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1.
In photochemical vapor deposition of aluminum film on silicon using dimethylaluminum hydride, (CH3)2AlH, a surface reaction dominated below a (CH3)2AlH pressure of 0.3 m Torr at 200°C, which was induced only with the 160 nm band emitted from a deuterium lamp. A gas-phase reaction occurred above 0.3 mTorr at 200°C, which could be induced by both 160 nm and 240 nm emission bands from the lamp. To distinguish between surface ad gas-phase reactions, a thickness profile was used. At 240°C the surface reaction could be induced even by the 240 nm band, while the deposits formed under illumination of the two bands were thinner than those obtained with only the 240 nm band, indicating occurrence of vacuum ultraviolet (VUV)-enhanced desorption. The mechanism responsible for the observed wavelength dependence in unclear. The electrical resistivity of the films deposited at 200°C was 4.5 μΩ cm, which did not change with wavelength. 相似文献
2.
本文证明了d2k =δ2k =d2k ≥b2k,其中d2k ,δ2k , b2k分别表示A(BlMp)在lNq下的Kolmogorov,线性,Bernstein 2k-宽度,d2k 表示AT(BlN相似文献
3.
Takuya Hashimoto Koichi Kitazawa Masaaki Nakabayashi Tadashi Shiraishi Youichi Suemune Takakazu Yamamoto Hideomi Koinuma 《应用有机金属化学》1991,5(4):325-330
For low-temperature deposition of oxide films relating to Bi-Sr-Ca-Cu-O superconductors, photo-absorption and -decomposition properties were examined with respect to copper and alkaline-earth ß-diketonates. It was confirmed that all ß-diketonates examined were promising as source materials for photochemical vapour deposition (photo-CVD) using a low-pressure mercury lamp, in view of their large light absorption coefficients at wavelength 254 nm. The light irradiation was effective for the formation of highly crystalline oxide films at temperatures below 600 °C. By combining two sources, Ca2CuO3 and SrCuO2 films were prepared. Photo-CVD of c-axis oriented Bi2Sr2CuOx film was achieved by the irradiation of ternary sources of Bi(C6H5)3 and strontium and copper ß-diketonates at 500 °C. 相似文献
4.
Leszek Wachowski Antoni Grodzicki Piotr Piszczek Monika Richert Magdalena Hofman 《Reaction Kinetics and Catalysis Letters》2007,91(1):93-99
Hydrogenation of styrene has been applied as a test reaction to study the catalytic activity of TiO2 deposited by the CVD (chemical vapour deposition) method on the surface of a carbonaceous material enriched in nitrogen (CN). 相似文献
5.
S. Vepřek 《Plasma Chemistry and Plasma Processing》1992,12(3):219-235
Impurity release from the first wall and components facing the hot plasma in Tokamak devices for controlled fusion research and the concomitant pollution of the plasma lead to enhanced energy losses and deuterium-tritium luel dilution. Both these effects can prevent reaching the ignition conditions. The recently developed technique for large areain situ deposition of boron carbide protective coatings by means of plasma-induced chemical vapor deposition enables one to significantly improve the purity of the fusion plasma. The prospects of approaching the scientific break-even in the large machines of the Tokarnak type has been increased.Extended version of an invited paper presented at the 10th International Symposium on Boron, Borides, and Related Compounds, Albuquerque, New Mexico, August 1990.The term Tokarnak is an abbreviation of the Russian name toroidal magnetic chamber. 相似文献
6.
Kolman David Heberlein Joachim Pfender Emil 《Plasma Chemistry and Plasma Processing》1998,18(1):73-89
In this paper, a comprehensive model for thermal plasma chemical vapor deposition (TPCVD) with liquid feedstock injection is documented. The gas flow is assumed to be steady, of a single temperature. Radiation and charged species contributions are excluded, but extensive homogeneous and heterogeneous chemistry is included. The liquid phase is traced by considering individual droplets. Discussion on the model's application to diamond production from acetone in a hydrogen–argon plasma is included. The major conclusions are: (1) Liquid injection possesses a capability to deliver the hydrocarbon precursor directly onto the deposition target. (2) For the case of complete evaporation of the droplet before reaching the substrate, the deposition rate is similar to that obtained with gaseous precursors. (3) The computational results compare well with experimental data. The modeling results can be used to optimize the injection parameters with regard to the deposition rate. 相似文献
7.
N. B. Morozova A. E. Turgambaeva I. A. Baidina V. V. Krysyuk I. K. Igumenov 《Journal of Structural Chemistry》2005,46(6):1047-1051
The structure of titanyl dipivalylmethanate TiO(dpm)2 has been studied by X-ray diffraction analysis. The compound has a molecular structure formed by isolated centrosymmetrical dimers [TiO(dpm)2]2; the unit cell contains two structurally related, crystallographically unique binuclear molecules. The Ti...Ti distance in the dimer is 2.73 Å. Crystal data for Ti2C36H76O10: a = 32.477(6) Å, b = 14.409(3) Å, c = 25.630(5) Å; β = 107.82(3)°, space group C2/c, Z = 8, d calc = 1.002 g/cm3. 相似文献
8.
Structural investigations of thin films of SiC, SiC with free silicon and various titanium suicides (TiSi2, TiSi and Ti5Si3) are described. The crystal phases have been identified using X-ray diffractometry. The growth of reaction products from surface reactions between silicon and deposited titanium can be observed.Dedicated to Professor Dr. rer.nat. Dr. h.c. Hubertus Nickel on the occasion of his 65th birthday 相似文献
9.
Alwyn G. Davies Rajaveen Sivasubramaniam 《Journal of organometallic chemistry》2006,691(16):3556-3561
The thermolysis of the butyltin chlorides at 200-300 °C in the liquid phase has been investigated by 1H, 13C, and 119Sn NMR spectroscopy. The stabilities follow the order: Bu2SnCl2 > Bu3SnCl > BuSnCl3. Only tributyltin chloride showed any evidence of redistribution, giving dibutyltin dichloride, together with metallic tin, butane, and but-1-ene, which would be formed by decomposition of tetrabutyltin. Dibutyltin dichloride decomposed to give mainly butane with no other apparent liquid organotin compound. Butyltin trichloride gave butane, some butene, and metallic tin, and showed no evidence of forming tributyltin chloride by the redistribution reaction, which would have environmental implications for its use in the CVD coating of glass. 相似文献
10.
Izaskun Bustero García Ainara Obieta Isabel Muñoz Roberto Rincón Inés Arteche Amaya 《Mikrochimica acta》2006,152(3-4):239-247
Interest in carbon nanotubes (CNT) has grown at a very rapid rate in the last decade. Their interesting physical and chemical
properties open attractive possibilities in many application areas. These properties depend on the process conditions during
synthesis and on subsequent purification steps. Recent studies have demonstrated that CNT can promote the electron transfer
of biomolecules. These exceptional properties make them attractive for use in electrochemical biosensors.
Multi walled nanotubes have been synthesized by the Chemical Vapor Deposition (CVD) method using methane as a carbon source
and Ni–Al2O3–SiO2 as the catalyst. The influence of the variation of certain reaction parameters such as feed gas composition, catalyst mass,
temperature and reaction time in the yield of the CVD process has been established. In addition, the structural and chemical
characteristics of the CNTs have been studied and a purification process to eliminate the catalyst and amorphous carbon has
been developed that involves a gaseous oxidative process and acid treatment. The efficiency of the purification step has been
determined by analytical techniques.
Atomic force microscopy, Raman scattering, thermogravimetric analysis, inductively coupled plasma atomic spectroscopy are
the characterization techniques employed in this work. 相似文献