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1.
电沉积技术制作高聚物微流控芯片模具   总被引:4,自引:0,他引:4  
罗怡  褚德南  娄志峰  刘冲  王立鼎 《电化学》2005,11(2):204-207
利用电沉积技术制作微流控芯片金属模具,方法是:使用新型超厚光刻胶SU-8胶作近紫外光刻,并在光刻后的图案上电沉积金属Ni,之后去胶,最终获得金属模具.该法减小了电沉积工作量.采用反向电流预处理基底、并适当增加电铸液的添加剂以及脱模后真空退火,即可明显提高电沉积微结构与基底的结合力.用此金属模具成功热压了PMMA,制成了微流控芯片.  相似文献   

2.
微流体芯片动态调控蛋白水溶液pH或Ca~(2+)浓度   总被引:1,自引:0,他引:1  
模拟蚕和蜘蛛的纺丝系统,以载玻片(75×25mm)为基片,SU-8为阳模材料,聚二甲基硅氧烷(PDMS)为微通道(宽500μm,深100μm)构筑材料,利用光刻及模塑成型等技术设计、制备了微流体芯片,并应用于再生丝素蛋白(RSF)水溶液组成的动态调控。该芯片利用微流体的层流特性使RSF水溶液与pH缓冲液或钙离子缓冲液在微通道内平行流动而不发生混合。在水溶液中RSF质量分数不变的前提下,通过离子扩散实现了流动场下RSF水溶液pH值或钙离子浓度的动态调控。  相似文献   

3.
发展了一种以"二次刻蚀"技术制备玻璃微-纳流控芯片的新方法. 首先, 采用紫外光刻和化学湿法刻蚀技术在玻璃基片上加工微米深度的微通道; 去除剩余的光胶后, 在刻有微通道的基片上旋涂一层新的光胶; 再通过二次紫外光刻和湿法刻蚀在该基片上加工深度小于100 nm的纳通道; 最后, 采用室温键合技术, 将带有微纳结构的基片与盖片封合制成玻璃微-纳流控复合芯片. 利用本方法可以在普通化学实验室以简易的设备制得具有微-纳米复合结构的玻璃芯片. 将此玻璃微-纳流控复合芯片成功地应用于以电动离子捕集技术富集荧光素钠异硫氰酸酯(FITC)标记的人血清蛋白(HSA). 结果表明, 对于0.5 mg/mL的FITC-HSA, 30 s内富集倍率可达到200倍以上.  相似文献   

4.
聚二甲基硅氧烷(PDMS)材料广泛地应用于制作微流控芯片.本文研究了PDMS预聚体与固化剂的配比、固化温度和固化时间、固化模具以及紫外光照射等重要因素对PDMS芯片封接强度的影响,得到PDMS芯片封接的最佳条件为:基片和盖片所用PDMS预聚体与固化剂的最佳质量配比为10∶1,最佳固化温度为75℃,固化时间为40 min;采用不同材料模具制作PDMS片,其表面均方根粗糙度控制着芯片的粘接强度.在研究的三种模具材料中,用有机玻璃模具制作的PDMS片间的粘接强度最高,用玻璃模具制作的PDMS片间粘接强度最小;PDMS片经紫外光照射表面处理后,粘接强度会增加.  相似文献   

5.
制造玻璃微流控芯片的简易加工技术   总被引:18,自引:0,他引:18  
殷学锋  沈宏  方肇伦 《分析化学》2003,31(1):116-119
报道了在普通化学实验室中设计和加工玻璃微流控芯片的方法。用Adobe Illustrator 8.0软件微流控片图形,通过高分辨率激光照排机在照相底片上制得光刻掩模。用商品匀胶铬板表面的145nm Cr/570nm Az-1805光胶层作为保护层,在50℃刻蚀液(1mol/L HF 1mol/L NaF)中,刻蚀速度为2μm/min。通过彻底洗净加工好的玻璃基片,提高了芯片热键合的质量和成品率。制得的芯片已成功地用于氨基酸分离和PCR扩增。  相似文献   

6.
用十八烷基三氯硅烷(OTS)/正己烷溶液为印墨在玻璃基片上进行微接触印刷,得到图案化的自组装层,然后以此对聚苯乙烯溶液进行诱导分布,并在苯胺溶液中对其进行诱导聚合反应生长出聚苯胺微图形。直接用聚合物溶液作为印墨制作了环氧树脂微条纹和聚苯乙烯两层交叉微结构。  相似文献   

