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1.
高端芯片制造所需要的极紫外光刻技术位于我国当前面临35项"卡脖子"关键核心技术之首.高转换效率的极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用双激光脉冲打靶技术实现较强的6.7 nm极紫外光输出.首先,理论计算Gd18+—Gd27+离子最外层4d壳层的4p-4d和4d-4f能级之间跃迁、以及Gd14+—Gd17+离子最外层4f壳层的4d-4f能级之间跃迁对波长为6.7 nm附近极紫外光的贡献.其后开展实验研究,结果表明,随着双脉冲之间延时的逐渐增加,波长为6.7 nm附近的极紫外光辐射强度呈现先减弱、后增加、之后再减弱的变化趋势,在双脉冲延时为100 ns处产生的极紫外光辐射最强.并且,在延时为100 ns处产生的光谱效率最高,相比于单脉冲激光产生的光谱效率提升了33%.此外,发现双激光脉冲打靶技术可以有效地减弱等离子体的自吸收效应,获得的6.7 nm附近极紫外光谱宽度均小于单激光脉冲打靶的情形,且在脉冲延时为30 ns时刻所产生的光谱宽度最窄,约为单独主脉冲产生极紫外光谱宽度的1/3.同时... 相似文献
2.
The aim of the present study was to form a nitride layer on a titanium (Ti) substrate through a compact laser-nitriding system comprising a focused pulsed Nd:YAG laser and nitrogen gas blow. To obtain a high-quality layer, the effects of pulse frequency and gas flow rate on the surface characteristics were investigated by using plasma emission analysis as well as X-ray analyses. Optical emission spectra from the laser-induced plasma mainly consisted of ionic Ti lines, and their intensities when the pulse frequency was 15 Hz were much higher than those for 8 Hz. Similarly, the reflections from the δ-TiN phase in the X-ray diffraction (XRD) pattern were enhanced when using 15 Hz. On the other hand, the flow rate of nitrogen gas blow had a significant effect on the thickness of the thin oxide layer that formed above the nitride layer. Using a lower flow rate resulted in the formation of a thicker oxide layer. The higher pulse frequency and the faster flow rate were beneficial for obtaining a higher-quality layer because of the enhancement of nitridation and the suppression of oxidation, respectively. 相似文献
3.
制备了3种不同质量浓度的充填体试件,进行了单轴压缩声发射试验,分析了不同浓度的充填体力学特性,重点研究了试件破坏过程中的声发射振铃计数、声发射累计撞击数与声发射累计能量的比值(r值)、主频及其相对高频信号激增响应系数特征。研究表明:随着浓度的增加,充填体的峰值强度与弹性模量呈增大趋势,充填体中出现的声发射累计振铃计数越多;r值先升高再持续减小到一个较低值,随着外载荷的增加,进入缓慢升高阶段,峰值前均保持在该阶段。充填体破裂前兆信息在声发射信号主频分布中呈现主频段增多现象,表现为由加载初期的1~2个主频段,在临界主破裂时增多到3~5个主频段;且随着浓度的增加,声发射信号主频频段分布越宽,声发射相对高频信号(160~180 kHz)的激增响应系数呈递减趋势。以上特征可为不同浓度的尾砂胶结充填体稳定性监测、预测提供依据。 相似文献
4.
《Wave Motion》2020
Acoustic properties of an additive-manufactured SiC scaffold with hexagonal symmetry fabricated by the robocasting method are studied both numerically and experimentally. The numerical analysis is based on the finite element method (FEM) using Bloch boundary conditions. The calculations show both angular and frequency dispersion of the acoustic waves with wavelengths comparable to the spacing between the rods, i.e., on a millimeter scale, indicating interesting acoustic properties in the MHz range. The dispersion character leads to focusing of the energy propagation into the directions of the rods of the hexagonal structure. This is illustrated by modal-based calculations of the propagation of longitudinal and out-of-plane shear wave packets with a dominant wavelength. The experimental analysis consists of two steps, the measurement of the resonant spectrum and shear wave propagation character. The measured resonant spectrum is in good agreement with the one calculated using numerically obtained low-frequency properties of the structure, also showing the quality of the overall manufactured structure. The time-domain measurement shows significant changes in the energy propagation between low and high frequencies, as predicted by FEM calculations. 相似文献
5.
A diagnostic tool for jet noise using a line-source approach and implicit large-eddy simulation data
In this work, we propose a cost-effective approach allowing one to evaluate the acoustic field generated by a turbulent jet. A turbulence-resolving simulation of an incompressible turbulent round jet is performed for a Reynolds number equal to thanks to the massively parallel high-order flow solver Incompact3d. Then a formulation of Lighthill's solution is derived, using an azimuthal Fourier series expansion and a compactness assumption in the radial direction. The formulation then reduces to a line source theory, which is cost-effective to implement and evaluate. The accuracy of the radial compactness assumption, however, depends on the Strouhal number, the Mach number, the observation elevation angle, and the radial extent of the source. Preliminary results are showing that the proposed method approaches the experimental overall sound pressure level by less than 4 dB for aft emission angles below 50°. 相似文献
6.
The interactions of bubbles and coal particles in 600 kHz ultrasonic standing waves (USW) field has been investigated. A high-speed camera was employed to record the phenomena occurred under the USW treatment. The formation and behaviors of cavitation bubbles were analyzed. Under the driving of these cavitation bubbles, whose size is from several microns to dozens of microns, coal particles were aggregated and then attracted by large bubbles due to the acoustic radiation forces. The results of USW-assisted flotation show a significant improvement in recoveries at 600 kHz, which indicates that the interactions of bubbles and particles in the USW field are more efficient than that in the conventional gravitational field. Furthermore, the sound pressure distribution of the USW was measured and predicted by a hydrophone. The analysis of gravity and buoyancy, primary and secondary Bjerknes forces shows that bubble-laden particles can be attracted by the rising bubbles under large acoustic forces. This study highlights the potential for USW technology to achieve efficient bubble-particle interactions in flotation. 相似文献
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9.
《Physics letters. A》2020,384(13):126253
This letter is concerned with acoustic wave propagation and transmission in acoustic waveguides with periodically grafted detuned Helmholtz resonators. The interplay of local resonances and Bragg band gaps in such periodic systems is examined. It is shown that, when the resonant frequencies of the resonators are tuned close to a Bragg band gap, the behavior of the Bragg band gap can be affected dramatically. Particularly, by introducing appropriately tuned resonators, the bandwidth of a Bragg band gap can be reduced to zero, leading to a very narrow pass band with great wave attenuation performance near both band edges. The band formation mechanisms of such periodic waveguides are further examined, providing explicit formulae to locate the band edge frequencies of all the band gaps, as well as the conditions to achieve very narrow pass bands in such periodic waveguides. 相似文献
10.
层状稀土氢氧化物是一类新型的稀土功能材料,本文采用固体核磁共振(SSNMR)方法研究了同时具备离子交换能力和非线性光学特性的层状La(OH)2NO3化合物,探讨了通过四极核CPMG(QCPMG)脉冲序列和变频谱图采集获取超宽139La SSNMR谱图的方法,并描述了适用于此类实验的滤波方程和谱图重建方法.重建谱图同时包含四极核中心跃迁和卫星跃迁信息,本文使用QUEST软件对超宽139La NMR谱图进行了模拟,获取的四极耦合常数CQ和非对称因子ηQ均与CASTEP密度泛函理论计算值高度吻合.SSNMR实验结果证实层状La(OH)2NO3化合物属于非中心对称结构(P21),解决了对其结构长期以来存在的争论. 相似文献