NOISE AND SENSITIVITY IN POLYSILICON PIEZORESISTIVE CANTILEVERS

Piezoresistive cantilevers with dimensions of 200×50×1.8μm³ have been fabricated from polycrystalline silicon using reactive ion etching (RIE) and back etching processes. Full Wheatstone bridges have been designed symmetrically on-chip, with two resistors placed on the cantilevers and two resistors on the substrate. The differential measurements of the two cantilevers can reduce the thermal shift of the signal in the system and the external noise in the laboratory. The characteristics of the fabricated cantilevers have been analysed by measuring the noise and the sensitivity. The measured noise spectra show that the 1/f noise is the dominant noise source at low frequencies. With the linear relation between 1/f noise and bias voltages, the Hooge factor (α) was calculated to be 0.0067. The 1/f noise was explained in terms of a lattice scattering model, which occurs in the depletion region of the grains. The displacement sensitivity of the cantilevers ((ΔR)/Rz^-1) was calculated to be 1×10^-6nm^-1 by measuring the resistance change and the vertical deflection of the cantilever. The gauge factor of the piezoresistive cantilever was calculated to be 19. At a 3 V bias voltage and 1000 Hz measurement bandwidth, 1 nm of minimum detectable deflection has been obtained.     

SFM/SNOM结合的扫描探测显微镜

采用光纤探针的扫描近场光学显微镜 (SNOM)存在某些弱点 ,如探针特别脆 ,不易贴近样品表面扫描 ,探针的转输效率低等。近年来发展了将SFM /SNOM结合起来的扫描探测显微镜。利用微加工工艺技术 ,将小孔集成在悬臂探针中 ,使探针既能批量制备 ,又具有很好的重复性。探针悬臂在垂直于样品表面方向上的弹性常数较小 ,针尖不易损坏。在接触模式中利用这种SFM /SNOM组合探针可将样品的形貌像、摩擦力和光学透射像等信息同时记录下来。对于综合研究样品表面的介观性质十分有利。     

道岔尖轨轨底缺陷的磁致伸缩导波监测实验研究*

道岔尖轨在线监测是轨道智慧运维的工程技术难题之一。该文利用开发的磁致伸缩超声导波监测系统,对道岔尖轨开展了轨底缺陷监测实验。首先,分析了温度对导波监测信号特征的影响,波包能量值、传播时间均与温度呈近似正相关；其次,对比研究了基于标定方程和参考基准的两种温度补偿方法,其中参考基准法对信号的补偿效果更佳；最后,利用温度补偿后的特征波包能量值实现了缺陷尺寸逐步扩大过程的有效监测,且波包能量值随缺陷深度的变化规律可以用抛物线方程进行近似描述。上述研究结果表明磁致伸缩超声导波技术可以应用于道岔尖轨轨底缺陷的监测及定量评估。