飞秒激光烧蚀硅表面产生等离子体的发射光谱研究

对中心波长为800 nm,脉宽为100 fs的激光脉冲烧蚀空气中硅(111)产生的等离子体发射光谱进行了时间和空间分辨研究. 结果表明,在等离子体羽膨胀初期(小于50 ns时间范围内),等离子体发射光谱主要由连续光谱构成,此后连续光谱强度逐渐减弱,线状光谱开始占主导地位;在羽体膨胀过程中离子谱线的存在时间短于原子谱线的存在时间. 由时间分辨发射光谱发现在羽体膨胀过程中等离子体辐射波长存在红移现象,波长红移量随时间演化呈二次指数衰减. 最后给出等离子体发射光谱谱线强度的时空演化规律. 关键词： 飞秒激光 脉冲激光烧蚀 等离子体 发射光谱     

LIBS分析模型对铝合金定量分析精度的影响

为了提高铝合金定量分析的精度,将激光诱导击穿光谱技术与多变量线性回归、中值高斯核支持向量机回归及标准化偏最小二乘回归等方法相结合,建立铝合金中 Cu元素定量分析模型。对采集的LIBS光谱进行三阶极小值去背景和小波阈值降噪处理,从而提高LIBS光谱的信背比。将处理后数据筛选最佳训练集、预测集并用多变量线性回归、中值高斯核支持向量机回归法和标准化偏最小二乘拟合回归等建立定标模型。选用 Cu Ⅰ 324.80 nm,Cu Ⅰ 327.43 nm两条特征谱线以及323～329 nm范围内的LIBS光谱数据进行定量分析,对比分析三种LIBS定量分析模型的拟合系数(R2)、定标均方根误差(RMSEC)、预测均方根误差(RMSEP)和平均相对误差(ARE)等。结果表明,相对于多变量线性回归和中值高斯核支持向量机回归法两种LIBS定量分析模型,对于铝合金中的Cu元素定量分析,标准化PLSR模型的精度和准确度都有明显的提高,并且LIBS定标曲线的R2,RMSEC,RMSEP和ARE分别为0.997,0.014 Wt%,0.129 Wt%和3.053%。研究结果表明在提高定标模型精确度与泛化性方面,标准化PLSR方法更具有优势,能够有效地减小参数波动和自吸收效应对铝合金定量分析的影响。     

磁场约束下激光诱导等离子体光谱强度演化研究

对磁场约束下激光诱导铜等离子体光谱强度演化进行了实验研究,分析了在磁场约束环境下的等离子体光谱强度演化过程以及激光能量对光谱增强的影响.实验结果表明:在磁场约束下铜等离子体内原子光谱和离子光谱均有所增强,在磁场约束下Cu I 510.55 nm谱线强度时间演化过程中在1.2—5.7μs时间范围内附近出现双峰结构,在距离靶材表面0—1.4 mm空间范围内磁场约束Cu I 510.55 nm光谱增强明显.Cu I510.55 nm和Cu I 515.32 nm光谱增强因子随激光能量的增加呈单调递减变化,激光能量20 mJ时增强因子最大分别为11和8.对磁场约束下等离子体发射光谱强度增强的物理原因进行了探讨.     

Mitigation of energetic ion debris from Gd plasma using dual laser pulses and the combined effect with ambient gas

For the next-generation beyond extreme ultraviolet lithography(EUVL) sources, gadolinium(Gd) plasma with emission wavelength at 6.7 nm seems to be the leading candidate. Similar to the Sn target 13.5 nm light source, ion debris mitigation is one of the most important tasks in the laser-produced Gd plasma EUV source development. In this paper,a dual-laser-pulse scheme, which uses a low energy pulse to produce a pre-plasma and a main pulse after a time delay to shoot the pre-plasma, is employed to mitigate the energetic ion generation from the source. Optimal conditions(such as pre-pulse energy and wavelength, and the time delay between the pre-pulse and the main pulse for mitigating the ion energy) are experimentally obtained, and with the optimal conditions, the peak of the ion energy is found to be reduced to1/18 of that of a single laser pulse case. Moreover, the combined effect by applying ambient gas to the dual-pulse scheme for ion debris mitigation is demonstrated, and the result shows that the yield of Gd ions is further reduced to around 1/9 of the value for the case with dual laser pulses.     

