Glasses for lithography

The highest resolution in a lithographic process is often determined by the properties of the resist material. With the currently used polymeric resists, a resolution of better than 100 nm has been achieved under manufacturing conditions, but the future nanoscale devices will require a 10 times superior resolution. In this paper we present an overview of the resist materials, especially with regard to limiting resolution. In principle, inorganic resists should have higher limiting resolution than polymer resists due to smaller fundamental structural units and stronger bonds in the former. However, compositional and/or structural inhomogeneities may limit their ultimate resolution. New results are presented that indicate chalcogenide glasses as promising photo and electron beam resists, which also have the advantages of greater hardness, resistance to acids, easy fabrication in thin film form, and the unique phenomena like radiation enhanced diffusion.     

Model based online diagnosis of unbalance and transverse fatigue crack in rotor systems

A model based technique for online identification of malfunctions in rotor systems is discussed. Presence of fault changes the dynamic behavior of the system. This change is taken into account by equivalent loads acting on the undamaged system model. Equivalent loads are fictitious forces and moments acting on the undamaged system model, which generate a dynamic behavior identical to that of the real damaged system. The mathematical representation of equivalent loads is referred to as Fault Model. The work focuses on developing a fault model for a transverse fatigue crack in shaft and testing it through simulated studies. The basic principle of the technique is validated for unbalance identification, through numerical simulations as well as by experiments on a real rotor system.     

Newby shift ofK=0 rotational bands in odd-odd rare-earths

A data set of 29 experimentally determined Newby shifts in rare-earth nuclei is examined for the reliability of each values. Using this data set, Newby shifts are obtained which are free from the Coriolis and the particle-particle coupling effects. These new empirical values help resolve the failure of a recently proposed rule for the sign of the Newby shift in the {5/2[413]p − 5/2[642]n} configuration of¹⁶⁰Tb and the {5/2[402]p − 5/2[512]n} configuration of¹⁷⁴Lu. Also the Newby shifts are significantly modified in two other cases namely the {1/2[411]p − 1/2[521]n} configuration in¹⁶⁸Tm and the {1/2[541]p − 1/2[521]n} configuration in¹⁷²Lu. Only marginal changes are seen in the rest of the cases in the rare-earth nuclei.     

Enhanced grain growth in YBa2Cu3O7−δ doped with Ag,Cu, and CuO

Powders of YBa₂Cu₃O_7– were mixed with Ag, Cu, and CuO powders, pressed and sintered in air and oxygen. Grain-growth enhancement has been observed in the doped samples on sintering in oxygen at 980°C and its attributable to a partial melting and decomposition followed by crystallization during cooling. While the mechanisms of the partial melt may differ with dopant, grain growth enhancement appears to be a common feature of partial melt followed by slow cooling. The possibility of using suitable dopants in aiding an aligned grain structure is pointed out.     

Local dynamic mechanical properties in model free-standing polymer thin films

High-frequency sinusoidal oscillations of a coarse-grained polymer model are used to calculate the local dynamic mechanical properties (DMPs) of free-standing polymer thin films. The storage modulus G(') and loss modulus G(") are examined as a function of position normal to the free surfaces. It is found that mechanically soft layers arise near the free surfaces of glassy thin films, and that their thickness becomes comparable to the entire film thickness as the temperature approaches the glass transition T(g). As a result, the overall stiffness of glassy thin films decreases with film thickness. It is also shown that two regions coexist in thin films just at the bulk T(g); a melt-like region (G(')G(")) in the middle of the film. Our findings on the existence of a heterogeneous distribution of DMPs in free-standing polymer thin films provide insights into recent experimental measurements of the mechanical properties of glassy polymer thin films.