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Conductive perovskite BaPb03 (BPO) films as a potential electrode material of PZT capacitors used in ferroelectric random access memory are prepared by rf magnetron sputtering. An x-ray diffractometer and standard four probe method are employed to investigate the dependence of growth conditions on crystal structure and conductivity of BPO films. It is found that BPO films with perovskite phase can be obtained at substrate temperatures above 425℃, and the sample with the lowest resistivity is obtained at 450℃ under pure argon atmosphere. Using this BPO film as electrode, ferroelectric properties of BPO/PZT/BPO and Pt/PZT/BPO sandwiched structures are evaluated. Their remanent polarization and coercive field are 36.6 ℃/cm^2 (81.3 k V/cm) and 36.9℃/cm^2 (89.1 kV/cm), respectively. The coercive field of the former structure is lower than that of the latter, but remanent polarizations are almost the same. In addition, the results imply that BPO electrode is helpful to improve the fatigue resistance of PZT. The reasons are discussed. 相似文献
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利用Sol-Gel法在Pt/Ti/SiO2/Si衬底上制备出Bi4Ti3O12和Bi3.25La0.75Ti3O12薄膜,研究了La掺杂对Bi4Ti3O12薄膜的晶体结构、铁电性能和疲劳特性的影响,发现La掺杂没有改变Bi4Ti3O12薄膜的基本晶体结构,并且提高了Bi4Ti3O12铁电薄膜的剩余极化值和抗疲劳性能,对La掺杂改善Bi4Ti3O12铁电薄膜性能的机理进行了讨论.
关键词:
铁电性能
4Ti3O12薄膜')" href="#">Bi4Ti3O12薄膜
3.25La0.75Ti3O12薄膜')" href="#">Bi3.25La0.75Ti3O12薄膜
sol-gel法
La掺杂 相似文献
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Magnetostatic Coupling in Ba0.8Sr0.2TiO3/CoFe2O4 Magnetoelectric Composite Thin Films of 2-2-Type Structure 下载免费PDF全文
Ba0.8Sr0.2 TiO3/CoFe2O4 (BST/CFO) magnetoelectric composite thin films of 2-2-type structures are prepared onto Pt/Ti/SiO2/Si substrates by a sol-gel process and spin coating technique. The structure of the prepared thin film is substrate/BST/CFO/. . ./CFO/BST. Three CFO ferromagnetic layers are separated from each other by a thin BST layer. The upper CFO layer is magnetostatically coupled with the lower CFO layer. Subsequent scanning electron microscopy investigations show that the prepared thin films exhibit good morphologies and have a compact structure, and the cross-sectional mierographs clearly display a multilayered nanostructure of multilayered thin films. The composite thin films exhibit good magnetic and ferroelectric properties. The spacing between ferromagnetic layers can be varied by adjusting the thickness of intermediate BST layer. It is found that the strength of magnetostatic coupling has a great impact on magnetoelectric properties of composite thin film; that is, the magnetoelectric voltage coefficient of the composite thin film tends to increase with the decrease of pacing between two neighboring CFO ferromagnetic layers as a result of magnetostatic coupling effect. 相似文献
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用Sol-Gel法制备了Pb(1 x)TiO3/PbZr0.3Ti0.7O3/Pb(1 x)TiO3(PT/PZT/PT)夹心结构及PZT铁电薄膜,为了获得高质量的PT/PZT/PT夹心结构铁电薄膜,使用不同过量Pb配比(x)的PbTiO3 (PT)层进行制备,以获得优化的PT子晶层.X射线衍射和原子力显微镜分析结果表明PT层中过量Pb配比(x)对薄膜的微结构影响很大,只有PT层中Pb过量配比x=0.10-0.15的薄膜为表面晶粒大小均匀致密的纯钙钛矿结构.X射线电子能谱对薄膜微区进行元素成分分析表明,对x=0.00的薄膜,在表面和界面处Pb明显的缺乏;而x=0.20时的薄膜,Pb则明显的过量.薄膜的铁电性能、疲劳特性和漏电流特性等电学性能与PT层中过量Pb配比(x)没有明显的变化趋势,但与薄膜的结晶性能密切相关.结晶性能较好的薄膜,其电学性能也较好.说明PT层中过量Pb配比(x)是通过影响PT子晶层自身的结晶,而影响整个薄膜的结晶行为,并进一步影响到整个薄膜的电学性能.因此,在其他工艺参数都相同时,PT层中合适的过量Pb配比应为x=0.10-0.15.优化的子晶层不仅能获得结晶性能较好的薄膜,而且薄膜的电学性能也好. 相似文献
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用sol-gel法制备出了具有良好铁电性、纯钙钛矿结构的PbTiO3/Pb(Zr0.3Ti0.7)O3/PbTiO3(PT/PZT/PT)新型夹心结构铁电薄膜.用扫描力显微镜(SFM)的压电响应模式获得了薄膜铁电畴的垂直于膜平面方向(OPP)、膜平面内(IPP)及OPP的相位和幅度图像,结合理论分析指出薄膜的电畴主要由c畴和偏离垂直于膜平面方向上的c畴构成,薄膜取向的复杂性导致了复杂的畴结构.对于[111]取向的薄膜,当偏离垂直于膜平面方向上的c畴在垂直膜平面方向和面内方向都相反时构成180°的畴壁,在垂直膜平面方向上相同、面内方向相反或由垂直膜平面方向上相反、面内方向相同时构成90°畴壁.
关键词:
铁电薄膜
PT/PZT/PT
电畴和畴壁
扫描力显微镜(SFM) 相似文献
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