Effect of oxygen on regulation of properties of moderately boron-doped diamond films

Regulation of oxygen on properties of moderately boron-doped diamond films is fully investigated. Results show that, with adding a small amount of oxygen (oxygen-to-carbon ratio < 5.0%), the crystal quality of diamond is improved, and a suppression effect of residual nitrogen is observed. With increasing ratio of O/C from 2.5% to 20.0%, the hole concentration is firstly increased then reduced. This change of hole concentration is also explained. Moreover, the results of Hall effect measurement with temperatures from 300 K to 825 K show that, with adding a small amount of oxygen, boron and oxygen complex structures (especially B₃O and B₄O) are formed and exhibit as shallow donor in diamond, which results in increase of donor concentration. With further increase of ratio of O/C, the inhibitory behaviors of oxygen on boron leads to decrease of acceptor concentration (the optical emission spectroscopy has shown that it is decreased with ratio of O/C more than 10.0%). This work demonstrates that oxygen-doping induced increasement of the crystalline and surface quality could be restored by the co-doping with oxygen. The technique could achieve boron-doped diamond films with both high quality and acceptable hole concentration, which is applicable to electronic level of usage.     

离子注入对ZnTe:O中间带光伏材料的微观结构及光学特性的影响

II-VI和III-V族高失配合金半导体是新型高效中间带太阳电池的优选材料体系,但中间带的形成及其能带调控等关键问题仍未得到有效解决.采用氧离子注入方式,在非平衡条件下对碲化锌(Zn Te)单晶材料实现了等电子掺杂,深入研究了离子注入对Zn Te:O材料的微观结构和光学特性的影响.研究表明:注入合适浓度的氧离子(2.5×1018cm-3)将会形成晶格应变,并诱导1.80 e V(导带下0.45 e V)中间带的产生;而较高浓度(2.5×1020cm-3)的氧离子会导致Zn Te注入层表面非晶化,并增强与锌空位相关的深能级(～1.6 e V)发光.时间分辨光致发光结果显示,离子注入诱导形成的中间带主要是和氧等电子陷阱束缚的局域激子发光有关,载流子衰减寿命较长(129 ps).因此,需要降低晶格紊乱度和合金无序,实现电子局域态向扩展态的转变,从而有效调控中间带能带结构.     

MOCVD生长中载气H2对N掺杂ZnO性质的影响

采用MOCVD方法在石英衬底上生长ZnO。实验使用二乙基锌(DEZn)为锌源,N2O作为氧和氮源,H2作为载气。采用PL和Raman光谱方法对ZnO样品进行表征,结果表明H2的加入大幅度减少薄膜中碳的掺入,明显改善了薄膜的光学质量。采用N2O离化技术,可以进一步提高其带边峰的强度,抑制带内发光。XRD测量表明,生长的ZnO薄膜具有c轴择优取向。目前生长高质量N掺杂的p型ZnO薄膜是很困难的,而H2作为载气的加入明显改善了ZnO薄膜的光学性质,在生长过程中加入H2将为获得高质量N掺杂的p型ZnO薄膜提供一种途径。     

Significant suppression of residual nitrogen incorporation in diamond film with a novel susceptor geometry employed in MPCVD

This work proposed to change the structure of the sample susceptor of the microwave plasma chemical vapor deposition (MPCVD) reaction chamber, that is, to introduce a small hole in the center of the susceptor to study its suppression effect on the incorporation of residual nitrogen in the MPCVD diamond film. By using COMSOL multiphysics software simulation, the plasma characteristics and the concentration of chemical reactants in the cylindrical cavity of MPCVD system were studied, including electric field intensity, electron number density, electron temperature, the concentrations of atomic hydrogen, methyl, and nitrogenous substances, etc. After introducing a small hole in the center of the molybdenum support susceptor, we found that no significant changes were found in the center area of the plasma, but the electron state in the plasma changed greatly on the surface above the susceptor. The electron number density was reduced by about 40%, while the electron temperature was reduced by about 0.02 eV, and the concentration of atomic nitrogen was decreased by about an order of magnitude. Moreover, we found that if a specific lower microwave input power is used, and a susceptor structure without the small hole is introduced, the change results similar to those in the surface area of the susceptor will be obtained, but the spatial distribution of electromagnetic field and reactant concentration will be changed.     

