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991.
投影光刻机硅片调焦调平测量模型 总被引:4,自引:1,他引:4
成像质量是光学光刻机的最主要指标,硅片调焦调平测量是光刻机控制成像质量的基础.为此建立了硅片调焦调平测量系统单个测量点的测量模型,并根据硅片形貌标准和集成电路尺寸标准,推导了近似运算规则,简化了曝光场高度与测量光斑在光电探测器上的位置之间的数学关系.运用最小二乘法和平面拟合曝光场曲面的方法,推导了基于多个测量点的曝光场高度和倾斜测量的数学模型.该模型能满足调焦调平实时测量和控制的需要,可用于测量精度优于10 nm的高精度调焦调平测量系统,能满足线宽小于100 nm投影步进扫描光刻机的需要. 相似文献
992.
Density functional calculations have been used to investigate the (0 0 1) surface of cubic SrZrO3 with both SrO and ZrO2 termination. Surface structure and electronic structure have been obtained. The SrO surface is found to be similar to its counterpart in SrTiO3, while there are marked differences between the ZrO2 and TiO2 terminations in SrZrO3 and SrTiO3, respectively, concerning surface relaxation and rumpling. For the ZrO2-terminated surface of SrZrO3, the covalency of the interaction between the outmost Zr and the O beneath is enhanced as a result of their bond contraction. The band gap reduction and the presence of the surface states are also discussed in relation with the behavior of the electrostatic potential. 相似文献
993.
We present two types of Molecular Dynamics (MD) simulation for calculating the desorption rate of molecules from a surface. In the first, the molecules move freely between two surfaces, and the desorption rate is obtained either by counting the number of desorption events in a given time, or by looking at the average density of the molecules as a function of distance from the surface and then applying transition state theory (TST). In the second, the potential of mean force (PMF) for a molecule is determined as a function of distance from the surface and the desorption rate is obtained by means of TST. The methods are applied to water on the MgO(0 0 1) surface at low coverage. Classical potentials are used so that long simulations can be performed, to minimise statistical errors. The two sets of MD simulations agree well at high temperatures. The PMF method reproduces the 0 K adsorption energy of the molecule to within 5 meV, and finds that the well depth of the PMF is not linear with temperature. This implies the prefactor frequency f in the Polanyi-Wigner equation is a function of temperature, increasing at lower temperatures due to the reduction of the available configuration space associated with an adsorbed molecule compared with a free molecule. 相似文献
994.
995.
996.
997.
998.
计算了球形均匀D-3He先进燃料靶惯性约束聚变(ICF)的燃耗和增益。讨论了这种堆系统的能量平
衡。设计了一种新型的由毛细管阵列组成具有抗辐射损伤、可自动更新的液态金属锂自由表面多孔湿壁,用它取
出聚变能。同时与D-T热核燃料靶系统的燃耗和增益及它们不同的堆工程特性作了比较。 相似文献
999.
1000.
Classical (Heisenberg) simulations show that the total magnetization of the lowest-energy states of clusters made of antiferromagnetically
coupled chromium atoms is planar, rather than collinear, depending on the arrangement of the atoms. Although the model Hamiltonian
is not restrictive, many cluster configurations of various numbers of atoms do not use all three directions for the spins.
This result confirms the conclusion drawn from the local-spin DFT calculation by Kohl and Bertsch that clusters of N≤13 have non-collinear magnetic moments. The present simulations show non-collinear spin ordering also for bigger clusters,
designed to be as spherical as possible following the bcc arrangement, when atoms interact both with the nearest and next-nearest neighbours. Depending on the signs of the coupling
constants frustration appears. The advantage of the discrete model, despite the simplicity, is that very large clusters and
magnetization at finite temperatures can be studied. This model predicts that clusters with specific numbers of atoms interacting
only with the nearest neighbours have collinear spins as in the bulk. We also apply the model to simulate the destruction
of the anti-ferromagnetic ordering by thermal fluctuations. This model shows no unique magnetization of mixed Fe
0.33
Cr
0.67, which is consistent with experimental observations. 相似文献