阈值可调的微机电惯性开关

针对惯性开关通用性的要求,设计了一种具有阈值可调功能的微机电惯性开关。利用CoventorWare软件中的Architect模块对该悬臂梁结构开关进行系统级仿真。仿真结果表明,开关在半正弦加速度信号作用下,加速度阈值和电压基本呈线性关系,通过调整偏置电压的方式,可测量不同阈值加速度;以500g为一档,调节加速度阈值范围为1000⁴000g,开关最长响应时间为63.44μs,接触时间无穷大,表现出良好的工作性能。考虑MEMS薄膜沉积工艺在加工4μm厚的悬臂梁时存在±0.1μm加工误差,应用蒙特卡洛法分析悬臂梁厚度在3.94000g,开关最长响应时间为63.44μs,接触时间无穷大,表现出良好的工作性能。考虑MEMS薄膜沉积工艺在加工4μm厚的悬臂梁时存在±0.1μm加工误差,应用蒙特卡洛法分析悬臂梁厚度在3.9⁴.1μm之间变化时,对开关吸合电压和闭合时间的影响,结果表明,±0.1μm的加工误差对开关吸合电压和闭合时间影响在设计允许范围内。     

低成本车载MEMS惯导导航定位方法

当GPS卫星信号受到遮挡,车载GPS无定位输出时,通过低成本MEMS惯导进行定位是车辆导航的一种弥补方法。然而低成本MEMS惯导测量误差大,定位误差会快速累积。针对此问题,研究了一种应用于MEMS惯导导航定位的Kalman滤波算法。通过分析车辆的运动特性,在已有的研究基础上,提出了向心加速度差值误差这一新型观测量,并推导了误差状态系统模型的状态转移矩阵和观测矩阵。200 s时长的实车实验表明,单纯MEMS惯导定位的误差率是75.27%,而所述新方法的定位误差率是3.86%,定位精度有了大幅度提高,取得了良好的效果。     

Effect of staggered array structure on the flow field of micro gas chromatographic column

A new design of staggered array semi-packed micro gas chromatographic column was presented based on the micro electromechanical system(MEMS)technology.It was a sensor for gas sample analysis.The internal velocity fields of ten types of semi-packed micro gas chromatographic column were studied.The effects of array spacing and dislocation spacing on the flow field distribution were investigated.The results show that on the basis of ensuring the formation of virtual wall,with the increase of array spacing,the maximum velocity difference between the flow channels in the vertical direction decreases gradually,but the velocity difference in the flow channels a and b increases.When the inlet velocity was set to be 0.18 m/s,the maximum velocity difference in the channel of the staggered semi-packed micro gas chromatography column 3(CSAC3)was 0.05610 m/s.The maximum velocity difference in the channel a was 0.09160 m/s.The maximum velocity difference in the channel b was 0.02401 m/s.CSAC3 had a more uniform velocity field distribution,which can effectively suppress the laminar flow effect during chromatographic separation,and had a smaller pressure distribution,which puts forward lower requirements for carrier gas system.The staggered array semi-packed micro gas chromatography column proposed in this paper can effectively improve the velocity field distribution and pressure distribution in the channel,and provide a theoretical basis for the design of the new micro gas chromatography column structure.     

非局部因子和表面效应对微纳米材料振动特性的影响

基于非局部理论和表面效应模型,导出表面吸附物对微纳米材料的动力学方程,研究非局部因子和表面能对微纳米传感器振动特性的影响．结果显示,非局部因子、表面能、吸附物种类、附加刚度和基底种类对微纳米结构的振动特性有重要影响．     

大载荷下线振动微机械陀螺谐振频率漂移特性

线振动 MEMS 陀螺在大载荷条件下,驱动轴与检测轴的谐振频率会发生漂移,频差随载荷变大.这类型振动陀螺为了提高灵敏度往往将两个振动轴的谐振频率设计得尽量靠近,但当角速率载荷较大时,两个振动轴的谐振频率将发生分裂漂移,彼此互相远离.漂移量与向心加速度无关,近似与角速率载荷的平方成正比,且两轴的谐振频率越靠近漂移越剧烈.考虑到 Coriolis 效应的弹簧质量块二维振动数学模型可定量描述该现象,表明此现象为线振动陀螺 Coriolis 效应的一部分.理论分析、仿真研究和实验数据的不同角度对这种频率漂移特性的分析结果吻合良好,为进一步结构优化奠定了理论基础.     

