Arsenic-free GaAs substrate preparation and direct growth of GaAs/AlGaAs multiple quantum well without buffer layer

High-temperature treatment of GaAs substrate without As flux in a preparation chamber was investigated as a substrate surface cleaning method for molecular beam epitaxial (MBE) growth. Oxide gases such as CO and CO₂ were almost completely desorbed at a temperature above which Ga and As started to evaporate from the substrate. During the cleaning at a temperature as high as 575°C for 30 min, about 100 nm thick GaAs was evaporated from the substrate, but its surface maintained mirror-like smoothness and showed streak pattern with surface reconstruction pattern in the reflection high energy electron diffraction (RHEED) observation. Direct growth of GaAs/Al GaAs quantum well (QW) structures was tried on such surfaces without introducing any buffer layers. The QW structure showed photoluminescence with both intensity and full width at half maximum comparable with those for the QW grown on the substrate cleaned by the conventional method with introducing a GaAs buffer layer.     

Theoretical analysis of equilibrium adsorption layers in CVD systems (Si-H-Cl,Ga-As-H-Cl)

Adsorption of Cl, GaCl, As, As₂, As₄, Ga and AsGaCl species on GaAs(111) in the temperature range of 973–1223 K, and Cl, H, Si, SiCl and SiCl₂ on Si(111) in the range of 1425–1525 K, has been considered for different gas phase compositions. All the faces are covered mainly with Cl and H atoms. The fraction of vacancies on GaAs(111)Ga varies in the range of 4–13% reaching ?50% on GaAs(111)As. On the Si(111) the typical fraction of the vacancies is ?1%. The main adsorbed molecules containing Ga and As atoms are GaCl and As₄. For example, at and T = 1073 K, the surface concentration of these molecules reaches ?4 and 2% on GaAs(111)Ga and ?26 and 6% on the GaAs(111)As faces, respectively. Under these conditions, AsGaCl complexes occupy only ?10^-4?10^-5 adsorption sites on both faces. The set of other data is presented. Surface diffusion in the dense adsorption layer is seriously hindered by the lack of vacancies. A rough estimate gives a value of the order of 10^-8 cm²/sec for the diffusion coefficient and diffusion length of several tens of distances for AsGaCl or As₄ complexes on the GaAs(111)Ga face. The local electric field caused by adatoms on the interface may seriously influence the reaction rate.     

Ga and In incorporation rates in Ga1−xInxAs growth by chemical beam epitaxy

GaAs, InAs and Ga_1?xIn_xAs layers were grown by chemical beam epitaxy (CBE) using triethylgallium, trimethylindium and tertiarybutylarsine as precursors for Ga, In and As, respectively. The growth rate during the homoepitaxial growth of GaAs and InAs, deduced from the frequency of reflection high-energy electron diffraction intensity oscillations, was used to calibrate the incorporation rates for the III elements. The In content of the Ga_1?xIn_xAs layers was measured by Rutherford backscattering spectrometry and compared with the value predicted from the above calibration data; while the measured In mole fraction is close to the predicted value for the samples grown for low In to Ga flux ratios (x<0.2), the In incorporation is enhanced for larger values of this ratio. The results obtained on layers grown at different substrate temperatures show that In mole fraction is almost constant at growth temperatures in the range 400–500 °C, but a strong dependence on the substrate temperature has been found outside this range. The above results, not observed for samples grown by solid source molecular beam epitaxy, indicate that some interaction between Ga and In precursors at the sample surface could take place during the growth by CBE.     

Structure characterization of MHEMT heterostructure elements with In<Subscript>0.4</Subscript>Ga<Subscript>0.6</Subscript>As quantum well grown by molecular beam epitaxy on GaAs substrate using reciprocal space mapping

The crystallographic parameters of elements of a metamorphic high-electron-mobility transistor (MHEMT) heterostructure with In_0.4Ga_0.6As quantum well are determined using reciprocal space mapping. The heterostructure has been grown by molecular-beam epitaxy (MBE) on the vicinal surface of a GaAs substrate with a deviation angle of 2° from the (001) plane. The structure consists of a metamorphic step-graded buffer (composed of six layers, including an inverse step), a high-temperature buffer of constant composition, and active high-electron-mobility transistor (HEMT) layers. The InAs content in the metamorphic buffer layers varies from 0.1 to 0.48. Reciprocal space mapping has been performed for the 004 and 224 reflections (the latter in glancing exit geometry). Based on map processing, the lateral and vertical lattice parameters of In_xGa_1–xAs ternary solid solutions of variable composition have been determined. The degree of layer lattice relaxation and the compressive stress are found within the linear elasticity theory. The high-temperature buffer layer of constant composition (on which active MHEMT layers are directly formed) is shown to have the highest (close to 100%) degree of relaxation in comparison with all other heterostructure layers and a minimum compressive stress.     