金刚石(001)面在Cu多种覆盖度下的稳定构型与电子特性

金刚石表面的电子特性很容易受到其表面覆盖物的影响,而目前表面稳定、性能优良的表面覆盖层依然处于研究与寻找中。本文研究的过渡金属Cu不仅在半导体微加工中被广泛使用,更由于过渡金属Cu与金刚石都具有优异的散热性能,因此Cu覆盖金刚石已经超出寻常电极使用的意义,其金属-半导体结构更具有表面修饰剪裁电子特性的功能。文中通过使用密度泛函模拟方法,研究了Cu的不同覆盖度(0.25 ML、0.5 ML和1 ML)下金刚石(001)表面的单原子吸附能、稳定构型以及稳定体系的能带结构特性。结果表明,各种覆盖度下的Cu原子在金刚石(001)表面具有较稳定的表面吸附构型,并且过渡金属Cu的覆盖使得金刚石(001)表面产生了约为-0.5~-0.3 eV的负电子亲和势,肖特基势垒高度约为-0.16~0.04 eV,这些理论结果与实验结果基本一致。因此过渡金属Cu作为表面覆盖层在金刚石基电子发射器方面具有重要的应用价值。     

Origin,characteristics, and suppression of residual nitrogen in MPCVD diamond growth reactor

Unintentional nitrogen incorporation has been observed in a set of microwave plasma chemical vapor deposition (MPCVD)-grown samples. No abnormality has been detected on the apparatus especially the base pressure and feeding gas purity. By a comprehensive investigation including the analysis of the plasma composition, we found that a minor leakage of the system could be significantly magnified by the thermal effect, resulting in a considerable residual nitrogen in the diamond material. Moreover, the doping mechanism of leaked air is different to pure nitrogen doping. The dosage of several ppm of pure nitrogen can lead to efficient nitrogen incorporation in diamond, while at least thousands ppm of leaked air is required for detecting obvious residual nitrogen. The difference of the dosage has been ascribed to the suppression effect of oxygen that consumes nitrogen. As the unintentional impurity is basically detrimental to the controllable fabrication of diamond for electronic application, we have provided an effective way to suppress the residual nitrogen in a slightly leaked system by modifying the susceptor geometry. This study indicates that even if a normal base pressure can be reached, the nitrogen residing in the chamber can be "activated" by the thermal effect and thus be incorporated in diamond material grown by a MPCVD reactor.     

N掺杂ZnO薄膜的接触特性

氧化锌(ZnO)是一种直接带隙半导体材料,室温下带隙为3.37eV,激子束缚能为60meV。ZnO因其优越的光电特性在高亮度蓝紫光发光器件、紫外探测器件和短波长激子型激光器等方面具有广阔的应用前景。而要实现大功率的光电器件,稳定可靠的欧姆接触是必需的。研究了氮气氛条件下,不同温度快速退火对氮掺杂ZnO样品的电学性质以及Ni/Au与其接触特性的影响。原生样品表现为弱的肖特基接触,适当温度退火后,由肖特基转成了欧姆接触,650℃退火后得到最小比接触电阻率8×10-4Ω·cm2。霍尔测量表明550℃快速退火后,样品的导电类型由p型转变成了n型。采用AES和GXRD分别研究了不同退火温度下Au、Ni、Zn、O的深度分布变化及退火后所生成的合金相。实验结果表明,退火所导致的薄膜电学性质的变化以及界面态和表面态的增加是接触特性变化的原因。     

纤锌矿Zn1-xMgxO极化特性的第一性原理GGA +U方法研究

高迁移率的二维电子气在纤锌矿结构Zn1-xMgxO/ZnO异质结构中被发现,二维电子气的产生很可能是由于这两种材料界面上存在不连续性极化.本文基于第一性原理GGA+U方法研究了Zn1-xMgxO合金的自发极化随Mg组分x的变化关系,其中极化特性的计算采用Berry-phase方法.我们将极化分为3个部分:电子极化、晶格极化以及压电极化,结果表明压电极化在总极化中起着主要作用.     