7.
应用分子动力学模拟软件Materials Studio构建SU-8光刻胶与Ni基底的界面结构,研究后烘温度对界面结合性的影响.结合工艺中所采用的后烘温度,模拟计算了338~368K时Ni基底上SU-8胶的交联反应,在经过反复的能量最小化和分子动力学模拟后,对最终得到的平衡结构进行了界面结合能的计算.计算结果表明界面结合能随着后烘温度的升高而增大,在368K时结合能达到最大值,说明此时界面结合最好.对分子体系进行了能量分析,结果表明界面分子间的范德华力作用能是影响界面结合的主要因素.对体系界面原子间进行了径向分布函数分析,发现范德华力作用范围内(0.31~0.60nm)出现两组Ni—O的强峰,也证实了上述结论。  相似文献   

8.
聚甲基丙烯酸甲酯微流控分析芯片的简易热压制作法   总被引:18,自引:0,他引:18  
提出聚甲基丙烯酸甲酯 ( PMMA)微流控分析芯片的一种简易热压制作法 ,研究了镍基、单晶硅和玻璃 3种阳模制备芯片及芯片的封合条件 .采用扫描电镜 ( SEM)和电荷耦合检测器 ( CCD)对 PMMA芯片的微通道及其横截面形貌进行了表征 .SEM图和 CCD图表明实现了热压封接 .测定了 PMMA芯片的伏安曲线和电渗流 ,其电渗流值与文献报道值基本一致 .本法制作的 PMMA芯片用于电泳分离 Cy5荧光染料 ,峰高RSD为 2 .2 % ( n=1 1 ) ,理论塔板数 7.4× 1 0 4m-1.  相似文献   

9.
周峰  牟宗刚  于波  王博  郝京诚  陈淼  刘维民 《化学学报》2004,62(15):1437-1442,FJ04
采用表面引发室温原子转移自由基聚合(ATRP)方法在金基底上原位制备了接枝聚合物刷,其制备过程用厚度测量,ATR-FTIR,XPS等进行了表征,初始时聚合物刷的厚度随着聚合时间的增加线性增加,表现为活性聚合的特征.XPS表征证明表面引发聚合后聚合物刷末端仍然存在ATRP反应的引发剂.紫外光刻图案化的聚合物刷作为电沉积的模板,经电沉积、后紫外处理、湿化学刻蚀步骤后得到了分离的导电聚合物微阵列结构,通过浇注/粘附处理将导电聚合物微阵列转移至硅油弹性体片,由于导电聚合物在湿化学刻蚀中对基底金具有良好的保护作用,因此在导电聚合物阵列被转移后,基底表面得到金微阵列。  相似文献   

10.
运用约束刻蚀剂层技术(CELT)在金属镍(Ni)表面实现三维微图形加工,以规整的三维齿状微结构作模板,获得可有效CELT加工的化学刻蚀和捕捉体系,在Ni表面得到了与齿状结构互补的三维微结构并应用扫描电子显微镜(SEM)和原子力显微镜(AFM)表征刻蚀图案,证实CELT可用于金属表面Ni的三维微图形刻蚀加工.  相似文献   

11.
The application of silicon mold inserts by micro‐hot embossing molding has been explored in microfluidic chip fabrication. For the mold insert, this study employed an SU‐8 photoresist to coat the silicon wafer. Ultraviolet light was then used to expose the pattern on the SU‐8 photoresist surface. This study replicates the microstructure of the silicon mold insert by micro‐hot embossing molding. Different processing parameters (embossing temperature, embossing pressure, embossing time, and de‐molding temperature) for the cycle‐olefin polymer (COP) film of microfluidic chips are evaluated. The results showed that the most important parameter for replication of molded microfluidic chip is embossing temperature. De‐molding temperature is the most important parameter for surface roughness of the molded microfluidic chip. The microchannel is bonded with a cover by thermal bonding processing to form the sealed microfluidic chip. The bonding temperature is the most important factor in the bonding strength of the sealed microfluidic chip. Copyright © 2009 John Wiley & Sons, Ltd.  相似文献   

