Air-coupled MUMPs capacitive micromachined ultrasonic transducers with resonant cavities

This work reports performance improvements of air-coupled capacitive micromachined ultrasonic transducers (CMUTs) using resonant cavities. In order to perform this work, we have designed and manufactured a CMUT employing multi-user microelectromechanical systems (MEMS) processes (MUMPs). The transducer was designed using Helmholtz resonator principles. This was characterised by the dimensions of the cavity and several acoustic ports, which had the form of holes in the CMUT plate. The MUMPs process has the advantage of being low cost which allows the manufacture of economic prototypes. In this paper we show the effects of the resonant cavities and acoustic ports in CMUTs using laser Doppler vibrometry and acoustical measurements. We also use Finite Element (FE) simulations in order to support experimental measurements. The results show that it is possible to enhance the output pressure and bandwidth in air by tuning the resonance frequency of the plate (f_p) with that of the Helmholtz resonator (f_H). The experimental measurements show the plate resonance along with an additional resonance in the output pressure spectrum. This appears due to the effect of the new resonant cavities in the transducer. FE simulations show an increase of 11 dB in the output pressure with respect to that of a theoretical vacuum-sealed cavity MUMPs CMUT by properly tuning the transducer. The bandwidth has been also analyzed by calculating the mechanical Q factor of the tuned CMUT. This has been estimated as 4.5 compared with 7.75 for the vacuum-sealed cavity MUMPs CMUT.     

压电MEMS超声换能器研究进展

MEMS(micro-electromechanical systems)超声换能器(MEMS ultrasonic transducer,简称MUT)是采用微电子和微机械加工技术制作的新型超声换能器。与传统超声换能器相比,MUT具有体积小、重量轻、成本低、功耗低、可靠性高、频率控制灵活、频带宽、灵敏度高以及易于与电路集成和实现智能化等特点。是超声换能器的重要的研究方向之一。MUT的研究主要包括压电MUT(piezoelectric MUT,简称PMUT)和电容MUT(capacitiveMUT,简称CMUT)两个方面。本文概述了PMUT研究的发展进程和研究成果,展望了PMUT的研究和应用前景。     

基于相变换能机理的反铁电陶瓷水声换能器初探

阐述了改性锆锡钛酸铅Pb(Zr,Sn,Ti)O3(PZST)反铁电陶瓷作为一种基于相变换能机理的大应变电致伸缩材料的性能特征以及作为水声换能器新型有源材料的优势。采用掺镧改性锆锡钛酸铅PbLa(Zr,Sn,Ti)O3(PLZST)反铁电陶瓷材料首次设计制作了纵振式反铁电陶瓷水声换能器。试验结果表明,PLZST反铁电陶瓷用于水声换能器研制在技术上是可行的,与压电陶瓷换能器比较,目前反铁电换能器样品的等效发射电压灵敏度提高3~5dB以上。根据实验情况,认为在发射电压灵敏度和声源级方面具有进一步提升的潜力。     

液体表面张力的动态测量过程研究

本文介绍用测力传感器和计算机数据采集系统测量纯水表面张力的实验方法,测定了纯水的表面张力和表面张力与温度的初步关系曲线,研究了拉脱法测量的动态过程.     

用于电力系统的光学电流互感器技术进展

介绍了光学电流测量技术的发展情况，描述了目前几种主要的互感器结构及其基本原理，并对各自存在的问题及解决途径进行了讨论。从研究现状来看，块状玻璃型传感器技术相对成熟，已经有商业产品问世；混合型传感器测量精度较高，但传感头有源电路的供电技术复杂，还没有圆满的解决方案；全光纤型是光学电流互感器发展的最终目标，目前存在的主要问题是光纤的固有线性双折射难以处理，有赖于新型光纤材料及集成光学元件的进一步发展。最后综合评述了光学电流互感器技术的发展趋势及产业化前景。     

影响DAS精度的几种因素

在基于数据采集的DAS中，从设计角度出发，详细地分析了系统的传感器，预处理电路，噪声，采样频率和干扰系统精度的影响。     

Miniaturized back-side contact transducer for potentiometric sensors

A novel type of a miniature transducer for potentiometric sensors was designed and tested. The transducer is made from an ordinary printed circuit board using a typical technology. As a result, a back-side contact structure was obtained, which can be mounted in flow systems. The advantage of the fabrication process is its cheapness and flexibility in designing modified structures. The measurement properties of the transducer were tested as a chloride sensor. Then the structure was covered with polyHEMA and a potassium-selective membrane and tested as a potassium sensor. The performance and the long-term stability of the sensors with plasticized PVC and Siloprene based potassium-selective membranes were compared.     

Sound field prediction of ultrasonic lithotripsy in water with spheroidal beam equations

With converged shock wave,extracorporeal shock wave lithotripsy(ESWL)has become a preferable way to crush human calculi because of its advantages of efficiency and non-intrusion.Nonlinear spheroidal beam equations(SBE)are employed to illustrate the acoustic wave propagation for transducers with a wide aperture angle.To predict the acoustic field distribution precisely,boundary conditions are obtained for the SBE model of the monochromatic wave when the source is located on the focus of an ESWL transducer.Numerical results of the monochromatic wave propagation in water are analyzed and the influences of half-angle,fundamental frequency,and initial pressure are investigated.According to our results,with optimization of these factors,the pressure focal gain of ESWL can be enhanced and the effectiveness of treatment can be improved.     

横波远探测测井换能器研究

为提高偶极子横波远探测反射波的信噪比和增加其探测距离,根据偶极子井孔模式波的激发特性及反射波传播特征分析,研制了基于三叠片的低频大功率偶极子的横波远探测换能器,以降低模式波的相对能量和增加反射波的相对能量。为了得到满足要求的低频大功率偶极换能器,采用有限元方法对现有三叠片进行了优化改进,得到一种符合设计要求的换能器结构,最后制作了样机并对其进行了测试。样机测试结果跟仿真吻合得很好,低频性能得到了极大改善：换能器在谐振频率1.2 kHz附近具有极好的偶极子指向性,谐振频率处的响应比X-MAC同频率段大19 dB。该换能器的研发成功将为偶极子远探测测井仪器性能及成像质量的提高奠定了坚实的基础。     

基于有限元的空耦超声相控阵Lamb波激发与检测

基于非接触式空气耦合超声换能器的无损检测技术在常规板材、纤维复合材料、层状结构材料、粘接界面等的检测中有了长足的发展。但是因为空气耦合超声本身的限制,对于如何提高空气声换能器的发射效率和接收灵敏度、提高检测中接收的信噪比成为这一领域的重要课题。因此有必要结合最新的信号处理技术探索新的无损检测形式。本文通过提出了基于电容式的空气声换能器阵列的构建和制作方法,应用有限元数值方法对一维线阵的空气声换能器阵列的动态偏转特性进行了模拟,并使用构建流固耦合模型对二维的空气声场及板材中的位移场进行计算。通过一维空气耦合相控阵的声束动态偏转激励了各向同性板中的Lamb波A₀ 和S₀模式,并进行了分析,验证了此模型可以进一步用于基于空气耦合相控阵激励的Lamb波的无损检测中。