Synthesis and properties of highly thermally stable ultrathin films of fluorine-containing hyperbranched polybenzoxazoles

In this paper, we aimed to develop ultrathin films of hyperbranched polybenzoxazole with a thickness in the range between 1 and 100 nm. They are expected to have great potential for various applications as functional materials due to their high thermal stability, good chemical resistance and mechanical strength. The synthesis of various hyperbranched poly(o-hydroxyamide)s as precursors of polybenzoxazole was examined by the polycondensation of 2,2-bis(3-amino-4-hydroxyphenyl)propane (AHP) and 2,2-bis(3-amino-4-hydroxyphenyl)hexafluoropropane (AHFP) with 1,3,5-benzenetricarbonyl trichloride (BCC), yielding the corresponding hyperbranched poly(o-hydroxyamide), poly(AHFP_m-co-AHP_n-co-BCC_2.0), with M_n in the range between 12,870 and 22,210 in satisfactory yields. Poly(AHFP_3.0-co-BCC_2.0), poly(AHFP_2.25-co-AHP_0.75-co-BCC_2.0), and poly(AHFP_1.50-co-AHP_1.50-co-BCC_2.0) showed good solubility and film-forming ability, and ultrathin films 8.9–88.6 nm thick were prepared on silicon wafers. Heating of the ultrathin films of poly(AHFP_m-co-AHP_n-co-BCC_2.0) on a hot plate at 350 °C for 1 h afforded the corresponding ultrathin films of hyperbranched polybenzoxazole, poly(AHFP_m-cyclo-AHP_n-cyclo-BCC_2.0), with a thickness of 5.3–82.4 nm. Double-layer thin films consisting of resist materials on top of hyperbranched polybenzoxazole were also prepared.