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991.
992.
基于微机电系统(MEMS)的光栅平动式光调制器(光栅平动式光调制器)调制性能的实验研究关系到其进一步应用。设计了光栅平动式光调制器的相干光学信息处理系统实验方案,He-Ne激光器出射的光束经扩束器和准直透射后成为平行光入射光栅平动式光调制器,被测光栅平动式光调制器放置在相干光学信息处理系统的输入面,滤波器在频谱面上,显微镜放大像面上的信号,经CCD在计算机上记录存储;实验结果和理论分析吻合。对光栅平动式光调制器进行方案优化,将可动光栅边框和悬臂梁表面处理成不反光,使可动光栅和下反射镜构成的整个反射面为光栅周期的整数倍。经理论计算,在光栅周期为8μm,光栅占空比为0.5,光栅边距为2μm,周期数为6的条件下,光栅平动式光调制器图像填充率为74.67%,光学效率为81.06%,衬比度大于5000∶1。 相似文献
993.
离轴照明和衰减型相移掩模作为重要的分辨力增强技术,不仅可以提高光刻的分辨力,同时还可以改善成像焦深,扩大光刻工艺窗口,实现65~32 nm分辨成像。从频谱的角度分析了离轴照明和衰减型相移掩模对成像系统交叉传递函数和像场空间频率分布的影响,研究这两种技术的物理光学本质,由此进一步优化光学成像系统设计、分辨力增强技术和确定设备使用的参量。对分辨力增强技术的频谱分析研究表明,分辨力增强技术通过调整像场频谱分布,改善了光学光刻的图形质量。对于65 nm密集图形,离轴照明和相移掩模结合后可以使成像衬比度最高达到0.948,工艺窗口在5%曝光范围内焦深达到0.51μm。 相似文献
994.
投影光刻机硅片调焦调平测量模型 总被引:4,自引:1,他引:4
成像质量是光学光刻机的最主要指标,硅片调焦调平测量是光刻机控制成像质量的基础.为此建立了硅片调焦调平测量系统单个测量点的测量模型,并根据硅片形貌标准和集成电路尺寸标准,推导了近似运算规则,简化了曝光场高度与测量光斑在光电探测器上的位置之间的数学关系.运用最小二乘法和平面拟合曝光场曲面的方法,推导了基于多个测量点的曝光场高度和倾斜测量的数学模型.该模型能满足调焦调平实时测量和控制的需要,可用于测量精度优于10 nm的高精度调焦调平测量系统,能满足线宽小于100 nm投影步进扫描光刻机的需要. 相似文献
995.
宽视场长焦距离轴三反射镜光学系统的设计 总被引:1,自引:0,他引:1
分析了离轴三反射镜系统成像特性.根据共轴三反射镜光学系统像差理论,确定结构参数的基本计算公式.设计了长焦宽视场的离轴三反射镜光学系统,分析了系统结构参量对像差的影响.结果表明,该系统视角较大,地面复益范围较宽,成像质量接近衍射极限. 相似文献
996.
997.
WANG Wei & ZHU Jun-Jie State Key Laboratory of Analytical Chemistry for Life Science School of Chemistry Chemical Engineering Nanjing University Nanjing China 《中国科学B辑(英文版)》2011,(8)
This review presents a simple introduction on the unique properties and general synthesis of quantum dots (QDs) in which we lay emphasis on the optical applications in the biological system. The detection of biological molecules such as DNA, protein and enzyme, the cell-based analysis and in vivo animal imaging are mainly discussed. 相似文献
998.
