Study on contamination of projection optics surface for extreme ultraviolet lithography

Ru-capped Mo/Si multilayer mirrors were irradiated by EUV in a vacuum atmosphere with ethanol or decane gas, and their reflectivity changes by contamination were investigated by changing the amount of introduced gas. The reflectivity hardly decreased by EUV irradiation in the ethanol-introduced atmosphere. On the other hand, the reflectivity decreased by about 5% in the decane-introduced atmosphere at a decane pressure of P_Decane = 1.3 × 10⁻⁴ Pa, an EUV power of about 200 mW/mm², and an EUV dose of 150 J/mm². EUV irradiation to the Ru-capped multilayer mirrors was also performed in the presence of water vapor and decane. The surface oxidation by EUV irradiation with a water vapor pressure of PH₂O=1.3×10⁻⁵ Pa was controlled by the introduction of decane at a pressure of P_Decane = 7.0 × 10⁻⁷ to 1.3 × 10⁻⁶ Pa.     

Explicit formula of optimal replacement under additive shock processes

The optimal machine replacement problem is discussed for the case, where damage processes are general jump processes. Considering an expected average cost and an expected discounted cost, an explicit formula of optimal replacement time is shown under appropriate conditions for damage processes.     

Effect of ionization on the temperature- and pressure-induced phase transitions of poly(N-isopropylacrylamide) gels

The ionization effects on the pressure-induced phase transition of weakly charged poly(N-isopropylacrylamide-co-acrylic acid) (PNIPA-AAc) gels have been investigated by small-angle neutron scattering. At low temperature, T, and pressure, P, the structure factor of PNIPA-AAc gels was well represented by a Lorentzian (L) function, which was similar to noncharged PNIPA gels. However, at high Ps, the contribution of inhomogeneities became large and a squared-Lorentzian term had to be added in addition to the L term. At high Ts, on the other hand, a scattering maximum appeared, indicating microphase separation. This scattering maximum was suppressed by increasing P up to P approximately 100 MPa and then reincreased at higher Ps. The following facts were disclosed: (1) The peak position and height were very sensitive to P, which is mainly ascribed to strong pressure dependence of hydrophobic interaction, (2) ionization leads to microphase separation at elevated temperatures, (3) the re-entrant phase behavior is commonly observed in the P-T plane due to the parabolic variation of the polymer-solvent interaction with P, and (4) the pressure and temperature dependence of the structure factor was reproduced with the Rabin-Panyukov theory and was interpreted with a convexity of hydrophobic interaction with respect to pressure.     

Kinetics of craze initiation in polystyrene in N-alcohols

The kinetics of craze initiation has been investigated for unmodified and rubber-modified polystyrenes in n-alcohols. The dependence on time and temperature of the critical strain at which crazes could be detected visually was determined with a Bergen elliptical strain device. Sorption studies were also conducted at room temperature on films exposed to the saturated vapor of n-alcohol. The analysis of crazing data in terms of the Eyring model gave activation energies from 9.4 to 17.4 kcal/mole, increasing with increasing chain length of n-alcohol and increasing rubber content. The activation volume multiplied by a stress concentration factor decreased with increasing rubber content and was nearly independent of the chain length of the n-alcohol. The larger the diffusion coefficient, which we measured by sorption experiments, the smaller was the activation energy for craze initiation. The values of diffusion coefficients, estimated from the experimental data on craze initiation, were found to be comparable with those from the sorption experiments. It was concluded that the rate of craze initiation on exposure to liquids is controlled by the diffusion of the molecules of liquid into polymer.     

Boron rings enclosing planar hypercoordinate group 14 elements

Sets of boron rings enclosing planar hypercoordinate group 14 elements (ABn(n-8); A = group 14 element; n = 6-10) are designed systematically based on geometrical and electronic fit principles: the size of a boron ring must accommodate the central atom comfortably. The electronic structures of the planar minima with hypercoordinate group 14 elements are doubly aromatic with six pi and six in-plane radial MO systems (radial MOs are comprised of boron p orbitals pointing toward the ring center). This is confirmed by induced magnetic field and nucleus-independent chemical shift (NICS) computations. The weakness of the "partial" A-B bonds is compensated by their unusually large number. Although a C7v pyramidal SiB8 structure is more stable than the D8h isomer, Born-Oppenheimer molecular dynamics simulations show the resistance of the D8h local minimum against deformation and isomerization. Such evidence of the viability of the boron ring minima with group 14 elements encourages experimental realization.     

Heterodimeric particle assemblies: preparation of anisotropically connected spherical silica particles via surface-bound gold nanoparticles

Assemblies of heterodimeric particles were prepared through selective coupling of two kinds of spherical silica particles of different sizes by connection with gold nanoparticles attached anisotropically to the particles.