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沈钰  李冰冰  马艺  王增林 《电化学》2022,28(7):2213002
随着半导体集成度的不断提高,铜互连线的电阻率迅速提高。当互连线宽度接近7 nm时,铜互连线的电阻率与钴接近。IBM和美国半导体公司(ASE)已经使用金属钴取代铜作为下一代互连线材料。然而,钴种子层的形成和超级电镀钴填充7 nm微孔的技术工艺仍是一个很大的挑战。化学镀是在绝缘体表面形成金属种子层的一种非常简单的方法, 通过超级化学镀填充方式, 直径为几纳米的盲孔可以无空洞和无缝隙的方式完全填充。本文综述了化学镀钴的研究进展,并分析了还原剂种类对化学镀钴沉积速率和镀膜质量的影响。同时, 在长期从事超级化学填充研究的基础上, 作者提出了通过超级化学镀钴技术填充7 nm以及一下微盲孔的钴互连线工艺。  相似文献   
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Large amounts of flowback and produced water (FPW) have been generated from hydraulic fracturing process for the production of unconventional gas such as shale gas. Complex organic pollutants are abundantly present in FPW with revealed toxicity to aquatic organisms and these contaminants may transfer into surrounding aquatic environment. Characterization and determination of complicated organic pollutants in FPW remains a challenge due to its complex composition and high salinity matrix. This review article covers the progress of recent 5 years regarding the sample preparation and instrumental analysis methods and thus summarizes the advantages and disadvantages of these methods for critical analysis of organic contaminants in FPW samples. Furthermore, the natural distribution of detected organic compounds and their transformation were reviewed and discussed to enhance the understanding of spatial and temporal behaviors of these organic pollutants in natural environment, paving the way for future development of pollution control policies and strategies. Enlightened by the studies of FPW contamination in the US, the investigations of FPW contamination in China continued to grow due to rapidly growing production of shale gas in China and resulted pollution.  相似文献   
4.
传统的塑料闪烁体由于其低有效原子序数和密度,不适用于能谱探测领域。有机重金属化合物掺杂塑料闪烁体的制备为塑料闪烁体实现能谱探测提供了一种有效途径。而有机锡化合物掺杂塑料闪烁体具有高光峰灵敏度,并保留了塑料闪烁体的快衰减特性。本文通过自由基聚合的方法成功制备了不同浓度2-(三丁基锡烷基)呋喃掺杂的聚乙烯基甲苯(PVT)基塑料闪烁体,并对其光学和闪烁性能进行了测试和比较。其中掺杂20%2-(三丁基锡烷基)呋喃的PVT基塑料闪烁体的透光率可达90%,X射线激发发射光谱主峰位于425 nm处,光产额为6700 ph/MeV,能量分辨率为15.8%@662 keV,衰减时间约为4.3 ns。我们也制备了1英寸直径、掺杂20%2-(三丁基锡烷基)呋喃的塑料闪烁体,具有6300 ph/MeV的光产额和15.8%@662 keV的能量分辨率。  相似文献   
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In this work, the isolation step in the linear ion trap was performed using different “q values” conditions at a low collision-induced dissociation (CID) energy leading to the parent ion resolution improvements, reasonably due to better ion energy distribution. According to the results, we obtained a greater resolution and mass accuracy operating in both traditional electrospray and low voltage ionization near the q value = 0.778 and with a CID energy of 10%. This effect was evaluated with low-molecular-mass compounds (skatole and arginine). The proposed optimization yielded a superior instrument performance without adding technological complexity to mass spectrometry analyses.  相似文献   
6.
Ionic liquids have been functionalized for modern applications. The functional ionic liquids are also called task‐specific ionic liquids. Various task‐specific ionic liquids with certain groups have been constructed and exploited widely in the field of separation. To take advantage of their properties in separation science, task‐specific ionic liquids are generally used in techniques such as liquid–liquid extraction, solid‐phase extraction, gas chromatography, high‐performance liquid chromatography, and capillary electrophoresis. This review mainly covers original research papers published in the last five years, and we will focus on task‐specific ionic liquids as the chiral selectors in chiral resolution and as extractant or sensor for biological samples and metal ion purification.  相似文献   
7.
