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在光学读出非制冷红外热像仪焦平面阵列(FPA,Focal Plane Array)真空封装结构中,硼硅玻璃和双面镀增透膜的锗片分别作为透可见光和透红外光的窗口材料.由于锗窗上增透膜不能承受高温(<250℃),同时FPA也不能承受高温(<100℃),因此封装过程须在低温下进行,并对锗窗上的增透膜及FPA进行保护.本文提出了一种用于锗-硼硅玻璃低温扩散焊接的局部加热方法.该方法从导热系数较大的锗窗外表面加热(200℃),而导热系数较小的硼硅玻璃窗口外表面维持低温(60℃).有限元模拟计算结果表明,该加热过程稳态情况下待焊接区域温度约200℃,满足低温焊接的温度要求.锗窗上温度(200℃)低于250℃,且FPA区域的温升在75℃以下.用实验方法对模拟结果进行了验证,实验结果同模拟结果一致,证明该方法能够有效地保护FPA及锗窗上的增透膜. 相似文献
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We propose a substrate-free focal plane array (FPA) in
this paper. The solid substrate is completely removed, and the
microcantilevers extend from a supporting frame. Using finite
element analysis, the thermal and mechanical characterizations
of the substrate-free FPA are presented. Because of the large
decrease in thermal conductance, the supporting frame is temperature
dependent, which brings out a unique feature: the lower the thermal
conductance of the supporting frame is, the higher the energy
conversion efficiency in the substrate-free FPA will be. The results
from the finite element analyses are consistent with our
measurements: two types of substrate-free FPAs with pixel sizes
of 200× 200 and 60× 60~μ m2 are implemented
in the proposed infrared detector. The noise equivalent temperature
difference (NETD) values are experimentally measured to be 520 and
300~mK respectively. Further refinements are considered in various
aspects, and the substrate-free FPA with a pixel size of 30×
30~μ m2 has a potential of achieving an NETD value of
10~mK. 相似文献
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系统响应率是光学读出微梁焦平面阵列(Focal Plane Array,FPA)红外成像的关键性能参数。在刀口滤波光学读出技术中,系统响应率的主要组成部分——光学读出灵敏度与微梁反光板的长度密切相关,并受到反光板弯曲变形的严重影响。由于残余应力在制作过程中不可避免地存在,微梁反光板都有弯曲变形,膜厚相同的反光板具有相同的变形曲率半径。本文利用傅里叶光学分析了反光板长度和弯曲变形对光学读出灵敏度的影响,构建并实验验证光学读出灵敏度理论模型。根据该模型,分析了系统响应率与反光板长度之间关系,理论分析与实验结果相符。结果表明,通过减薄SiNx厚度并使反光板处于该厚度下的最优长度,不仅能提高红外成像的系统响应率,而且能同时提高红外成像的空间分辨率。 相似文献
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