投影光刻机硅片调焦调平测量模型

成像质量是光学光刻机的最主要指标,硅片调焦调平测量是光刻机控制成像质量的基础.为此建立了硅片调焦调平测量系统单个测量点的测量模型,并根据硅片形貌标准和集成电路尺寸标准,推导了近似运算规则,简化了曝光场高度与测量光斑在光电探测器上的位置之间的数学关系.运用最小二乘法和平面拟合曝光场曲面的方法,推导了基于多个测量点的曝光场高度和倾斜测量的数学模型.该模型能满足调焦调平实时测量和控制的需要,可用于测量精度优于10 nm的高精度调焦调平测量系统,能满足线宽小于100 nm投影步进扫描光刻机的需要.     

Synthesis of low grafting density molecular brush from a poly(N‐alkyl urea peptoid) backbone

The synthesis of a molecular brush was accomplished by combining step‐growth polymerization and reversible addition fragmentation chain transfer (RAFT) polymerization in a “grafting from” methodology. A symmetrical N‐alkyl urea peptoid sixmer containing alkyne functional groups was prepared using a divergent strategy, and the structure of the product was confirmed using NMR spectroscopy and mass spectrometry. A step‐growth process was used to prepare a linear poly(N‐alkyl urea peptoid) by reacting the diamine‐functionalized N‐alkyl urea peptoid sixmer with a diisocyanate. RAFT chain transfer agents were coupled to the poly(N‐alkyl urea peptoid) backbone through a copper‐catalyzed azide/alkyne cycloaddition reaction. The afforded macro‐RAFT agent was used to sequentially polymerize styrene and tert‐butyl acrylate block copolymer arms from the poly(N‐alkyl urea peptoid) backbone. The tert‐butyl groups were removed using dilute trifluoroacetic acid affording hydrophilic polyacrylic acid segments. The molecular brushes were observed to generate micelles in aqueous solution. © 2011 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem, 2011     

Synthesis and characterization of well‐defined lactic acid–PEG cooligomers and its tricarbonyl rhenium conjugates

This article describes the synthesis and characterization of hydroxyl tailored, molecularly defined biodegradable cooligomers capable of chelating rhenium for potential radiopharmaceuticals. New insights were gained during the synthesis of lactide based on dimethylaminopyridine‐catalyzed transesterification. © 2011 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem, 2011     

Spline wavelet in the resolution of overlapping voltammetric peaks

Spline wavelet transform is used to resolve overlapping voltammetric peaks. A suitable resolving factor is chosen to multiply the filters of spline wavelet and make it a peak resoluter. Simulated overlapping voltammetric peaks are processed by the peak resoluter and satisfactory results are obtained. Base-line separation can be achieved, the relative errors of peak position are less than 3.0%, and the relative errors of peak area are less than 5.0%. The effect of different resolving factors and spline wavelet basis are discussed. To test the procedure, two systems, cadmium (Ⅱ)-indium (Ⅲ) and lead (Ⅱ)-thallium (Ⅰ), are used.     

线路方案比选多目标决策分析

本文通过对线路方案比选的多目标决策分析，建立了线路方案比选的 ＴＯＰＳＩＳ模型，对线路方案非劣解集进行排序，提供方案的优先顺序．     

Relation between sers intensity and electronic structures for a series of compounds C6H5(CH2)n COOH (n = 0, 1, 2)

In this paper, the SERS spectra of a series of compounds C₆H₅(CH₂)_nCOOH (n = 0, 1, 2) adsorbed on colloidal silver are recorded and compared with each other. The relation between the SERS intensities and the electronic structures of the compounds are discussed. The results support the molecular enhancement mechanism on SERS, especially the charge transfer idea.     

Stability analysis for neural networks with inverse Lipschitzian neuron activations and impulses

In this paper, a new concept called α-inverse Lipschitz function is introduced. Based on the topological degree theory and Lyapunov functional method, we investigate global convergence for a novel class of neural networks with impulses where the neuron activations belong to the class of α-inverse Lipschitz functions. Some sufficient conditions are derived which ensure the existence, and global exponential stability of the equilibrium point of neural networks. Furthermore, we give two results which are used to check the stability of uncertain neural networks. Finally, two numerical examples are given to demonstrate the effectiveness of results obtained in this paper.     

A RELAXATION RESULT OF FUNCTIONALS IN THE SPACE SBD（Ω）

In this article,the authors obtain an integral representation for the relaxation of the functional
F（x,u,Ω）：={∫^f（x,u（x）,εu（x））dx Ω if u∈W^1,1（Ω,R^N）, ＋∞ otherwise, in the space of functions of bounded deformation,with respect to L^1-convergence.Here Eu represents the absolutely continuous part of the symmetrized distributional derivative Eu.f（x,p,ξ）satisfying weak convexity assumption.     

少精、弱精不育症患者精液中微量元素含量的测定分析

用ICPOES法检测了54例男性少精、弱精不育者精液中Ca、Cd、Cu、Fe、Mg、Mn、Ni、Zn元素的含量,并对相关含量进行数据分析。结果表明,精液中微量元素含量的改变是影响精液质量的重要原因之一。     

校准蒸发光散射检测器选用标准物质的比较与分析

通过对葡萄糖和三氯蔗糖的物理、化学性质的比较,采用高效液相色谱仪和蒸发光散射检测器进行标准溶液色谱峰面积的检测,并用G rubbs检验法对其数据进行异常值检验。结果表明,三氯蔗糖相对于葡萄糖较为稳定,选用三氯蔗糖作为蒸发光检测器校准用标准物质比较合适。