12.
This communication reports a new method to form multilevel features in a single layer of SU-8 photoresist to facilitate the generation of 3D microfluidic chips. The method utilizes the spatial dependence of diffracted light intensity to selectively overexpose masked regions of photoresist and requires only a UV light source and a single transparency mask. 3D structures are formed within microfluidic channels using this selective overexposure method, with feature sizes being determined by the exposure dose and mask feature sizes. The dimensions of the internal features and the microfluidic channels can be varied independently according to these parameters, and any number of different heights can be obtained in a single exposure step. The method provides a simple means of forming 3D microfluidic structures with integrated features, including mixing structures, flow stabilization ridges, and separation weirs to increase the capabilities of microfluidic chips in a variety of microchemical applications.  相似文献   

13.
We have developed a method for rapid prototyping of hard polymer microfluidic systems using solvent imprinting and bonding. We investigated the applicability of patterned SU-8 photoresist on glass as an easily fabricated template for solvent imprinting. Poly(methyl methacrylate) (PMMA) exposed to acetonitrile for 2 min then had an SU-8 template pressed into the surface for 10 min, which provided appropriately imprinted channels and a suitable surface for bonding. After a PMMA cover plate had also been exposed to acetonitrile for 2 min, the imprinted and top PMMA pieces could be bonded together at room temperature with appropriate pressure. The total fabrication time was less than 15 min. Under the optimized fabrication conditions, nearly 30 PMMA chips could be replicated using a single patterned SU-8 master with high chip-to-chip reproducibility. Relative standard deviations were 2.3% and 5.4% for the widths and depths of the replicated channels, respectively. Fluorescently labeled amino acid and peptide mixtures were baseline separated using these PMMA microchips in <15s. Theoretical plate numbers in excess of 5000 were obtained for a approximately 3 cm separation distance, and the migration time relative standard deviation for an amino acid peak was 1.5% for intra-day and 2.2% for inter-day analysis. This new solvent imprinting and bonding approach significantly simplifies the process for fabricating microfluidic structures in hard polymers such as PMMA.  相似文献   

14.
Qu S  Chen X  Chen D  Yang P  Chen G 《Electrophoresis》2006,27(24):4910-4918
A novel method for the rapid fabrication of poly(methyl methacrylate) (PMMA) microfluidic chips using poly(dimethylsiloxane) (PDMS) templates has been demonstrated. The PDMS molds were fabricated by soft lithography. The dense prepolymerized solution of methyl methacrylate containing thermal and UV initiators was allowed to polymerized between a PDMS template and a piece of a 1 mm thick commercial PMMA plate under a UV lamp. The images of microchannels on the PDMS template were precisely replicated into the synthesized PMMA substrates during the UV-initiated polymerization of the prepolymerized solution on the surface of the PMMA plate at room temperature. The polymerization could be completed within 10 min under ambient temperature. The chips were subsequently assembled by thermal bonding of the channel plate and the cover sheet. The new fabrication method obviates the need for specialized replication equipment and reduces the complexity of prototyping and manufacturing. Nearly 20 PMMA chips were replicated using a single PDMS mold. The attractive performance of the new microfluidic chips has been demonstrated by separating and detecting cations in connection with contactless conductivity detection. The fabricated PMMA microchip has also been successfully employed for the determination of potassium and sodium in environmental and biological samples.  相似文献   

15.
A microfluidic device made of polydimethylsiloxane was developed for continuous evaluation of natural migration mobility of many eukaryotic cells in relaxed and deformed state. The device was fabricated by standard photolithography and soft lithography techniques using the SU-8 3010 negative photoresist on a glass wafer as the master mold. The simple flow-free device exploits the chemotactic movement of cells through a set of mechanical barriers in the direction of concentration gradients of attractants. The barriers are formed by arrays of circular cross-section pillars with decreasing spacing 7, 5, and 3 μm. To pass through the obstacles, the cells are deformed and change their cytoskeletal architecture. The instantaneous migration velocities of cells are monitored in a time-lapse setup of the scanning confocal microscope. Thus, the cellular deformability and migratory activity can easily be evaluated. The functionality of the device was tested with model HeLa cells stably transfected with fluorescent Premo FUCCI Cell Cycle Sensor. The designed device has the potential to be implemented for testing the tendency of patients’ tumors to metastasis.  相似文献   

