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51.
研究了HfN/HfO2高K栅结构p型金属-氧化物-半导体(MOS)晶体管(MOSFET)中,负 偏置-温度应力引起的阈值电压不稳定性(NBTI)特征.HfN/HfO2高K栅结构的等效 氧化层厚度(EOT)为1.3nm,内含原生缺陷密度较低.研究表明,由于所制备的HfN/HfO2 高K栅结构具有低的原生缺陷密度,因此在p-MOSFET器件中观察到的NBTI属HfN/HfO2高K栅结构的本征特征,而非工艺缺陷引起的;进一步研究表明,该HfN/HfO2高K栅结构中观察到的NBTI与传统的SiO2基栅介质p-MOSFET器件中观察 到的NBTI具有类似的特征,可以被所谓的反应-扩散(R-D)模型表征: HfN/HfO2 栅结构p-MOSFET器件的NBTI效应的起源可以归为衬底注入空穴诱导的界面反应机理,即在负 偏置和温度应力作用下,从Si衬底注入的空穴诱导了Si衬底界面Si-H键断裂这一化学反应的 发生,并由此产生了Si+陷阱在Si衬底界面的积累和H原子在介质层内部的扩散 ,这种Si+陷阱的界面积累和H原子的扩散导致了器件NBTI效应的发生.
关键词:
高K栅介质
负偏置-温度不稳定性(NBTI)
反应-扩散(R-D)模型 相似文献
52.
Anisha Gokarna Yong Hwan Kim Yong-Hoon Cho Min Su Lee In Cheol Kang Hyun Kyu Park Min Gon Kim Bong Hyun Chung 《Optical Review》2006,13(4):288-291
We demonstrate the fluorescence mapping of protein microarrays by the technique of scanning near-field optical microscopy
(SNOM) and confocal microscopy. Micron sized spots (300 μm) of human Immunoglobulin G (hIgG) protein with and without a Cy3
dye labeling have been fabricated on glass substrates by an immobilization method which makes use of calixcrown derivatives
termed Prolinker. We have also tried to probe into the well-known “doughnut effect” observed in fluorescence images of proteins
using the SNOM technique. The topographic and fluorescence SNOM images revealed that the number of proteins at the boundary
of the spot were more than at the center in the case of the microarray spot which showed brighter luminescence at the edge
than at the center in the confocal image. 相似文献
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57.
Cheng-shen Zhu Xin Kang Su-qin He Liu-yang Wang Li-yun Lu College of Materials Engineering Zhengzhou University Zhengzhou China 《高分子科学》2002,(6):551-557
The montmorillonites (MMTs), layered, smectite-type silicates, were premodified by two different methods priorto the polymer melt intercalation. In one case MMTs were modified with cetyltrimethylammonium bromide (CTAB), andtermed as organomontmorillonites (OMMTs); in the other case MMTs were modified by nylon, and the products were calledmodified montmorillonites (MMMTs). The effects of CTAB and nylon on the MMTs were investigated by using TG andWAXD. The results show that interlayer spacings of CTAN and nylon modified MMTs are larger than that of sodium MMTs.Then, polyamide 66 (PA 66)/MMT nanocomposites were obtained through the method of melt intercalation of polymers. Thenanocomposites were characterized by WAXD, TEM and Molau experiments. The results indicate that the MMTs dispersehomogeneously in the PA 66 matrix. The mechanical properties of nanocomposites, such as tensile properties and flexuralproperties, were also measured and show a tendency to increase with increase of MMT content and reach the maximumvalues at 5phr MMT content. The heat distortion temperature (HDT) of the nanocomposites (7 phr) is about 32 K higher thanthat of pure PA 66. 相似文献
58.
Ji-Hyun Seo Ju-Woon Lee Jae-Hun Kim Eui-Baek Byun Soo-Young Lee Il-Jun Kang Myung-Woo Byun 《Radiation Physics and Chemistry》2007,76(11-12):1855-1857
Egg allergy is one of the most serious of the immediate hypersensitivity reactions to foods. Such an allergic disorder is mediated by IgE antibodies stimulated by T-helper type 2 (Th2) lymphocytes. This study was undertaken to evaluate changes of allergenicity and cytokine profiles by exposure of irradiated ovalbumin (OVA), a major allergen of egg white, in the OVA-allergic mice model. OVA solutions (2 mg/ml in 0.01 M phosphate buffered saline (PBS) were gamma-irradiated to 50 and 100 kGy. The allergenicity in the OVA-allergy-induced mice model was remarkably reduced when challenged with irradiated OVA. Cultures of spleen cells harvested from OVA-sensitized mice showed a significant decrease in Th2 cytokine levels of ILs-4 and -5 with a concomitant increase in Th1 cytokine levels of IL-12 when co-cultured with irradiated OVA. However, IFN-γ level decreased dependant on the radiation dose of co-cultured OVA. The levels of IgEs and Th2-cytokine were reduced dependant on the radiation dose. These data show that the irradiated OVA could downregulate the activity of Th2 lymphocytes in OVA-sensitized mice. 相似文献
59.
有机化合物在光窗上的结焦严重地影响激光引发化学反应及光学原位实时探测。本文报道在1,2-二氯丙烷反应系统中,光窗结焦现象同时存在于激光引发反应及热反应过程中,对光窗在300℃条件 下的结焦机理研究表明,少量氧气在光窗结焦过程中起关键作用。结焦前驱体的红外光谱研究表明,前驱体的可能结构为1-丙炔-1,3-二醇的缩聚体。该化合物极易通过缩聚反应形成更大的分子,最终导致光 窗结焦。对系统及反应物进行彻底除氧,光窗结焦现象大为改善。 相似文献
60.
Ceria-supported copper-palladium catalysts have been tested in the hydrogenation of 1,3-butadiene. The SMSI behavior of the bimetallic catalysts depended on the temperature of reduction. They were analyzed by H2 chemisorption and XPS. 相似文献