Theoretical optoelectronic analysis of intermediate-band photovoltaic material based on ZnY1-xOx （Y = S,Se, Te） semiconductors by first-principles calculations

The structural, energetic, and electronic properties of lattice highly mismatched ZnY1-xOx （Y = S, Se, Te） ternary alloys with dilute O concentrations are calculated from first principles within the density functional theory. We demonstrate the formation of an isolated intermediate electronic band structure through diluted O-substitute in zinc-blende ZnY （Y = S, Se, Te） at octahedral sites in a semiconductor by the calculations of density of states （DOS）, leading to a significant absorption below the band gap of the parent semiconductor and an enhancement of the optical absorption in the whole energy range of the solar spectrum. It is found that the intermediate band states should be described as a result of the coupling between impurity O 2p states with the conduction band states. Moreover, the intermediate bands （IBs） in ZnTeO show high stabilization with the change of O concentration resulting from the largest electronegativity difference between O and Te compared with in the other ZnSO and ZnSeO.     

第一性原理的广义梯度近似+U方法的纤锌矿Zn1-xMgxO极化特性与Zn0.75Mg0.25O/ZnO 界面能带偏差研究

在纤锌矿结构Zn_1-xMg_xO/ZnO异质结构中发现了高迁移率的二维电子气(2DEG), 2DEG 的产生很可能是由于界面上存在不连续极化, 而且2DEG通常也被认为是由极化电荷产生的结果. 为了探索2DEG的形成机理及其产生的根源, 研究Zn_1-xMg_xO合金的极化特性与ZnO/Zn_1-xMg_xO超晶格的能带排列是非常必要的. 基于第一性原理广义梯度近似+U方法研究了Zn_1-xMg_xO合金的自发极化随Mg组分x的变化关系, 其中极化特性的计算采用Berry-phase方法. 由于ZnO与Zn_1-xMg_xO 面内晶格参数大小相当, ZnO 与Zn_1-xMg_xO 的界面匹配度优良, 所以ZnO/Zn_1-xMg_xO 超晶格模型较容易建立. 计算了Mg_0.25Zn_0.75O/ZnO超晶格静电势的面内平均及其沿着Z(0001)方向上的宏观平均. (5+3)Mg_0.25Zn_0.75O/ZnO超晶格拥有较大的尺寸, 确保远离界面的Mg_0.25Zn_0.75O与ZnO区域与块体计算情况一致. 除此之外, 基于宏观平均为能量参考, 计算得到Mg_0.25Zn_0.75O/ZnO超晶格界面处价带偏差为0.26 eV, 并且导带偏差与价带偏差的比值处于合理区间, 这与近来实验上报道的结果相符. 除了ZnO在[0001]方向上产生自发极化外, 由于在ZnO中引入Mg杂质会产生应变应力, 导致Mg_xZn_1-xO层产生额外的极化值. 这样必然会在Mg_0.25Zn_0.75O/Zn界面处产生非连续极化现象, 促使单极性电荷在界面处积累, 从而在Mg_0.25Zn_0.75O/Zn超晶格中产生内在电场. 此外, 计算了Mg_0.25Zn_0.75O/ZnO超晶格的能带排列, 由于价带偏差Δ E_V=0.26 eV与导带偏差ΔE_C=0.33 eV, 表明能带遵循I型排列. Mg_0.25Zn_0.75O/ZnO 的这种能带排列方式足以让电子与空穴在势阱中产生禁闭作用. 2DEG在电子学与光电子学领域都有重要应用, 本文的研究结果将对Mg_0.25Zn_0.75O/ZnO 界面2DEG的设计与优化中起到重要作用, 并且可以作为研究其他Mg组分的Mg_xZn_1-xO/ZnO超晶格界面电子气特性的参考依据.