16.
This paper describes a novel fabrication process based on successive wafer-level bonding and releasing steps for stacking several patterned layers of the negative photoresist EPON SU-8. This work uses a polyimide film to enhance previous low temperature bonding technology. The film acts as a temporary substrate where the SU-8 is photopatterned. The poor adhesion between the polyimide film and SU-8 allows the film to be released after the bonding process, even though the film is still strong enough to carry out photolithography. Using this technique, successive adhesive bonding steps can be carried out to obtain complex 3-D multilayer structures. Interconnected channels with smooth vertical sidewalls and freestanding structures are fabricated. Unlike previous works, all the layers are photopatterned before the bonding process yielding sealed cavities and complex three-dimensional structures without using a sacrificial layer. Adding new SU-8 layers reduces the bonding quality because each additional layer decreases the thickness uniformity and increases the polymer crosslinking level. The effect of these parameters is quantified in this paper. This process guarantees compatibility with CMOS electronics and MEMS. Furthermore, the releasing step leaves the input and the output of the microchannels in contact with the outside world, avoiding the usual slow drilling process of a cover. Hence, in addition to the straightforward integration of electrodes on a chip, this fabrication method facilitates the packaging of these microfluidic devices.  相似文献   

17.
玻璃微流控芯片廉价快速制作方法的研究   总被引:3,自引:0,他引:3  
研究了一种玻璃微流控芯片的快速、低成本制作工艺和方法. 该方法采用商品化的显微载玻片(soda-lime玻璃)作为芯片基质材料, 利用AZ 4620光刻胶代替传统工艺中的溅射金属层或多晶硅/氮化硅层作为玻璃刻蚀的掩膜层, 同时利用一种紫外光学胶键合方法代替传统熔融键合方法实现芯片的键合, 整个工艺对玻璃基质材料要求低, 普通微流控芯片(深度小于50 μm)制作流程仅需约3.5 h, 可降低制作成本, 缩短制作周期. 还系统地研究了光刻胶厚度、光刻胶硬烘时间和玻璃腐蚀液配比对玻璃微流控芯片制作的影响, 获得了优化的工艺参数.  相似文献   

18.
Kim SJ  Yang H  Kim K  Lim YT  Pyo HB 《Electrophoresis》2006,27(16):3284-3296
For disposable microfluidic devices, easy and inexpensive fabrication is essential. Consequently, replication of microfluidic devices, using injection molding or hot embossing, from a master-mold is widely used. However, the conventional master-mold fabrication technique is unsatisfactory in terms of time and costs. In this regard, direct Ni growth (electroplating) from a back plate is promising when the photoresist is well-defined. Here, we demonstrate the use of SU-8 as a photoresist to define the Ni-growth region. We accomplish this application by focusing on the adhesion, the sidewall profile, and the removal of SU-8: the adhesion is enhanced by controlling the exposure dose, the soft-baking time, and by choosing the adhesion-promoting layer; the sidewall profile is regulated by selecting the intensity of each exposed wavelength, showing an aspect ratio of up to 20.9; and, easy removal is achieved by choosing a proper photoresist-stripper. Using the master-mold fabricated by this method, we test the mechanical stability of the features according to the aspect ratio and length; in the hot embossing process, the features are stable in the aspect ratio of up to 5.8 at a length of 200 microm. In addition, the plastic devices fabricated from this method are applied to the passive stop valves, showing a capillary pressure (-0.2 to -7.2 kPa).  相似文献   

19.
A new SU-8 based microchip capillary electrophoresis (MCE) device has been developed for the first time with integrated electrochemical detection. Embedded electrophoretic microchannels have been fabricated with a multilayer technology based on bonding and releasing steps of stacked SU-8 films. This technology has allowed the monolithic integration in the device of the electrochemical detection system based on platinum electrodes. The fabrication of the chips presented in this work is totally compatible with reel-to-reel techniques, which guarantee a low cost and high reliability production. The influence of relevant experimental variables, such as the separation voltage and detection potential, has been studied on the SU-8 microchip with an attractive analytical performance. Thus, the effective electrical isolation of the end-channel amperometric detector has been also demonstrated. The good performance of the SU-8 device has been proven for separation and detection of the neurotransmitters, dopamine (DA) and epinephrine (EP). High efficiency (30,000-80,000 N/m), excellent precision, good detection limit (450 nM) and resolution (0.90-1.30) has been achieved on the SU-8 microchip. These SU-8 devices have shown a better performance than commercial Topas (thermoplastic olefin polymer of amorphous structure) microchips. The low cost and versatile SU-8 microchip with integrated platinum film electrochemical detector holds great promise for high-volume production of disposable microfluidic analytical devices.  相似文献   

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