基于ANSYS提取单相单向换能器耦合模参数

基于有限元理论,给出了基于ANSYS提取单相单向换能器（Single Phase Unidirectional Transducers,SPUDT）耦合模参数的方法。首先,结合声表面波在压电介质中的传播原理,给出了压电有限元分析方程和对应的ANSYS分析步骤。然后针对SPUDT结构,给出了周期性近似分析的理论模型,利用耦合场分析对其进行模态分析和谐响应分析,最后结合两者的结果来计算SPUDT的耦合模参数。本文给出基底材料为压电晶体128°YX-LiNbO₃和YZ-LiNbO₃,电极材料为铝的三种不同SPUDT的计算结果,理论结果与Hashimoto和Hartmann文献报道的结果相吻合,并且和实验测试的结果基本一致。从而给出了提取SPUDT耦合模参数的一种通用、有效的方法。     

The effect of post-annealing on surface acoustic wave devices based on ZnO thin films prepared by magnetron sputtering

Zinc oxide (ZnO) thin films were deposited on unheated silicon substrates via radio frequency (RF) magnetron sputtering, and the post-deposition annealing of the ZnO thin films was performed at 400 °C, 600 °C, 800 °C, and 1000 °C. The characteristics of the thin films were investigated by X-ray diffractometry (XRD), scanning electron microscopy (SEM), and atomic force microscopy (AFM). The films were then used to fabricate surface acoustic wave (SAW) resonators. The effects of post-annealing on the SAW devices are discussed in this work. Resulting in the 600 °C is determined as optimal annealing temperature for SAW devices. At 400 °C, the microvoids exit between the grains yield large root mean square (RMS) surface roughness and higher insertion losses in SAW devices. The highest RMS surface roughness, crack and residual stress cause a reduction of surface velocity (about 40 m/s) and increase dramatically insertion loss at 1000 °C. The SAW devices response becomes very weak at this temperature, the electromechanical coupling coefficient (k²) of ZnO film decrease from 3.8% at 600 °C to 1.49% at 1000 °C.     

基于偏振模式转换的声光陀螺研究

提出一种基于偏振模式转换的声光陀螺,分析其原理与结构并对该陀螺进行实验测试。静态测试结果表明,当声光作用长度为15mm,声表面波输入功率为100mW,频率为168.201MHz时,偏振模式转化效率为80.02%。在偏置条件下进行旋转测试,得到输出电压随陀螺转速呈线性变化的曲线,其灵敏度约为1mV/[(°)/s]。偏振型声光陀螺保留声表面波陀螺体积小、成本低等优点,而在灵敏度上有大幅提高。     

Development of human IgE biosensor using Sezawa-mode SAW devices

This paper reports Sezawa-mode surface acoustic wave (SAW) devices with via-isolated cavity to construct the allergy biosensor. To fabricate Sezawa-mode SAW devices, the RF magnetron sputtering method for the growth of piezoelectric ZnO thin films are adopted and influences of the sputtering parameters are investigated. The optimal substrate temperature of 300 °C, RF power of 120 W and sputtering pressure of 2 Pa were used to deposit piezoelectric ZnO films with a smooth surface, uniform grain size and strongly c-axis-orientated crystallization. A back-etched SAW resonator is used in this study. The wet etching of (100)-oriented silicon wafers is used to form a back-side cavity which is critical to the formation of a hopper cavity for holding bio-analytes. The remaining membrane structure silicon thickness was 25 μm. In this report, the chrome (Cr, 12 nm)/gold (Au, 66 nm) layer was initially deposited onto the sensing area of SAW devices as the binding layer for biochemical sensor. The resonance frequency of the Sezawa-mode SAW device is 1.497 GHz. The maximum sensitivity of the Sezawa-mode is calculated to be 4.44 × 10⁶ cm²/g for human immunoglobulin-E (IgE) detection. The stability for human IgE detection is calculated to be 80% and the variation of the stability ±3% was obtained after several tests.     

Graphene/LiNbO3 surface acoustic wave device based relative humidity sensor

This study described relative humidity (RH) sensing using a graphene/128° YX LiNbO₃ surface acoustic wave (SAW) device. The resonant frequency of the device decreased in a two-stage manner as the RH increased. For a low RH range (RH < 50%), a frequency downshift of 1.38 kHz per 1% RH change was observed. This was attributed to mass loading of the SAW propagation surface due to the adsorption of water molecules by the graphene surface. For a high RH range (RH > 50%), a frequency downshift of 2.6 kHz per 1% RH change was obtained, which was due to the change in elastic grapheme properties. The mass loading effect of the water layer was less effective at high temperature, resulting in a lower temperature coefficient of resonant frequency (TCF).     

FEM simulation of Rayleigh waves for CMOS compatible SAW devices based on AlN/SiO2/Si(1 0 0)

A simulation study of Rayleigh wave devices based on a stacked AlN/SiO₂/Si(1 0 0) device was carried out. Dispersion curves with respect to acoustic phase velocity, reflectivity and electromechanical coupling efficiency for tungsten W and aluminium Al electrodes and different layer thicknesses were quantified by 2D FEM COMSOL simulations. Simulated acoustic mode shapes are presented. The impact of these parameters on the observed Rayleigh wave modes was discussed. High coupling factors of 2% and high velocities up to 5000 m/s were obtained by optimizing the AlN/SiO₂ thickness ratio.     

声表面波梯形谐振滤波器的级间补偿

梯形SAW滤波器在进行级联后,其通带的低端会出现下陷,使得级联后的通带特性变坏。本文从阻抗匹配的角度分析了通带低端出现下陷的原因,并采用了在级间加谐振器进行补偿的改进方法,最后给出了理论模拟及实验结果。     

声表面波MIM隧道发光二极管

我们在研究MIM隧道发光结(金属-绝缘层-金属)的过程中,首次以表面声波代替表面随机粗糙度的作用,将MIM结制作在声表面波场中,结果使结的发光效率、发光强度、稳定性、均匀性都有改善.本文介绍了结的基本结构,基本工艺,阐明了结的发光机理,讨论了结的Ⅰ-Ⅴ特性曲线和光谱曲线,根据结具有显著的负阻现象,我们设计出了一种新型的开关器件.     

应用LiNbO_3声表面波驱动的全光纤声光频移器

介绍一种工作在10.7MHz的全光纤声光频移器.它由在LiNbO_3基片上制作的叉指电极换能器产生的声表面波驱动.当驱动电功率1.5W时,频移光转换效率达35％.     

A compact optical heterodyne interferometer by optical integration and its application

A compact high-resolution optical heterodyne interferometer combining a two-frequency light module and a minute optical system is described. The light module, which generates two independent frequencies of light, is fabricated by proton exchange method on LiNbO₃ substrate. We report an experiment evaluating measurement accuracy using a micro-displacement measurement system which incorporates this interferometer. Results of the experiment with a standard thickness sample show high thermal stability with maximum measurement error of 1.8 nm at a temperature from 19°C to 33°C. The system was used to measure the hysteresis of a piezoelectric element for displacements of several nm, thereby making it possible to analyze the system quantitatively in practice.