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1.
高端芯片制造所需要的极紫外光刻技术位于我国当前面临35项"卡脖子"关键核心技术之首.高转换效率的极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用双激光脉冲打靶技术实现较强的6.7 nm极紫外光输出.首先,理论计算Gd18+—Gd27+离子最外层4d壳层的4p-4d和4d-4f能级之间跃迁、以及Gd14+—Gd17+离子最外层4f壳层的4d-4f能级之间跃迁对波长为6.7 nm附近极紫外光的贡献.其后开展实验研究,结果表明,随着双脉冲之间延时的逐渐增加,波长为6.7 nm附近的极紫外光辐射强度呈现先减弱、后增加、之后再减弱的变化趋势,在双脉冲延时为100 ns处产生的极紫外光辐射最强.并且,在延时为100 ns处产生的光谱效率最高,相比于单脉冲激光产生的光谱效率提升了33%.此外,发现双激光脉冲打靶技术可以有效地减弱等离子体的自吸收效应,获得的6.7 nm附近极紫外光谱宽度均小于单激光脉冲打靶的情形,且在脉冲延时为30 ns时刻所产生的光谱宽度最窄,约为单独主脉冲产生极紫外光谱宽度的1/3.同时... 相似文献
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A CE instrument that can be assembled from commercially available components with minimal construction effort is described. Except for the electronic control circuitry no specially made parts are required. It is based on a flexible design of microfluidic, electropneumatic, and electronic sections and different configurations can easily be implemented. Automated injection into the capillary is performed hydrodynamically by the application of a pressure for a controlled length of time. The performance of the device was tested with a contactless conductivity detector by separating different metal ions. In addition, nine metal cations related to the quality of honey were separated in 2.3 min and four honey samples were analysed quantitatively to demonstrate the applicability of the method. 相似文献
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Laxmi Narayan Tripathi Sourabh Barua 《Progress in Crystal Growth and Characterization of Materials》2019,65(4):100465
This review article covers the growth and characterization of two-dimensional (2D) crystals of transition metal chalcogenides, h-BN, graphene, etc. The chemical vapor transport method for bulk single crystal growth is discussed in detail. Top-down methods like mechanical and liquid exfoliation and bottom-up methods like chemical vapor deposition and molecular beam epitaxy for mono/few-layer growth are described. The optimal characterization techniques such as optical, atomic force, scanning electron, and Raman spectroscopy for identification of mono/few-layer(s) of the 2D crystals are discussed. In addition, a survey was done for the application of 2D crystals for both creation and deterministic transfer of single-photon sources and photovoltaic systems. Finally, the application of plasmonic nanoantenna was proposed for enhanced solar-to-electrical energy conversion and faster/brighter quantum communication devices. 相似文献
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2-Isopropylbenzimidazole and 2-methylbenzimidazole have been found to be effective bulky proton sources for stereoselective protonation of chiral enolate anions. 2-Isopropylbenzimidazole worked in the stereoselective protonation of the Birch reduction of chiral α,β-unsaturated imides. On the other hand, 2-methylbenzimidazole was found to be the best protonation reagent in the isomerization reaction of α,β-unsaturated imide into β,γ-unsaturated imide. The Birch reduction using 2-isopropylbenzimidazole realized a concise and stereoselective synthesis of δ-lactone 14, a sex pheromone of Macrocentrus grandii, while the isomerization reaction using 2-methylbenzimidazole was employed in the highly stereoselective synthesis of the γ-lactone intermediate in the synthesis of depsipeptide antibiotics. These bulky proton sources would be powerful tools to achieve a concise synthesis of natural products. 相似文献
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Furofuran lignans containing the 2,6-diaryl-3,7-dioxabicyclo[3.3.0]octane skeleton, represent one of the major subclasses of the lignan family of natural products. Furofuran lignans feature a wide variety of structures due to different substituents at aryl groups and diverse configurations at furofuran ring. Moreover, they exhibit a wide range of significant biological activities, including antioxidant, anti-inflammatory, cytotoxic, and antimicrobial activities. This review summarizes source, phytochemistry, and biological activities of 137 natural furofuran lignans isolated from 53 species in 41 genera of 27 plant families for the last 20 years, which provides a comprehensive information for further research of these furofuran lignans as potential pharmaceutical agents. 相似文献
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《Physics letters. A》2019,383(18):2201-2206
This investigation presents the unsteady rheology of Maxwell nanomaterial induced to flow over an inclined surface. Simultaneous effects of stratification, thermal radiation, heat source/sink and magnetic field are taken into account. Viscous dissipation and mixed convection due to concentration and temperature differences are also analyzed. The governing partial differential equations for the Maxwell nanofluid which incorporate the effects of Brownian and thermophoresis effects are simplified by using appropriate similarity transformations, and solved analytically by using homotopy analysis method (HAM). The effects of involved physical parameters on the flow field are analyzed graphically and numerically. 相似文献
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辛仁轩 《中国无机分析化学》2019,9(1):17-26
光谱光源是光谱仪器和光谱技术的核心,等离子体光源是原子发射光谱技术的活跃领域之一,电感耦合等离子体(ICP)已成功地应用于原子发射光谱和无机质谱仪器。由于ICP光源采用氩气作为工作气体,耗量较大,降低氩气用量成为近些年来原子光谱技术研究和改进的重要目标。为此目的,已研究过各种低耗氩ICP光源,非氩气ICP光源,微波等离子体光源,射频电容耦合等离子体光源等。综述了近年这些等离子体发射光源的结构,分析性能及特点,以及它们所用工作气体情况。并归纳总结出,评价各种等离子体发射光谱光源应包括:等离子体温度(激发温度,气体温度),电子密度,工作气体种类及用量,元素检出限,光源的稳健性及经济方面等。 相似文献
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The plasma parameters such as electron density, effective electron temperature, plasma potential, and uniformity are investigated in a new dual‐frequency cylindrical inductively coupled plasma (ICP) source operating at two frequencies (2 and 13.56 MHz) and two antennas (a two‐turn high‐frequency antenna and a six‐turn low‐frequency (LF) antenna). It is found that the electron density increases with 2 MHz power, whereas the electron temperature and plasma potential decrease with 2 MHz power at a fixed 13.56 MHz power. Moreover, the plasma uniformity can be improved by adjusting the LF power. These results indicate that a dual‐frequency synergistic discharge in a cylindrical ICP can produce a high‐density, low‐potential, low‐effective‐electron‐temperature, and uniform plasma. 相似文献