Clusters of high aspect ratio, high surface area anatase-TiO2 nanotubes with a typical nanotube outer diameter of about 18 nm, wall thickness of approximately 5 nm and length of 5-10 μm were synthesized, in powder form, by breakdown anodization of Ti foils in 0.1 M perchloric acid, at 10 V (299 K) and 20 V (∼275 and 299 K). The surface area, morphology, structure and band gap were determined from Brunauer Emmet Teller method, field emmission scanning electron microscopy, transmission electron microscopy, X-ray diffraction, Raman, photoluminescence and diffuse reflectance spectroscopic studies. The tubular morphology and anatase phase were found to be stable up to 773 K and above 773 K anatase phase gradually transformed to rutile phase with disintegration of tubular morphology. At 973 K, complete transformation to rutile phase and disintegration of tubular morphology were observed. The band gap of the as prepared and the annealed samples varied from 3.07 to 2.95 eV with increase in annealing temperature as inferred from photoluminescence and diffuse reflectance studies. 相似文献
999.
Jaehong Kim Sung Heum Park Jinwoo Kim Shinuk Cho Youngeup Jin Joo Young Shim Hyunmin Shin Sooncheol Kwon Il Kim Kwanghee Lee Alan J. Heeger Hongsuk Suh 《Journal of polymer science. Part A, Polymer chemistry》2011,49(2):369-380
Newly designed 2H‐benzimidazole derivatives which have solubility groups at 2‐position have been synthesized and incorporated into two highly soluble carbazole based alternating copolymers, poly[2,7‐(9‐(1′‐octylnonyl)‐9H‐carbazole)‐alt‐5,5‐(4′,7′‐di(thien‐2‐yl)‐2H‐benzimidazole‐2′‐spirocyclohexane)] (PCDTCHBI) and poly[2,7‐(9‐(1′‐octylnonyl)‐9H‐carbazole)‐alt‐5,5‐(4′,7′‐di(thien‐2‐yl)‐2H‐benzimidazole‐2′‐spiro‐4′′‐((2′′′‐ethylhexyl)oxy)‐cyclohexane)] (PCDTEHOCHBI) for photovoltaic application. These alternating copolymers show low‐band gap properties caused by internal charge transfer from an electron‐rich unit to an electron‐deficient moiety. HOMO and LUMO levels are –5.53 and –3.86 eV for PCDTCHBI, and –5.49 and –3.84 eV for PCDTEHOCHBI, respectively. Optical band gaps of PCDTCHBI and PCDTEHOCHBI are 1.67 and 1.65 eV, respectively. The new carbazole based the 2H‐benzimidazole polymers show 0.11–0.13 eV lower values of band gaps as compared to that of carbazole based benzothiadiazole polymer, poly[N‐9′‐heptadecanyl‐2,7‐carbazole‐alt‐5,5‐(4′,7′‐di‐2‐thienyl‐2′,1′,3′‐benzothiadiazole)] (PCDTBT), while keeping nearly the same deep HOMO levels. The power conversion efficiencies of PCDTCHBI and PCDTEHOCHBI blended with [6,6]phenyl‐C71‐butyric acid methyl ester (PC71BM) are 1.03 and 1.15%, respectively. © 2010 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem, 2011 相似文献
1000.
Chunhui Duan Wanzhu Cai Chengmei Zhong Yanhu Li Xiaohui Wang Fei Huang Yong Cao 《Journal of polymer science. Part A, Polymer chemistry》2011,49(20):4406-4415
Three narrow‐band‐gap conjugated copolymers based on indenofluorene and triphenylamine with pendant donor‐π‐acceptor chromophores were successfully synthesized by post‐functionalization approach. All the polymers have good solubility in common solvents and excellent thermal stability. The photophysical properties, energy levels and band gaps of the polymers were well manipulated by introducing different acceptor groups onto the end of their conjugated side chains. By using different acceptor groups, the band gaps of the polymers were narrowed from 1.86 to 1.53 eV by lowering their lowest unoccupied molecular orbital levels, whereas their relatively deep highest occupied molecular orbital levels of approximately ?5.35 eV were maintained. Bulk‐heterojunction solar cells with these polymers as electron donors and (6,6)‐phenyl‐C71‐butyric acid methyl ester as acceptor showed power conversion efficiencies as high as 3.1% and high open circuit voltages more than 0.88 eV. The relationships between the performance and film morphology, energy levels, charge mobilities were discussed. © 2011 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem, 2011 相似文献