Effect of oxygen on regulation of properties of moderately boron-doped diamond films

Regulation of oxygen on properties of moderately boron-doped diamond films is fully investigated. Results show that, with adding a small amount of oxygen (oxygen-to-carbon ratio < 5.0%), the crystal quality of diamond is improved, and a suppression effect of residual nitrogen is observed. With increasing ratio of O/C from 2.5% to 20.0%, the hole concentration is firstly increased then reduced. This change of hole concentration is also explained. Moreover, the results of Hall effect measurement with temperatures from 300 K to 825 K show that, with adding a small amount of oxygen, boron and oxygen complex structures (especially B₃O and B₄O) are formed and exhibit as shallow donor in diamond, which results in increase of donor concentration. With further increase of ratio of O/C, the inhibitory behaviors of oxygen on boron leads to decrease of acceptor concentration (the optical emission spectroscopy has shown that it is decreased with ratio of O/C more than 10.0%). This work demonstrates that oxygen-doping induced increasement of the crystalline and surface quality could be restored by the co-doping with oxygen. The technique could achieve boron-doped diamond films with both high quality and acceptable hole concentration, which is applicable to electronic level of usage.     

MOCVD生长中载气H2对N掺杂ZnO性质的影响

采用MOCVD方法在石英衬底上生长ZnO。实验使用二乙基锌(DEZn)为锌源,N2O作为氧和氮源,H2作为载气。采用PL和Raman光谱方法对ZnO样品进行表征,结果表明H2的加入大幅度减少薄膜中碳的掺入,明显改善了薄膜的光学质量。采用N2O离化技术,可以进一步提高其带边峰的强度,抑制带内发光。XRD测量表明,生长的ZnO薄膜具有c轴择优取向。目前生长高质量N掺杂的p型ZnO薄膜是很困难的,而H2作为载气的加入明显改善了ZnO薄膜的光学性质,在生长过程中加入H2将为获得高质量N掺杂的p型ZnO薄膜提供一种途径。     

金属有机源化学气相沉积法生长氧化锌薄膜中氢气的作用及其机理

本文重点探讨了金属有机源化学气相沉积生长ZnO薄膜中氢气的作用与机理.研究表明氢气对ZnO薄膜的结构与性质具有重要的影响.当采用叔丁醇为氧源时,氢气对ZnO薄膜的晶体质量,表面结构和发光性质主要产生负面的影响,同时发现氢气的加入有助于抑制碳的沾污.而当采用笑气为氧源时,测量显示表面变光滑,晶体质量得到提高,发光强度也得到提升.氢气在笑气作为氧源生长ZnO的过程中基本起到了正面的作用.论文最后从氢气降低生长表面能量,提高表面原子迁移能力但存在表面腐蚀作用的方向以上结果给予了较好的解释.研究显示MOCVD生长高质量ZnO薄膜中氢气的优化具有特别重要的意义.     

离子注入对ZnTe:O中间带光伏材料的微观结构及光学特性的影响

II-VI和III-V族高失配合金半导体是新型高效中间带太阳电池的优选材料体系,但中间带的形成及其能带调控等关键问题仍未得到有效解决.采用氧离子注入方式,在非平衡条件下对碲化锌(Zn Te)单晶材料实现了等电子掺杂,深入研究了离子注入对Zn Te:O材料的微观结构和光学特性的影响.研究表明:注入合适浓度的氧离子(2.5×1018cm-3)将会形成晶格应变,并诱导1.80 e V(导带下0.45 e V)中间带的产生;而较高浓度(2.5×1020cm-3)的氧离子会导致Zn Te注入层表面非晶化,并增强与锌空位相关的深能级(～1.6 e V)发光.时间分辨光致发光结果显示,离子注入诱导形成的中间带主要是和氧等电子陷阱束缚的局域激子发光有关,载流子衰减寿命较长(129 ps).因此,需要降低晶格紊乱度和合金无序,实现电子局域态向扩展态的转变,从而有效调控中间带能带结构.     

Temperature dependence of spin pumping in YIG/NiOx/W multilayer

We report the temperature dependence of the spin pumping effect for Y₃Fe₅O₁₂ (YIG, 0.9 μm)/NiO (t_NiO)/W (6 nm) (t_NiO = 0 nm, 1 nm, 2 nm, and 10 nm) heterostructures. All samples exhibit a strong temperature-dependent inverse spin Hall effect (ISHE) signal I_c and sensitivity to the NiO layer thickness. We observe a dramatic decrease of I_c with inserting thin NiO layer between YIG and W layers indicating that the inserting of NiO layer significantly suppresses the spin transport from YIG to W. In contrast to the noticeable enhancement in YIG/NiO (t_NiO ≈ 1-2 nm)/Pt, the suppression of spin transport may be closely related to the specific interface-dependent spin scattering, spin memory loss, and spin conductance at the NiO/W interface. Besides, the I_c of YIG/NiO/W exhibits a maximum near the T_N of the AF NiO layer because the spins are transported dominantly by incoherent thermal magnons.     

