Etching of Silicon Nitride in CCl2F2, CHF3, SiF4, and SF6 Reactive Plasma: A Comparative Study

Silicon nitride is an important material layer in various types of microelectronic devices. Because of continuous integration of devices, patterning of this layer requires a highly selective and anisotropic etching process. Reactive ion etching is one of the most simple and popular plasma processes. The present work is an experimental analysis of primary etch characteristics in reactive ion etching of silicon nitride using chlorine- and/or fluorine-based organic and inorganic chemistries (CCl ₂ F ₂+O ₂ , CHF ₃+O ₂ , SiF ₄ +O₂, SF₆+O ₂ , and SF ₆+He) in order to obtain a simultaneous etch selectivity against polysilicon and silicon dioxide. A recipe, in CCl ₂ F ₂ /O ₂ plasma chemistry, which provides acceptable etch characteristics, along with a reasonable simultaneous selectivity against polysilicon and silicon dioxide, has been formulated.     

Determination of 90Sr in environmental samples using solid phase extraction chromatography

The p-tert-butyl calix[4]arene thiophenol derivative was successfully synthesized with reflux condition and was characterized by FT-IR and ¹H-NMR. This work mainly adopted the method of controlling variables. The results showed that the optimum pH value, temperature and extraction time were respectively 4.5, 25 °C and 90 min. By calculating the data of the enthalpy change and gibbs free energy, indicating that the process of reaction was an exothermic and spontaneous process, and it demonstrated a close agreement with pseudo-second-order kinetic model. It is also found that the coexisting cations on the extraction of uranium had greater influence.

     

Weak reciprocal continuity and fixed point theorems

The aim of the present paper is to introduce the notion of weak reciprocal continuity and obtain fixed point theorems by employing the new notion. The new notion is a proper generalization of reciprocal continuity and is applicable to compatible mappings as well as noncompatible mappings. Our results generalize several fixed point theorems.     

Phytochemical investigation of ethyl acetate extract from Curcuma aromatica Salisb. rhizomes

Three phytochemicals, curcumin 1, demethoxycurcumin 2 and β-sitosterol-3-O-β-d-glucopyranoside 3 have been isolated from the ethyl acetate extract of rhizomes of Curcuma aromatica. Chemical structures of all the three isolates were determined using spectroscopic and chemical analyses. β-Sitosterol-3-O-β-d-glucopyranoside has been isolated for the first time from this plant.     

Syrian hamster embryo (SHE) assay (pH 6.7) coupled with infrared spectroscopy and chemometrics towards toxicological assessment

The Syrian hamster embryo (SHE) assay (pH 6.7) is an in vitro candidate to replace in vivo carcinogenicity tests. However, the conventional method of visual scoring of foci (non-transformed vs. transformed colonies) can be time-consuming and is open to subjectivity. Infrared (IR) spectroscopy has the potential to provide objective assessment of such SHE colonies with the added advantage of potentially providing mechanistic information. In this study, SHE cells were treated with one of eight different chemical regimens, allowed in culture to attach and form foci on IR-reflective glass slides; these were subsequently interrogated by attenuated total reflection (ATR) Fourier-transform IR (FTIR) spectroscopy. Derived mid-IR spectra (n = 13,406) were subjected to chemometric analysis focusing primarily on the extraction of biochemical information related to test agent treatment and/or morphological transformation. The use of ATR-FTIR spectroscopy with chemometrics to analyze the SHE assay is a novel approach to toxicological assessment.     

Analysis of 5-methyltetrahydrofolate in human blood, serum and urine by on-line coupling of capillary isotachophoresis and zone electrophoresis

The predominant circulating folate coenzyme in plasma/serum, 5‐methyltetrahydrofolate (5‐MTHF) was determined in human blood, serum and urine using a method based on the hyphenation of capillary ITP and zone electrophoresis. Measurements were done with a commercially available instrument for capillary isotachophoresis equipped with a column‐switching system. The choice of electrolytes was limited by the instability of 5‐MTHF and volatility of electrolytes for the potential coupling of the instrumentation with MS detector. To get an insight into the separability of individual sample components in an isotachophoretic analysis, we constructed zone existence diagrams for isotachophoretic electrolyte systems having a leading electrolyte composed of acetate and ammonium of pH 4.5 and 7.0, hydrocarbonate and ammonium, pH 7.8, chloride and ammonium, pH 5.6, and chloride and creatinine, pH 5.0, with hydroxide ion as the terminator. For isotachophoretic preseparation, the non‐volatile leading electrolyte with good buffering capacity composed of 1×10⁻² M HCl and 2.5×10⁻² M creatinine, pH 5.0, and terminating electrolyte composed of 1×10⁻² M MES was selected as the most suitable. The optimum BGE for CZE analysis from the standpoint of analyte stability, separability and volatility for MS coupling was 1×10⁻² M acetate with 3.5×10⁻² M ammonium, pH 4.5. Using this combination of electrolytes, LODs reached with optical detection at 220 nm were 1.6×10⁻⁷ M in human blood, 1.1×10⁻⁷ M in human serum and 4.7×10⁻⁶ M in human urine. Estimated content of 5‐MTHF in blood and serum samples of women following oral daily administration of 0.8 mg of folic acid was 1.2×10⁻⁵ and 5.8×10⁻⁶ M, respectively.     

Effect of anion coordination upon radiationless transitions of the uranyl ion

At 80 K, where the deactivation processes in uranyl luminescence in solutions are temperature independent, the radiationless transition rate depends upon the presence of H₂O in the first coordination sphere of the uranyl ion, UO₂²⁺. It is found that such radiationless transitions are due to a photophysical intramolecular process.     

Time-resolved total internal reflection fluorescence spectroscopy. Part I. Photophysics of Coumarin 343 at liquid/liquid interface

Pico-second time-resolved time-correlated single photon counting (TCSPC) technique under the total internal reflection (TIR) condition has been used to study the photophysical properties of Coumarin 343 (C343) dye molecules adsorbed at the water/1,2-dichloroethane (DCE) interface. The fluorescence decay profile of C343 under TIR condition at the water/DCE interface was non-exponential and fitted to the double exponential decay function with the fluorescence lifetimes 0.3 and 3.6 ns, which proved the existence of two different forms of C343 species having largely different lifetimes at the interface. The longer fluorescence lifetime component of C343 at the interface is attributed to the emission from the monomeric form of the dye molecules and the shorter lifetime component is due to the aggregation of dye molecules. The penetration depth dependence of decay curves indicated no change in the fluorescence lifetime components, however, the amplitude corresponding to the lifetime of aggregate increased and the amplitude corresponding to the lifetime of monomer decreased with the decrease in penetration depth of the aqueous phase from the interface. Aggregation is significant in the interfacial layer. The decrease in monomer lifetime at the interface compared to that in the bulk solution is interpreted in terms of excitation energy migration between the dye molecules.