Dan‐Huang‐Qu‐Yu capsule, a Chinese herbal medicine compound preparation, is widely used for chronic pelvic inflammatory disease. In this study, a rapid, selective, and sensitive microwave‐assisted extraction ultra‐high‐performance liquid chromatography‐Q Exactive quadrupole‐orbitrap high‐resolution mass spectrometry method was developed for analyzing its chemical compositions. A total of 85 compounds, including 22 flavonoids, 8 terpenoids, 5 quinones, 5 phthaleolactone, 23 organic acids, and 22 other compounds were identified from Dan‐Huang‐Qu‐Yu capsule. Among them, 35 major compounds were unambiguously detected by comparing them with reference standards and selected as quality control markers, which were simultaneously determined in Dan‐Huang‐Qu‐Yu capsule. The established method was successfully validated and applied for simultaneous determination of 35 bioactive compounds in Dan‐Huang‐Qu‐Yu capsule from ten sample batches. The quantitative data of the analytes were analyzed by principal component analysis for quality assessment of Dan‐Huang‐Qu‐Yu capsule. Six compounds (e.g., astragaloside IV, salvianolic acid B, ellagic acid, chlorogenic acid, N‐butylidenephthalide, and luteolin) were screened out and regarded as chemical markers for quality control of Dan‐Huang‐Qu‐Yu capsule. The established method has been proved to be a novel and useful tool for rapid research of Dan‐Huang‐Qu‐Yu capsule. This research will provide reference for the scientific research of traditional Chinese medicines.  相似文献   
8.
建立了水产品中11种海洋生物毒素的高效液相色谱-四极杆/静电场轨道阱高分辨质谱(HPLC-Q-Orbitrap HRMS)检测方法。该方法采用分级提取原理,结合分散固相萃取技术(dSPE)和载体辅助液液萃取技术(SLLE),建立了对亲水性及亲脂性海洋生物毒素的"一站式"提取净化体系。在优化条件下,11种毒素在一定质量浓度范围内具有良好的线性关系,相关系数(r)均大于0.99。该方法对11种毒素的检出限为1~10μg/kg,定量下限为2~20μg/kg,加标回收率为55.6%~122%,相对标准偏差为5.4%~16%。方法快速高效,可操作性强,解决了不同理化性质的海洋生物毒素的通用性检测问题,可满足水产品中海洋生物毒素的快速筛查要求。  相似文献   
9.
在国内发展了硬X射线微束掠入射实验方法,并将此具有微米级高空间分辨率的方法应用于纳米厚度薄膜的微区分析。该实验方法对分析样品表面或薄膜在微小区域的不均匀组分、结构、厚度、粗糙度和表面元素化学价态等信息具有重要意义。基于X射线全反射原理,以微聚焦实验站的高通量、能量可调的单色微束X射线为基础,通过集成运动控制、光强探测、衍射和荧光探测,设计了掠入射实验方法的控制和数据采集系统。此系统采用分布式控制结构,并基于Experimental Physics and Industrial Control System (EPICS)环境设计SPEC控制软件。通过建立SPEC和EPICS的访问通道,实现SPEC软件对EPICS平台上设备的控制和数据获取。在所设计的控制和数据采集系统中,运动控制系统控制多维样品台电机的运动,实现定位样品位置和调节掠入射角;光强探测系统则监测样品出射光强度,通过样品台运动控制和光强探测的联控,实现样品台的扫描定位控制;通过衍射和荧光探测系统获取不同入射深度下样品的衍射峰强度和荧光计数。此外,为准确控制掠入射角角度,必须确定样品平面与X射线平行的零角度位置,对此给出一种自动定位零角度的方法,编写了该方法的控制算法,设计了相应的控制软件。零角度自动化定位的扫描结果表明,实验系统微区分析的空间分辨率达到2.8 μm,零角度定位精度小于±0.01°。利用该系统在上海光源微聚焦实验站首次实现了具有自动化准确控制零角度的微束掠入射X射线衍射和荧光同步表征的实验方法,实验中被测样品为10 nm Au/Cr/Si薄膜材料,Si基底最上层为10 nm厚的Au薄膜,其间为一层很薄的Cr粘附层。在不同掠入射角下测量样品的衍射信号,获取不同入射深度下样品的衍射峰强度,并实现在同一掠入射角下,同步采集样品的荧光计数信号,从而确定了样品表层的相结构信息以及荧光信号强度与入射角关系,实现了对纳米厚度薄膜在微小区域的相结构和组分分析。此外,通过该技术能够选取荧光计数最大值对应的入射角度,有助于提高后续发展的低浓度样品掠入射X射线吸收近边结构实验方法的信噪比。  相似文献   
10.
Peak-sharpening is an effective method for the peak position detection of overlapped spectra. However, the weighing factor parameter strongly affects the sharpening performance, and the derivative adopted in the peak-sharpening method is sensitive to noise. In this paper, an adaptive peak-sharpening method based on weighting factor selection is proposed. The relationship between the sharpening ratio and weighting factor is studied. In addition, the Savitzky–Golay filter is adopted due to its excellent noise reduction and peak shape retention abilities. First, the smoothed signal and second-order derivative signal are obtained by the Savitzky–Golay filter. Then, the parameters of the overlapped peaks are estimated for the weighting factor selection. Next, the peak position is detected by the peak-sharpening method. After that step, the estimated parameters are updated, and the above steps are iterated until the detection of the peak position converges. Finally, the converged results are considered to be the final detection results. The experimental results using a simulated dataset, a virtual mass spectra dataset and a polarography dataset show that the proposed method is effective for peak position detection.  相似文献   
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