Design, Fabrication and Measurement of Ni/Ti Multilayer Used for Neutron Monochromator

Ni/Ti multilayers, which can be used for neutron monochromators, are designed, fabricated and measured. Firstly, their reflectivities are simulated based on the Nevot-Croce model. Reflectivities of two Ni/Ti multilayer mirrors with periods d = 10.3 nm （M1） and d = 7.8 nm （M2） are calculated. In the calculation, the reflectivity of the Ni/Ti multilayer is taken as a function of the gazing angle with different roughness factors δ =1.0 nm and = 1.5 nm. Secondly, these two multilayers are fabricated by the direct current magnetron sputtering technology. Thirdly their structures are characterized by small-angle x-ray diffraction. The roughness factors are fitted to be 0.68 nm and 1.16nm for M1 and M2, respectively. Finally their reflective performances are measured on the V14 neutron beam line at the Berlin Neutron Scattering Centre （BENSC）, Germany. The experimental data show that the grazing angle of the reflected neutron intensity peak increases, but the reflected neutron intensity decreases, with the decreasing periods of the multilayers.     

Design and Fabrication of Ni/Ti Multilayer for Neutron Supermirror

In the applications of neutron guides and focusing devices, by using the Ni/Ti multilayer supermirrors （SM）, the neutron flux is significantly enhanced, because the critical reflective angle of supermirrors increases m times compared to the one of natural bulk Ni. We design and fabricate the Ni/Ti multilayer supermirrors by considering the effect of the interfacial imperfection, such as interface roughness and diffusion, and by using the direct current magnetron sputtering technology. The reflective performances of these supermirrors are measured on a V14 neutron beam line at the Berlin Neutron Scattering Centre （BENSC）, Germany. The measurement data suggest that the critical angles of the supermirrors are 1.5 and 2.2 times that of bulk Ni, respectively.     

50~110 nm波段高反射率多层膜的设计与制备

阐述了50~110 nm强吸收波段亚四分之一波长多层膜的设计方法.这种膜系是由强吸收材料叠加而成，每层膜光学厚度小于四分之一个波长.与常规周期多层膜相比，这种膜系更适用于提高强吸收波段的反射率.利用该方法设计了50 nm处高反射多层膜，并以此为初始条件通过Levenberg-Marquart优化方法完成了50~110 nm强吸收波段宽带高反射率Si/W/Co多层膜的设计，其平均反射率达到45%.采用直流磁控溅射方法制备了Si/W/Co多层膜,用X射线衍射仪(XRD)对膜层结构进行了测试，测试结果表明制作出的多层膜结构与设计结构基本相符.     

High Spectral Resolution Mo/Si Multilayers Working at High Order Reflection

The high reflectance orders are used to improve the spectral resolution of Mo/Si multilayers. The multilayers for the first-, second- and third-order reflectance are designed and optimized, respectively. These multilayers are fabricated by using a directed current magnetron sputtering system, and the reflectivity is measured in an extreme ultraviolet range by synchrotron radiation. The experimental results show that the spectral resolution λ/Δλ（λ= 14 nm） increases from 24.6 for the first order to 66.6 for the third order.     

50～11O nm波段高反射率多层膜的设计与制备

阐述了50～110 nm强吸收波段亚四分之一波长多层膜的设计方法.这种膜系是由强吸收材料叠加而成,每层膜光学厚度小于四分之一个波长.与常规周期多层膜相比,这种膜系更适用于提高强吸收波段的反射率.利用该方法设计了50 nm处高反射多层膜,并以此为初始条件通过Levenberg-Marquart优化方法完成了50～110 nm强吸收波段宽带高反射率Si/W/Co多层膜的设计,其平均反射率达到45%.采用直流磁控溅射方法制备了Si/W/Co多层膜,用X射线衍射仪(XRD)对膜层结构进行了测试,测试结果表明制作出的多层膜结构与设计结构基本相符.