飞秒激光等离子体的光学诊断

使用飞秒激光探针法,对飞秒激光等离子体膨胀过程进行了光学诊断.实验得到了不同时刻的等离子体阴影图和干涉图.大尺度环形自生磁场对等离子体产生了挤压,磁场的横向约束导致等离子体的宏观非对称性和jet结构.等离子体在纵向的膨胀尺度呈现t^1/2变化规律.     

Theory of multiphoton photoemission disclosing excited states in conduction band of individual TiO2 nanoparticles

A theory of multiphoton photoemission is derived to explain the experimentally observed monotonic decrease with the wavelength in the electron yield of TiO₂ nanoparticles (NPs) by as large as four orders of magnitude. It is found that the fitting parameter corresponds to the energy position of Ti3d e_g and t_2g states, and the derived theory is a novel diagnostic of excited states in the conduction band, very importantly, applicable to individual NPs. The difference between four-photon slope NPs and three-photon slope NPs is attributed to the difference in defect density. The success of the theory in solving the puzzling result shows that thermal emission from high-lying levels may dominate over direct multiphoton ionization in solids when the photon number larger than four is required.     

磁约束飞秒激光诱导铜等离子体特性研究

建立磁约束飞秒激光诱导铜等离子体辐射光谱采集系统,通过发射光谱法分析磁约束效应对飞秒激光诱导铜等离子体特性的影响.在强度为0.67T的稳磁场约束下,等离子体辐射连续谱和分立谱均有增强,分立谱线增强更显著;铜原子上能级越高,其辐射的原子谱线增强因子越大,具有最高上能级的Cu I 507.6nm增强因子最大,为2.8;等离子体铜原子谱线持续时间明显延长,在等离子体演化初期,谱线增强显著,在较大延时,谱线增强迅速减弱;等离子体电子温度和电子密度均有提高.     

A comparison of single shot nanosecond and femtosecond polarization-resolved laser-induced breakdown spectroscopy of Al

Aluminum samples have been analyzed by femtosecond polarization-resolved laser-induced breakdown spectroscopy (fs-PRLIBS). We compare the obtained spectra with those obtained from nanosecond PRLIBS (ns-PRLIBS). The main specific features of fs-PRLIBS are that a lower plasma temperature leads to a low level of continuum and no species are detected from the ambient gas. Furthermore, signals obtained by fs-PRLIBS show a higher stability than those of ns-PRLIBS. However, more elements are detected in the ns-PRLIBS spectra.     

低密度SnO2靶激光等离子体极紫外光及离带热辐射

极紫外光刻技术是我国当前面临35项“卡脖子”关键核心技术之首.高极紫外光转换效率和低离带热辐射的激光等离子体极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用激光作用固体Sn和低密度SnO₂靶对极紫外光源以及其离带热辐射进行研究.实验结果表明,两种形式Sn靶在波长为13.5 nm附近产生了强的极紫外光辐射.由于固体Sn靶等离子体具有较强自吸收效应,在光刻机中心工作波长13.5 nm处的辐射强度处于非光谱峰值位置.而低密度SnO₂靶具有较弱的自吸收效应,其所辐射光谱的峰值恰好位于13.5 nm处.相比于固体Sn靶,低密度SnO₂靶中处于激发态的Sn离子发生跃迁所产生的伴线减弱,使其在13.5 nm处的光谱效率提升了约20%.另一方面,开展了极紫外光源离带热辐射(400—700 nm)的实验研究,光谱测量结果表明离带热辐射主要是由连续谱所主导,低密度SnO₂靶中含有部分低Z元素O(Z=8),导致其所形成的连续谱强度低,同时离带辐射时间短,因而激光作用低密度SnO₂靶所产生的离带...