Calculation of heat transfer and uniformity of chemical amplification during post-exposure bake

Heat transfer in a resist-coated silicon wafer using a bake process is theoretically evaluated by modeling the three-dimensional diffusion process, focusing on the controllability of the lithographic performance of chemically amplified resists. Six models of various ambient conditions are used. The proximity gap between the hotplate and the wafer is found to have a dominant influence on the heat transfer process for the whole system. Because the atmosphere near the wafer acts as a thermal diffusion buffer layer, no temperature gradient occurs in the resist, even when it is subjected to convective heat transfer from the resist surface. Experimental results obtained by X-ray lithography confirm the calculation results.     

奇异类内离差矩阵条件下的Fisher最优判据

特征提取是模式分类与识别的重要环节，Fisher最优判据是特征提取的基本方法之一．本文提出了一种计算奇异类内离差矩阵条件下Fisher最优判据的新方法，并给出了计算步骤．     

A Comparative Study on Dynamic and Static Sparsity Patterns in Parallel Sparse Approximate Inverse Preconditioning

Sparse approximate inverse (SAI) techniques have recently emerged as a new class of parallel preconditioning techniques for solving large sparse linear systems on high performance computers. The choice of the sparsity pattern of the SAI matrix is probably the most important step in constructing an SAI preconditioner. Both dynamic and static sparsity pattern selection approaches have been proposed by researchers. Through a few numerical experiments, we conduct a comparable study on the properties and performance of the SAI preconditioners using the different sparsity patterns for solving some sparse linear systems. This revised version was published online in July 2006 with corrections to the Cover Date.     

振动系统的模态分析实验设计

利用模态分析原理和简单试验仪器，得到了直观的悬臂梁和圆盘前4阶模态振型，使学生熟悉了模态分析原理和测试方法，有利于学生对振动规律的理解．     

Space–time integrated least squares: a time‐marching approach

A time‐marching formulation is derived from the space–time integrated least squares (STILS) method for solving a pure hyperbolic convection equation and is numerically compared to various known methods. Copyright © 2004 John Wiley & Sons, Ltd.     

Particle Size Analysis by Transmission Fluctuation Spectrometry: Experimental Results Obtained with a Gaussian Beam and Analog Signal Processing

Transmission fluctuation spectrometry (TFS) is a method for the analysis of particle size distributions based on the statistical fluctuations of a transmission signal. Complete information on the PSD and particle concentration can be retrieved by a special transformation of the transmission signal, whereby the expectancy of the transmission square (ETS) is determined after the signal has been subjected to a procedure of spatial and temporal averaging. By varying the averaging parameters over a wide range, a spectrum of ETSs is obtained and introduced into a linear equation system, which yields the PSD. In the experimental realization presented here, variable temporal averaging is realized in the frequency domain with a series of low pass filters at different cutoff frequencies while spatial averaging inevitably occurs as the particles pass through a focused Gaussian beam of finite cross section. Experimental results on spherical particles (glass beads) and non‐spherical particles (SiC) are presented. The PSDs are resolved in 30 intervals within a particle size range from 1–1000 μm, employing a modified Chahine inversion algorithm. So far, the measurements are limited to moderate particle concentrations. Some influences affecting the measurements, especially for higher particle concentrations, are discussed in detail.     

An approximation property of harmonic functions in Lipschitz domains and some of its consequences

An extension of an inequality of J. B. Garnett (1979), with improvements by B. E. J. Dahlberg (1980), on an approximation property of harmonic functions is proved. The weighted inequality proved here was suggested by the work of J. Pipher (1993) and it implies an extension of a result of S. Y. A. Chang, J. Wilson and T. Wolff (1985) and C. Sweezy (1991) on exponential square integrability of the boundary values of solutions to second-order linear differential equations in divergence form. This implies a solution of a problem left open by R. Bañuelos and C. N. Moore (1989) on sharp estimates for the area integral of harmonic functions in Lipschitz domains.

     

Penta-Coordinate Phosphorus Intermediates Analysis on Phospho-related Proteins

In this paper, based on known crystal structures of square pyramid （SP） and trigonal bipyramid （TBP） penta coordinated phosphorus compounds containing amino acid side chains, such as amino, carboxyl, hydroxyl or thiol, a software for survey the P（5）-structure of phosphorylated proteins was derived. By this software, it was found that 382 of 398 phosphorus related kinases （96%） from current PDB could go through the penta-coordinated phosphorus transition state or intermediate.     

用不变速度推导卢瑟福散射公式

通过横向速度变换得到两种不变速度，由此推出卢瑟福散射公式。     

偏振小孔干涉仪

偏振小孔干涉仪是一种可实用的新型干涉仪。它综合小孔衍射技术、偏振技术和共光路设计为一体,具有条纹对比度可调、抗干扰能力强和非接触检验等优点,可广泛用于各种光学元件及其胶合层的检验。目测精度达1/10λ,计算机条纹处理精度可调。