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高端芯片制造所需要的极紫外光刻技术位于我国当前面临35项"卡脖子"关键核心技术之首.高转换效率的极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用双激光脉冲打靶技术实现较强的6.7 nm极紫外光输出.首先,理论计算Gd18+—Gd27+离子最外层4d壳层的4p-4d和4d-4f能级之间跃迁、以及Gd14+—Gd17+离子最外层4f壳层的4d-4f能级之间跃迁对波长为6.7 nm附近极紫外光的贡献.其后开展实验研究,结果表明,随着双脉冲之间延时的逐渐增加,波长为6.7 nm附近的极紫外光辐射强度呈现先减弱、后增加、之后再减弱的变化趋势,在双脉冲延时为100 ns处产生的极紫外光辐射最强.并且,在延时为100 ns处产生的光谱效率最高,相比于单脉冲激光产生的光谱效率提升了33%.此外,发现双激光脉冲打靶技术可以有效地减弱等离子体的自吸收效应,获得的6.7 nm附近极紫外光谱宽度均小于单激光脉冲打靶的情形,且在脉冲延时为30 ns时刻所产生的光谱宽度最窄,约为单独主脉冲产生极紫外光谱宽度的1/3.同时...  相似文献   
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This review article covers the growth and characterization of two-dimensional (2D) crystals of transition metal chalcogenides, h-BN, graphene, etc. The chemical vapor transport method for bulk single crystal growth is discussed in detail. Top-down methods like mechanical and liquid exfoliation and bottom-up methods like chemical vapor deposition and molecular beam epitaxy for mono/few-layer growth are described. The optimal characterization techniques such as optical, atomic force, scanning electron, and Raman spectroscopy for identification of mono/few-layer(s) of the 2D crystals are discussed. In addition, a survey was done for the application of 2D crystals for both creation and deterministic transfer of single-photon sources and photovoltaic systems. Finally, the application of plasmonic nanoantenna was proposed for enhanced solar-to-electrical energy conversion and faster/brighter quantum communication devices.  相似文献   
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Abstract

Enlightened by the Caputo fractional derivative, the present study deals with a novel mathematical model of generalized thermoelasticity to investigate the transient phenomena due to the influence of magnetic field and moving heat source in a rod in the context of three-phase lag (TPL) theory of thermoelasticity. Both ends of the rod are fixed and heat insulated. Employing Laplace transform as a tool, the problem has been transformed into the space-domain and solved analytically. Finally, solutions in the real-time domain are obtained by applying the inverse Laplace transform. Numerical calculation for stress, displacement, and temperature within the rod is carried out and displayed graphically. The effect of moving heat source speed on temperature, stress, and temperature is studied. It is found from the distributions that the temperature, thermally induced displacement and stress of the rod are found to decrease at large source speed. For the better understanding of the effect of moving heat source on all the distributions, three animations are added.  相似文献   
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In this paper, we consider an elastic beam equation with delay, source term, and boundary conditions together with some suitable initial data. Using the Faedo-Galerkin approximation and some estimates, we get the local existence of solution. Moreover, we obtain the finite time blow-up of solution by constructing suitable Lyapunov functionals.  相似文献   
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《Physics letters. A》2019,383(18):2201-2206
This investigation presents the unsteady rheology of Maxwell nanomaterial induced to flow over an inclined surface. Simultaneous effects of stratification, thermal radiation, heat source/sink and magnetic field are taken into account. Viscous dissipation and mixed convection due to concentration and temperature differences are also analyzed. The governing partial differential equations for the Maxwell nanofluid which incorporate the effects of Brownian and thermophoresis effects are simplified by using appropriate similarity transformations, and solved analytically by using homotopy analysis method (HAM). The effects of involved physical parameters on the flow field are analyzed graphically and numerically.  相似文献   
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Furofuran lignans containing the 2,6-diaryl-3,7-dioxabicyclo[3.3.0]octane skeleton, represent one of the major subclasses of the lignan family of natural products. Furofuran lignans feature a wide variety of structures due to different substituents at aryl groups and diverse configurations at furofuran ring. Moreover, they exhibit a wide range of significant biological activities, including antioxidant, anti-inflammatory, cytotoxic, and antimicrobial activities. This review summarizes source, phytochemistry, and biological activities of 137 natural furofuran lignans isolated from 53 species in 41 genera of 27 plant families for the last 20 years, which provides a comprehensive information for further research of these furofuran lignans as potential pharmaceutical agents.  相似文献   
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光谱光源是光谱仪器和光谱技术的核心,等离子体光源是原子发射光谱技术的活跃领域之一,电感耦合等离子体(ICP)已成功地应用于原子发射光谱和无机质谱仪器。由于ICP光源采用氩气作为工作气体,耗量较大,降低氩气用量成为近些年来原子光谱技术研究和改进的重要目标。为此目的,已研究过各种低耗氩ICP光源,非氩气ICP光源,微波等离子体光源,射频电容耦合等离子体光源等。综述了近年这些等离子体发射光源的结构,分析性能及特点,以及它们所用工作气体情况。并归纳总结出,评价各种等离子体发射光谱光源应包括:等离子体温度(激发温度,气体温度),电子密度,工作气体种类及用量,元素检出限,光源的稳健性及经济方面等。  相似文献   
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