ZnMgO/ZnO异质结构中二维电子气的研究

论文根据ZnMgO/ZnO异质结构二维电子气的能带结构及相关理论模型, 采用一维Poisson-Schrodinger方程的自洽求解, 模拟计算了ZnMgO/ZnO异质结构中二维电子气的分布及其对ZnMgO势垒层厚度及Mg组分的依赖关系. 研究发现该异质结构中ZnMgO势垒层厚度存在一最小临界值: 当垒层厚度小于该临界值时, 二维电子气消失, 当垒层厚度大于该临界值时, 其二维电子气密度随着该垒层厚度的增加而增大; 同时研究发现ZnMgO势垒层中Mg组分的增加将显著增强其二维电子气的行为, 导致二维电子气密度的明显增大; 论文对模拟计算获得的结果与相关文献报道的实验结果进行了比较, 并从极化效应和能带结构的角度进行了分析和讨论, 给出了合理的解释. 关键词： 氧化锌 二维电子气 异质结构 理论计算     

193 nm激光引发PET表面的化学接枝

将聚对苯二甲酸乙二醇酯[Poly(ethylene terephthalate), PET]材料置于氨气气氛中, 利用激光光子同时激发材料表面及氨气形成自由基, 用激光引发反应并促进氨基在材料表面的接枝. 改性后的测试结果表明, 材料表面粗糙度没有显著变化, 但水接触角的减小表明表面化学结构发生了某种变化. 傅里叶变换红外光谱(FTIR/ATR)图谱在3352和1613 cm-1处出现了新的氨基吸收峰, 证实了表面接枝了氨基. 同时X射线光电子能谱(XPS)也证明了材料表面C—N键的存在, 其C1s结合能为285.5 eV, N1s为398.9 eV. 飞行时间二次离子质谱(Tof-SIMS)也检测到含氨基的分子碎片, 其碎片成像图显示接枝仅发生在激光辐照部位. 实验结果表明, 激光能在生物材料表面进行局部区域的选择性接枝.     

Significant suppression of residual nitrogen incorporation in diamond film with a novel susceptor geometry employed in MPCVD

This work proposed to change the structure of the sample susceptor of the microwave plasma chemical vapor deposition (MPCVD) reaction chamber, that is, to introduce a small hole in the center of the susceptor to study its suppression effect on the incorporation of residual nitrogen in the MPCVD diamond film. By using COMSOL multiphysics software simulation, the plasma characteristics and the concentration of chemical reactants in the cylindrical cavity of MPCVD system were studied, including electric field intensity, electron number density, electron temperature, the concentrations of atomic hydrogen, methyl, and nitrogenous substances, etc. After introducing a small hole in the center of the molybdenum support susceptor, we found that no significant changes were found in the center area of the plasma, but the electron state in the plasma changed greatly on the surface above the susceptor. The electron number density was reduced by about 40%, while the electron temperature was reduced by about 0.02 eV, and the concentration of atomic nitrogen was decreased by about an order of magnitude. Moreover, we found that if a specific lower microwave input power is used, and a susceptor structure without the small hole is introduced, the change results similar to those in the surface area of the susceptor will be obtained, but the spatial distribution of electromagnetic field and reactant concentration will be changed.     

氧化锌基材料、异质结构及光电器件

Ⅱ-Ⅵ族直接带隙化合物半导体氧化锌(ZnO)的禁带宽度为3.37 eV,室温下激子束缚能高达60 meV,远高于室温热离化能(26 meV),是制造高效率短波长探测、发光和激光器件的理想材料。历经10年的发展,ZnO基半导体的研究在薄膜生长、杂质调控和器件应用等方面的研究获得了巨大的进展。本文主要介绍了以国家"973"项目(2011CB302000)研究团队为主体,在上述方面所取得的研究进展,同时概述国际相关研究,主要包括衬底级ZnO单晶的生长,ZnO薄膜的同质、异质外延,表面/界面工程,异质结电子输运性质、合金能带工程,p型掺杂薄膜的杂质调控,以及基于上述结果的探测、发光和激光器件等的研究进展。迄今为止,该团队已经实现了薄膜同质外延的二维生长、硅衬底上高质量异质外延、基于MgZnO合金薄膜的日盲紫外探测器、可重复的p型掺杂、可连续工作数十小时的同质结紫外发光管以及模式可控的异质结微纳紫外激光器件等重大成果。本文针对这些研究内容中存在的问题和困难加以剖析并探索新的研究途径,期望能对ZnO材料在未来的实际应用起到一定的促进作用。     

ZnO/ZnMgO异质结场效应管的制备与性能研究

利用等离子体增强化学气相沉积(PECVD)技术,在ZnO/ZnMgO异质结构上制备SiO₂作为栅绝缘层,采用光刻与腐蚀工艺制备ZnO/ZnMgO异质结场效应管。电学性能测试及计算结果表明器件栅压调控作用明显。发现栅端漏电流对器件性能造成一定影响。在低温条件下,栅绝缘层产生钝化,从而能够改善器件的性能。