基于波束形成缩放声强的声源局部声功率计算

基于波束形成法识别噪声源时,为计算主要噪声源的辐射声功率,给出了基于平面波模型的声强缩放方法,模拟计算了单极子点声源局部声功率的计算误差,结果显示:当阵列平面与声源计算平面间距离等于阵列直径时,基于波束形成缩放声强计算的声功率误差仅略高于0.1 dB。为克服旁瓣干扰,给出了具有一定动态范围的声源计算平面积分法,模拟计算了单极子点声源的局部声功率,结果表明:该积分法的计算值与主瓣区域积分法的计算值近似相等,均约等于理论声功率。进一步,波束形成法与声强法的对比算例试验验证了基于波束形成缩放声强计算声源局部声功率方法的有效性。      

一种MEMS可调光衰减器性能测试及动态响应分析

一种基于微细电火花加工(EDM)技术的非硅基MEMS可调光衰减器,以电磁线圈驱动微反射镜.本文介绍该器件特性测试及动态响应分析,结果表明,驱动电压为0～8 V,工作范围0～35 dB,动态响应时间为2 ms,插入损耗小于0.8 dB,回波损耗小于－50.5 dB.     

Pull-in instability analyses for NEMS actuators with quartic shape approximation

The pull-in instability of a cantilever nano-actuator model incorporating the effects of the surface, the fringing field, and the Casimir attraction force is investigated. A new quartic polynomial is proposed as the shape function of the beam during the deflection, satisfying all of the four boundary values. The Gaussian quadrature rule is used to treat the involved integrations, and the design parameters are preserved in the evaluated formulas. The analytic expressions are derived for the tip deflection and pull-in parameters of the cantilever beam. The micro-electromechanical system (MEMS) cantilever actuators and freestanding nanoactuators are considered as two special cases. It is proved that the proposed method is convenient for the analyses of the effects of the surface, the Casimir force, and the fringing field on the pull-in parameters.     

Static and dynamic responses of a microcantilever with a T-shaped tip mass to an electrostatic actuation

In this study, nonlinear static and dynamic responses of a microcantilever with a T-shaped tip mass excited by electrostatic actuations are investigated. The electrostatic force is generated by applying an electric voltage between the horizontal part of T-shaped tip mass and an opposite electrode plate. The cantilever microbeam is modeled as an Euler–Bernoulli beam. The T-shaped tip mass is assumed to be a rigid body and the nonlinear effect of electrostatic force is considered. An equation of motion and its associated boundary conditions are derived by the aid of combining the Hamilton principle and Newton's method.An exact solution is obtained for static deflection and mode shape of vibration around the static position. The differential equation of nonlinear vibration around the static position is discretized using the Galerkin method. The system mode shapes are used as its related comparison functions. The discretized equations are solved by the perturbation theory in the neighborhood of primary and subharmonic resonances.In addition, effects of mass inertia, mass moment of inertia as well as rotation of the T-shaped mass, which were ignored in previous works, are considered in the analysis. It is shown that by increasing the length of the horizontal part of the T-shaped mass, the amount of static deflection increases,natural frequency decreases and nonlinear shift of the resonance frequency increases. It is concluded that attaching an electrode plate with a T-shaped configuration to the end of the cantilever microbeam results in a configuration with larger pull-in voltage and smaller nonlinear shift of the reso-nance frequency compared to the configuration in which the electrode plate is directly attached to it.     

叠氮化铜微装药爆轰驱动飞片的数值模拟

为了优化叠氮化铜微装药器件的设计,探究叠氮化铜爆轰驱动飞片的作用原理,根据微装药器件的实际设计和相关实验,采用ANSYS/LS-DYNA流固耦合算法对叠氮化铜爆轰驱动飞片的作用过程作了数值模拟。具体研究了加速膛长度对飞片的平整性和完整性的影响,分析了微装药的尺寸与飞片速度之间的关系。研究结果表明:加速膛的长度对飞片的完整性、平整性和速度具有重要影响,在过长的加速膛中飞片飞行时易发生破碎,加速膛过短飞片的驱动速度不能达到最佳。装药尺寸与飞片速度之间关系密切,装药直径对飞片速度的前期成长影响不大,但对飞片获得的最大速度却有较为明显的影响;装药的直径大于0.8 mm时,增加装药直径并不能使飞片的最大速度明显增加。