratrace analysis by isotope dilution mass spectrometry

 Inductively coupled plasma mass spectrometry (ICP-MS) and high resolution inductively coupled plasma mass spectrometry (HR-ICP-MS) are powerful methods of determining metallic impurities in the low- and sub-ppt level in process media such as ultra-pure water used in semiconductor and wafer manufacturing. By using mass spectrometers for analysis, an isotope dilution analysis (IDMS) is possible. The reproducibility of an IDMS is unmatched. For concentration levels near the instrument detection limit a novel method is reported to find the optimal amount of isotopic spike solution. This optimal value can be derived by the law of propagation of uncertainty combined with the Poisson statistics of the measured number of counts. Generally, an excess of isotopic spike solution should be used to provide results of lowest possible uncertainty. The results are presented in a diagram for easy practical use. Received: 14 October 1997 · Accepted: 13 February 1998     

Accurate calibration of TXRF using microdroplet samples

TXRF has been applied in combination with VPD to the analysis of trace impurities in the native oxide layer of Si wafer surfaces down to the range of 10(8) atoms. cm(-2). Proper quantification of VPD/TXRF data requires calibration with microdroplet standard reference wafers. The precision of calibration function has been evaluated and found to allow quantification at a high level of 3 sigma confidence with microdroplet standard reference.     

Application of neural network calibrations to an halide ISE array

The Neural Network (NN) technique was applied to the calibration of an ion selective electrode (ISE) array comprising a bromide selective electrode, two chloride ISEs and one thiocyanate ISE. The measured samples were synthetic mixture solutions of chlorides and bromides in concentration ranges such that interference occurs. The NN method allowed to perform the calibration without estimating the coefficients of the Nikolskii-Eisenman theoretical relation. Only the determination of bromide was detailed. The results obtained using this method were better than those obtained using linear multivariate calibration methods.     

Synthesis and characterization of sodium titanates Na2Ti3O7 and Na2Ti6O13

Na₂Ti₃O₇ and Na₂Ti₆O₁₃ were synthesized by sol-gel method in order to obtain pure phases. Different heat-treatments were applied on powders and pellets of these materials. The effects were studied by XRD, dilatometry, TGA-DTA, SEM and electrochemical impedance spectroscopy. Pure Na₂Ti₃O₇ was obtained at 973 K. Sintering at 1373 K caused a partial decomposition into Na₂Ti₆O₁₃. The Na₂Ti₃O₇ powder sintered at 1273 K showed polygonal microstructure. Na₂Ti₃O₇ pellets sintered at 1323 K for 10 h exhibited large structures. This latter microstructure decreased the electrical conductivity of Na₂Ti₃O₇. Pure Na₂Ti₆O₁₃ was obtained at 873 K. Sintering at 1073 K caused a partial decomposition into TiO₂ (rutile). Na₂Ti₆O₁₃ pellets sintered at 1323 K for 10 h exhibited common shrinkage behavior. This shrinkage process increased the electrical conductivity of this material. The presence of TiO₂ resulted in a oxygen partial pressure dependence of the electrical conductivity.     

Routine analysis of ultra pure water by ICP-MS in the low- and sub-ng/L level

The chemical analysis with inductively coupled plasma-mass spectrometry (ICP-MS) can help to examine the purity of ultra pure water (UPW) down to 10 part per trillion (ng/L) and lower. For a proper determination of a high number of samples per week the analysis must be divided into two parts: the routine analysis and the reference water analysis. The routine analysis is done by direct measurement of the ultra pure water samples. Applying a standard addition method under particular clean conditions, the reference water analysis leads to the definition of the accurate zero. A quick evaluation scheme is also presented for the reference water analysis. The method is tested for its fitness for application by examining LOD (for relevant element < 2 ng/L), reproducibility and linearity of calibration. The ICP-MS was optimized according to the methodology of G. Taguchi to improve reproducibility and LOD.     

