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Transparent conducting Al-doped ZnO (ZnO:Al, AZO) thin films with good optical and electrical characteristics were prepared by direct current pulse magnetron sputtering. Textured surfaces of AZO films were obtained by etching with NaOH solution successfully and the effect of substrate temperature on the surface texture was investigated. The surface is covered with craters after etching with 5% NaOH solution, and the crater diameter decreases gradually as substrate temperature increases. For AZO film deposited at 270, the crater diameters is 0.5-1 μm, which is an effective surface texture for light trapping.  相似文献
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Sb doped SnO2 (ATO) nanoparticles with Sb doping concentrations ranging from 0% to 20% (Sb/Sb+Sn) have been prepared by chemical coprecipitation using metallic Sn and SbCl3 as raw materials. The influence of Sb doping concentration on crystal structure and electrical property was studied in detail. Results indicated that all ATO nanoparticles possessed the same tetragonal rutile structure as that of bulk SnO2. The average crystal size of the ATO nanoparticles decreased from 16 to 7 nm by increasing the Sb doping concentration. The unit-cell volume of ATO nanoparticles was either expanded or contracted, strongly depending on the Sb doping concentration. The electrical resistivity decreased sharply from 111 to minimum of 1.05 Ω cm when the Sb doping concentration was increased from 0% to 15% and then increased slightly to 1.42 Ω cm when the Sb doping concentration was increased from 15% to 20%. Finally, high resolution X-ray photoelectron spectroscopy (XPS) measurement was employed to investigate the valence state of Sb in samples with various Sb doping levels.  相似文献
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丁万昱  王华林  巨东英  柴卫平 《物理学报》2011,60(2):28105-028105
利用直流脉冲磁控溅射方法在室温下通过改变O2流量制备具有不同晶体结构的N掺杂TiO2薄膜,利用台阶仪、X射线光电子能谱仪、X射线衍射仪、紫外-可见分光光度计等设备对薄膜沉积速率、化学成分、晶体结构、禁带宽度等进行分析.结果表明:所制备的薄膜元素配比约为TiO1.68±0.06N0.11±0.01,N为替位掺杂,所有样品退火前后均未形成Ti—N相结构,N掺杂TiO2薄膜的沉积速率、晶体结构等主要依赖于O2流量.在O2流量为2 sccm时,N掺杂TiO2薄膜沉积速率相对较高,薄膜为非晶态结构,但薄膜内含有锐钛矿(anatase)和金红石(rutile)相晶核,退火后薄膜呈anatase和rutile相混合结构,禁带宽度仅为2.86 eV.随着O2流量的增加,薄膜沉积速率单调下降,退火后样品禁带宽度逐渐增加.当O2流量为12 sccm时,薄膜为anatase相择优生长,退火后呈anatase相结构,禁带宽度为3.2 eV.综合本实验的分析结果,要在室温条件下制备晶态N掺杂TiO2薄膜,需在高O2流量(>10 sccn)条件下制备.  相似文献
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王楠  掌蕴东  袁萍 《中国物理 B》2011,20(4):44203-044203
This paper proposes a ring-out-ring structure of coupled optical resonators to yield coupled-resonator-induced transparency (CRIT). Considering the insertion loss of the coupler,it theoretically deduces the transmission and the effective phase shift. The influences of the insertion loss of the coupler on the transmittance,the effective phase shift,the group index and the CRIT linewidth are fully studied. We find that the increase in multiple m can effectively enhance the normal dispersion and the group index of the proposed structure. Moreover,the specific expression of the group index at resonance is theoretically deduced and discussed for the proposed structure with two rings. The result shows that the multiple m between the lengths of ring 1 and ring 2 can enhance the group index to m times that of the structure with two equal-sized rings at resonance. The control of slow light in the proposed structure is important for applications of highly sensitivity gyroscopes,optical delay lines and optical buffers,etc.  相似文献
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采用溶胶-凝胶方法制备了B掺杂ZnO(BZO)薄膜,系统研究了热解温度对薄膜的结晶行为和性能的影响. X射线衍射谱表明所有的BZO薄膜均具有六方纤锌矿结构,并沿c轴方向择优生长. 随着热解温度的升高,BZO薄膜的晶粒尺寸和RMS粗糙度增加. BZO薄膜的载流子浓度和载流子迁移率也随着热解温度的升高而增加,其可见光平均透过率均在90%以上.  相似文献
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Polyethylene terephthalate (PET) surface was bombarded by N ion beams at room temperature. Varying the working pressure of the ion beams, PET surfaces with different composition and properties were obtained. Characterization by X-ray photoelectron spectrometry showed that only on film surface, ester bonds, especially C-O bonds, were broken and N element chemical bonded with C. The influence depth was less than 5 nm because of the lower ion energy (about 103 eV). Contact angle results revealed that with increasing the working pressure of ion beams, the contact angle of PET surface to pure water increased from 51° to 130°. With these results, one conclusion could be deduced that the hydrophilic and hydrophobic properties of PET surface could be influenced by N atom chemical bond with C, which in turn is controlled by the working pressure of N ion beams.  相似文献
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Indium tin oxide (ITO) films were deposited on glass substrates at room temperature by dc pulse magnetron sputtering. Varying 02 flux, ITO films with different properties are obtained. Both x-ray diffractometer and x-ray photoelectron spectrometer are used to study the change of crystalline structures and bonding structures of ITO films, respectively. Electrical properties are measured by four-point probe measurements. The results indicate that the chemical structures and compositions of ITO films strongly depend on the O2 flux. With increasing O2 flux, ITO films display better crystallization, which could decrease the resistivity of films. On the contrary, ITO films contain less O vacancies with increasing O2 flux, which could worsen the conductive properties of films. Without any heat treatment onto the samples, the resistivity of the ITO film could reach 6.0 × 10^-4 Ω·cm, with the optimal deposition parameter of 0.2 scem O2 flux.  相似文献
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