双激光脉冲打靶形成Gd等离子体的极紫外光谱辐射

高端芯片制造所需要的极紫外光刻技术位于我国当前面临35项"卡脖子"关键核心技术之首.高转换效率的极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用双激光脉冲打靶技术实现较强的6.7 nm极紫外光输出.首先,理论计算Gd¹⁸⁺—Gd²⁷⁺离子最外层4d壳层的4p-4d和4d-4f能级之间跃迁、以及Gd¹⁴⁺—Gd¹⁷⁺离子最外层4f壳层的4d-4f能级之间跃迁对波长为6.7 nm附近极紫外光的贡献.其后开展实验研究,结果表明,随着双脉冲之间延时的逐渐增加,波长为6.7 nm附近的极紫外光辐射强度呈现先减弱、后增加、之后再减弱的变化趋势,在双脉冲延时为100 ns处产生的极紫外光辐射最强.并且,在延时为100 ns处产生的光谱效率最高,相比于单脉冲激光产生的光谱效率提升了33%.此外,发现双激光脉冲打靶技术可以有效地减弱等离子体的自吸收效应,获得的6.7 nm附近极紫外光谱宽度均小于单激光脉冲打靶的情形,且在脉冲延时为30 ns时刻所产生的光谱宽度最窄,约为单独主脉冲产生极紫外光谱宽度的1/3.同时...     

Electrochemical sensing of H2O2 using cobalt oxide modified TiO2 nanotubes

Cobalt oxide (Co₃O₄) modified anatase titanium dioxide nanotubes (ATNTs) have been investigated for the electrochemical sensing of hydrogen peroxide (H₂O₂). ATNTs have been synthesized by a two-step anodization process. ATNTs were then modified with Co₃O₄ employing chemical bath deposition method. The structure and morphology of ATNTs and their modification with Co₃O₄ has been confirmed by X-ray diffraction by scanning electron microscopy. H₂O₂ sensing has been studied in 0.1 M PBS solution, by cyclic voltammetry and amperometry. Variation in the peak positions and current densities was observed with addition of H₂O₂ for Co₃O₄ modified ATNTs. Sensitivity and limit of detection improved with modification of ATNTs with Co₃O₄ with precursor concentration up to 0.8 M. However, at higher precursor concentrations sensitivity and limit of detection toward H₂O₂ deteriorated. Co₃O₄ Modified ATNTS using 0.8 M precursor concentration are comparatively more suitable for H₂O₂ sensing applications due to the optimum formation of Co₃O₄/ATNTs heterojunctions.     

雾化辅助化学气相沉积法氧化镓薄膜生长研究

采用自主设计搭建的雾化辅助化学气相沉积系统设备,开展了Ga₂O₃薄膜制备及其特性研究工作。通过X射线衍射研究了沉积温度、系统沉积压差对Ga₂O₃薄膜结晶质量的影响。结果表明,Ga₂O₃在425~650 ℃温度区间存在物相转换关系。随着沉积温度从425 ℃升高至650 ℃,薄膜结晶分别由非晶态、纯α-Ga₂O₃结晶状态向α-Ga₂O₃、β-Ga₂O₃两相混合结晶状态改变。通过原子力显微镜表征探究了生长温度对Ga₂O₃薄膜表面形貌的影响,从475 ℃升高至650 ℃时,薄膜表面粗糙度由26.8 nm下降至24.8 nm。同时,高分辨X射线衍射仪测试表明475 ℃、5 Pa压差条件下的α-Ga₂O₃薄膜样品半峰全宽仅为190.8″,为高度结晶态的单晶α-Ga₂O₃薄膜材料。     

Review on ionization and quenching mechanisms of Trichel pulse

Trichel pulse is a kind of pulsed mode in negative DC corona discharge, which has attracted significant attention because of its considerable applications in industry. Over eighty years, plenty of effort including simulations and experiments has been spent to reveal the ionization and quenching mechanisms of Trichel pulse. By revisiting and summarizing the basic characteristics and well-accepted ionization and quenching mechanisms, this review provides a basic understanding and the current status of Trichel pulse.     

On the self-similar solution to the Euler equations for an incompressible fluid in three dimensions

The equations for a self-similar solution to an inviscid incompressible fluid are mapped into an integral equation that hopefully can be solved by iteration. It is argued that the exponents of the similarity are ruled by Kelvin's theorem of conservation of circulation. The end result is an iteration with a nonlinear term entering a kernel given by a 3D integral for a swirling flow, likely within reach of present-day computational power. Because of the slow decay of the similarity solution at large distances, its kinetic energy diverges, and some mathematical results excluding non-trivial solutions of the Euler equations in the self-similar case do not apply.     

An efficient nonpolynomial spline method for distributed order fractional subdiffusion equations

In this paper, we propose an efficient numerical method for a distributed order fractional subdiffusion problem using nonpolynomial spline approach. The solvability, stability, and convergence of the scheme are established rigorously, and it is shown that the spatial convergence order improves some previous work done. Simulation is then conducted to verify the accuracy of the proposed scheme as well as to compare with earlier work.