Analysis of low Z elements on Si wafer surfaces with synchrotron radiation induced total reflection X-ray fluorescence at SSRL, Beamline 3-3: comparison of droplets with spin coated wafers

The unique properties of synchrotron radiation, such as high incident flux combined with low divergence, its linear polarization and energy tunability, make it an ideal excitation source for total reflection X-ray fluorescence (TXRF) spectroscopy in order to non-destructively detect trace impurities of transition metals on Si wafer surfaces. When used with a detector suitable for the determination of low energy radiation this technique can be extended to the detection of low-Z elements, such as Al, Na and Mg. Experiments have been performed at SSRL Beamline 3-3, a bending magnet beamline using monochromatic radiation from a double multilayer monochromator. The wafer was mounted vertically in front of the detector, which was aligned along the linear polarization vector of the incoming synchrotron radiation. This configuration allows the detector to accept a large solid angle as well as to take advantage of the reduced scattered X-ray intensity emitted in the direction of the linear polarization vector. A comparison between droplet samples and spin coated samples was done, in order to compare the capabilities of vapor phase decomposition (VPD-TXRF) with conventional SR-straight-TXRF. Detection limits in the range of 50 fg corresponding to 2E10 atoms/cm² have been obtained for Na. The spin coated samples, prepared from solutions containing an equal amount of Na, Mg and Al showed an unexpected result when performing a scan of the angle of incidence of the incoming X-rays suggesting a different adsorption behavior of the elements in a multielement solution on the wafer surface. The observation of this behavior is important because the spin coating technique is the standard method for the preparation of surface standards in semiconductor quality control. This effect could be characteristic of the Na, Mg, Al solution used, but the angle dependence of the fluorescence signal of a standard should always be investigated before using the standard for calibration of the apparatus and quantification.     

Immobilization and Continuous Recycling of Photoredox Catalysts in Ionic Liquids for Applications in Batch Reactions and Flow Systems: Catalytic Alkene Isomerization by Using Visible Light

A catalytic (E)‐ to (Z)‐isomerization of olefins using a photoredox catalyst under mild reaction conditions is presented. A variety of (Z)‐alkenes can be prepared in the presence of visible light. A new reaction system allows an easy and efficient scale‐up, as well as a continuous flow process in which the photocatalyst is immobilized in an ionic liquid and continuously recycled by simple phase separation.     

High Speed Video Camera and Electrical Signal Analyses of Arcs Behavior in a 3-Phase AC Arc Plasma Torch

A 3-phase AC plasma torch has been developed and aims at overcoming some limits of the classical DC torches in terms of efficiency, cost and reliability. However, the arc behavior in 3-phase plasma torch remains poorly explored. This paper is dedicated to the high speed video camera at 100,000 frames per second and electrical signal analyses of arcs behavior in a 3-phase AC arc plasma torch. First, a reference case at 150 A, in nitrogen as working gas, has been deeply analyzed. Afterwards, a parametric study based on current and inter-electrode gap has been carried out. Results show that only one arc can exist at a given time and arcs rotate by switching from a pair of electrodes to another one, following the maximal electrical gap potential. However, a particular “abnormal” arc behavior was sometimes observed. Indeed, the arc motion within the inter-electrode gap increases the heat exchange and stabilizes the 3-phase discharge whereas the system is unbalanced when the arc is in the periphery. The analysis highlights that the arc motion is strongly influenced by the electrode jet velocity and repulsive Lorentz forces. The parametric study shows that the current increases both jet velocity and arc discharge stability. Elsewhere, the increase of the inter-electrode gap can also stabilizes the electrical 3-phase arc discharge. Furthermore, the correlation between arc motion and current waveform is highlighted. This work is likely to open the way toward a better understanding of 3-phase discharges in the perspective of their further optimization.     

Differences between eastern and western-type nuclear reactor pressure vessel steels as probed by Mössbauer spectroscopy

Mössbauer spectra (MS) at room temperature have been collected for non-irradiated Eastern- and Western-type nuclear reactor pressure vessel (RPV) steels. All samples showed a typical Mössbauer spectrum for steels with a low alloy-element concentration. Analysis with distributed hyperfine parameters revealed that the spectra consist of two magnetically split subspectra and that only for the Western-type RPV steels a small doublet is present. The analysis of the resulting H_hf-distribution profiles showed that for the Eastern-type steels the relative area for the ''perturbed'' component is more pronounced, and that it has a more complex structure than the corresponding profile for the Western-type steels. The additional doublet present in the MS of the Western-type steels could be assigned to Mn and/or Cr-substituted cementite, while no carbide doublet was observed for the Eastern-type RPV steel, Cr₂₃C₆, Cr₇C₃ and VC being the principal carbides. The distinctions between the two types of steel are due to compositional differences. The results further show that Mössbauer spectroscopy is sensitive to small changes in composition and hence is capable of distinguishing between different types of steel.