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941.
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944.
945.
玻璃基片上SiO_2膜层厚度的测量方法 总被引:1,自引:0,他引:1
钠钙玻璃基片在液晶显示器件(LCD) 等制造业中得到了广泛的应用。为防止基片中的碱金属离子扩散到器件的工作介质中,进而影响其化学稳定性和使用寿命,一般要在基片表面镀上一定厚度的SiO2 膜层,以便起到阻挡层的作用。基于P 蚀刻剂对SiO2 膜层和基片有显著不同的蚀刻速度,提出了一种测量玻璃基片上的SiO2 膜层厚度的方法,即:利用表面轮廓仪,在测量三个不同的蚀刻数据后,计算出SiO2 膜层的厚度。以用射频溅射法制备的SiO2 膜层为样品进行了测量,具体的实验数据证实了该方法的可靠性和有效性 相似文献
946.
947.
In this paper we use a superluminescent diode (SLD) as the light source of an interferometer and extract a narrow spectrum from a wide spectrum of the SLD with a Fabry-Perot Etalone (FPE). By varying sinusoidally the distance between the two mirrors of FPE, the central wavelength of the narrow spectrum is scanned sinusoidally. The distance between the mirrors is exactly set by a feedback control system, and sinusoidal phase-modulated SLD light that has a large scanning width of about 10 nm can be obtained with high stability and spatial uniformity. The phase of the interference signal has two different components. One is amplitude Zb of sinusoidal phase modulation, which is proportional to the optical path difference (OPD) and the scanning width. The other is conventional phase α, which provides a fractional value of the OPD in the range of the wavelength. By combining the two values of the OPD obtained from Zb and α, an exact OPD larger than the wavelength can be measure with ment accuracy in α. Characteristics of the interferometer are made clearly through step-profile measurements. 相似文献
948.
Kenichi Hibino 《Optical Review》1999,6(6):529-538
In phase-shifting Fizeau interferometers, nonlinear motion of the phase shifter and multiple-beam interference are the most common sources of systematic errors affecting high-precision phase measurement. A new class of algorithms with extended compensating capability for these errors is proposed. Measurement errors for the new algorithms and two groups of conventional algorithms: discrete Fourier algorithms and the Schwider-Larkin-Hibino algorithms are estimated as a function of the number of sampled images when these systematic error sources are equally dominant. It is shown that the conventional phase-measuring algorithms produce significant errors when the reflectivity of the testing surface exceeds ten percent. Also, these algorithms have an optimum number of samples at around seven with which the residual errors become minimum. The new class of algorithms shows a substantial reduction of the residual errors when the number of samples exceeds ten. There is no optimum number of samples for the new algorithms. For fewer than six samples, discrete Fourier algorithms which have no error-compensating capability for the nonlinearity of phase modulation give a minimum error. 相似文献
949.
O. A. Bondarenko A. A. Korneev Yu. N. Onishchuk A. V. Berezhnoy P. B. Aryasov D. Antonyuk A. V. Dmitrienko 《Radiation measurements》1999,30(6):709-714
Object “Shelter” (known world-wide as the Sarcophagus) is a source of very high radiological and nuclear hazard. Transfer of the Sarcophagus into an ecologically safe site is a task not only for Ukraine but also for the world community. A composite approach to maintenance of radiation and nuclear safety of the Sarcophagus applying spectrometric methods using solid state nuclear track detectors (SSNTD) is suggested in this paper. The aspects are: (1) monitoring of transuranium element inhalation intake to a human body of nuclear workers; (2) neutron flux evaluation in some premises of the Sarcophagus; (3) fuel hot particle detection in air of working zones; (4) radon and thoron simultaneous measurements. 相似文献
950.
J. des Cloizeaux 《The European Physical Journal B - Condensed Matter and Complex Systems》1999,8(3):439-443
Dirac equation is reformulated in terms of real local observables, which are mean values of the wave function . The quadrivector current is shown to be a function of the potential vector and of other local observables. The equations
describe the evolution of a four dimensional system T, X, Y, Z, and of two scalars, in the coordinate system ct, x, y, z. The current is proportional to the T vector. The Z vector is associated with the spin of the electron. Energy and gauge transformations correspond to rotations in the plane
(X, Y). In the presence of a static field, the (real) solutions of the equations appear as eigenfunctions associated with energy
eigenvalues.
Received 7 September 1998 相似文献