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A new weighting method,transducer weighting.for the uniform groove-deph RAC is proposed in thispaper.The weighted input and output transducersform a weighting transversal filter In addition,the groove-width weighting,which can be used as an auxiliary is also discussed. By using the new methods,two uniform groove depth RACs have been designed and fabricated,Thesidelobe suppressions achieved are 31 dB and 32 dB.respectively.The results are considered satisfactorybecause the phase compensation by metal strip was not applied. 相似文献
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Pt/Ti Electrodes of PZT Thin Films Patterning by Novel Lift-Off Using ZnO as a Sacrificial Layer 下载免费PDF全文
We achieve a successful novel lift-off of patterning Pt/Ti electrodes on SiO2/Si substrates by employing ZnO sacrificial layer deposition and patterning, successive uniform Pt/Ti deposition and final lift-off. Then we deposit PZT thin films on the electrodes. Compared with the conventional lift-off processes for the electrodes, this novel process does not need post-annealing, which must be performed after conventional lift-off process. It is demonstrated that the electrodes patterned by the novel lift-off process have stronger adhesion. The electrodes and the PZT films on the electrodes are more compact and smoother than those by the conventional lift-off process. 相似文献
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本文报道了作者研制的频率范围分别为200—350MHZ和350一500MHZ的两种15信道声表面波滤波器组的结果。为了克服现有技术温度稳定性较差的缺点,基片材料采用Yll2°LiTaO3,温度稳定性比现有技术提高3.5—5倍。每个滤波器中的两个叉指换能器一个采用特殊抽样的单指换能器,另一个采用三次谐波工作的分裂指换能器,从而避免了采用基频工作的分裂指换能器所需的0.8μm。工艺。输入匹配网络采用改进的串并联匹配网络,降低了输人匹配网络的插人损耗,补偿了因采用Yll2°LITaO3,单个滤波器插损较大的缺陷,使滤波器组总的插入损耗与现有采用YZ或Y128°LiNbO3的滤波器组相当。 相似文献
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