双激光脉冲打靶形成Gd等离子体的极紫外光谱辐射

高端芯片制造所需要的极紫外光刻技术位于我国当前面临35项"卡脖子"关键核心技术之首.高转换效率的极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用双激光脉冲打靶技术实现较强的6.7 nm极紫外光输出.首先,理论计算Gd¹⁸⁺—Gd²⁷⁺离子最外层4d壳层的4p-4d和4d-4f能级之间跃迁、以及Gd¹⁴⁺—Gd¹⁷⁺离子最外层4f壳层的4d-4f能级之间跃迁对波长为6.7 nm附近极紫外光的贡献.其后开展实验研究,结果表明,随着双脉冲之间延时的逐渐增加,波长为6.7 nm附近的极紫外光辐射强度呈现先减弱、后增加、之后再减弱的变化趋势,在双脉冲延时为100 ns处产生的极紫外光辐射最强.并且,在延时为100 ns处产生的光谱效率最高,相比于单脉冲激光产生的光谱效率提升了33%.此外,发现双激光脉冲打靶技术可以有效地减弱等离子体的自吸收效应,获得的6.7 nm附近极紫外光谱宽度均小于单激光脉冲打靶的情形,且在脉冲延时为30 ns时刻所产生的光谱宽度最窄,约为单独主脉冲产生极紫外光谱宽度的1/3.同时...     

Fast computation of generic bivariate resultants

We prove that the resultant of two “sufficiently generic” bivariate polynomials over a finite field can be computed in quasi-linear expected time, using a randomized algorithm of Las Vegas type. A similar complexity bound is proved for the computation of the lexicographical Gröbner basis for the ideal generated by the two polynomials.     

B(X)上保持约当积的固定点的满射

设B(X)是维数大于等于3的复Banach空间X上有界线性算子全体构成的代数.设A∈B(X),若Ax=x,则称x∈X是算子A的固定点.Fix(A)表示A的所有固定点的集合.本文刻画了B(X)上保持算子的Jordan积的固定点的满射.     

The Green polynomials via vertex operators

An iterative formula for the Green polynomial is given using the vertex operator realization of the Hall-Littlewood function. Based on this, (1) a general combinatorial formula of the Green polynomial is given; (2) several compact formulas are given for Green's polynomials associated with upper partitions of length ≤3 and the diagonal lengths ≤3; (3) a Murnaghan-Nakayama type formula for the Green polynomial is obtained; and (4) an iterative formula is derived for the bitrace of the finite general linear group G and the Iwahori-Hecke algebra of type A on the permutation module of G by its Borel subgroup.