Electrical and structural characteristics of metamorphic In0.38Al0.62As/In0.37Ga0.63As/In0.38Al0.62As HEMT nanoheterostructures

The influence of the metamorphic buffer design and epitaxial growth conditions on the electrical and structural characteristics of metamorphic In_0.38Al_0.62As/In_0.37Ga_0.63As/In_0.38Al_0.62As high electron mobility transistor (MHEMT) nanoheterostructures has been investigated. The samples were grown on GaAs(100) substrates by molecular beam epitaxy. The active regions of the nanoheterostructures are identical, while the metamorphic buffer In _x Al_{1 ? x} As is formed with a linear or stepwise (by Δ _x = 0.05) increase in the indium content over depth. It is found that MHEMT nanoheterostructures with a step metamorphic buffer have fewer defects and possess higher values of two-dimensional electron gas mobility at T = 77 K. The structures of the active region and metamorphic buffer have been thoroughly studied by transmission electron microscopy. It is shown that the relaxation of metamorphic buffer in the heterostructures under consideration is accompanied by the formation of structural defects of the following types: dislocations, microtwins, stacking faults, and wurtzite phase inclusions several nanometers in size.     

Facilitating growth of InAs–InP core–shell nanowires through the introduction of Al

InAs nanowires were grown on GaAs substrates by the Au-assisted vapour–liquid–solid (VLS) method in a gas source molecular beam epitaxy (GSMBE) system. Passivation of the InAs nanowires using InP shells proved difficult due to the tendency for the formation of axial rather than core–shell structures. To circumvent this issue, Al_xIn_1?xAs or Al_xIn_1?xP shells with nominal Al composition fraction of x=0.20, 0.36, or 0.53 were grown by direct vapour–solid deposition on the sidewalls of the InAs nanowires. Characterisation by transmission electron microscopy revealed that the addition of Al in the shell resulted in a remarkable transition from the VLS to the vapour–solid growth mode with uniform shell thickness along the nanowire length. Possible mechanisms for this transition include reduced adatom diffusion, a phase change of the Au seed particle, and surfactant effects. The InAs–AlInP core-shell nanowires exhibited misfit dislocations, while the InAs–AlInAs nanowires with lower strain appeared to be free of dislocations.     

Silicon compensation and scattering mechanisms in two-dimensional electron gases on (110)GaAs

A study of the MBE growth of (001) and (110) (Al,Ga)As is reported, and the efficiency of Si as an n-type dopant in (110)GaAs is accessed. A 40 nm spacer two-dimensional electron gas (2DEG) structure grown on (110)GaAs gives a mobility of 540,000 cm² V⁻¹ s⁻¹ at 4 K after illumination. The dominant scattering mechanisms in 2DEGs on (110) and (001)GaAs grown under the separate optimum growth conditions for the two orientations are compared.     

Reflection high-energy electron diffraction intensity oscillations during growth of (Al,Ga)As on GaAs(111)A

We have made a reflection high-energy diffraction (RHEED) intensity oscillation study of the growth of (Al,Ga)As on GaAs and (Al,Ga)As (111)A surfaces. The RHEED intensity oscillations during growth of (Al,Ga)As are dependent on both growth temperature and As₄:Ga flux ratio. In addition, the oscillation period decreases as the Al fraction in the (Al,Ga)As is increased. Changes in the oscillation period during growth of the first few monolayers of both GaAs on (Al,Ga)As and (Al,Ga)As on GaAs may indicate the intermixing of Al and Ga near the heterointerface.     

Genetic algorithm for solution of the inverse problem in high-resolution X-ray reflectometry

The method of high-resolution X-ray reflectometry with application of the genetic Differential Evolution algorithm for global minimization of the error function is developed. The optimization of the computational process is performed by combining the genetic algorithm with the Levenberg-Marquardt method. This optimization reduced the computational time by a factor of 3–4. The structural properties of multilayer systems Al_xGa_1?x As/GaAs/Al_xGa_1?x As (x ～ 0.2) grown on GaAs(001) are investigated. The density profiles along the normal to the surface are obtained and the sizes of the transition layers are determined with a resolution of 0.1–0.2 nm.     

Epitaxial low-temperature growth of In<Subscript>0.5</Subscript>Ga<Subscript>0.5</Subscript>As films on GaAs(100) and GaAs(111)<Emphasis Type="Italic">A</Emphasis> substrates using a metamorphic buffer

A complex investigation of epitaxial In_0.5Ga_0.5As films grown on GaAs substrates with crystallographic orientations of (100) and (111)A in the standard high- and low-temperature modes has been performed. The parameters of the GaAs substrate and In_0.5Ga_0.5As film were matched using the technology of step-graded metamorphic buffer. The electrical and structural characteristics of the grown samples have been studied by the van der Pauw method, atomic force microscopy, scanning electron microscopy, and transmission/ scanning electron microscopy. The surface morphology is found to correlate with the sample growth temperature and doping with silicon. It is revealed that doping of low-temperature In_0.5Ga_0.5As layers with silicon significantly reduces both the surface roughness and highly improves the structural quality. Pores 50–100 nm in size are found in the low-temperature samples.     

High efficiency GaAs thin film solar cells by peeled film technology

p-GaAs/n-GaAs thin film concentrator solar cells were fabricated by Peeled Film Technology. This is the first paper that reports the concentration characteristics of thin film solar cells. The energy conversion efficiency of thin film solar cells at a concentration ratio of 109 is 9.4% and the output power density is 0.82 W/cm² · n-Ga_1?xAlxAs/p-GaAs heterojunction thin film solar cells were also fabricated. The initial heterojunction thin film solar cell with a Al mole fraction of 0.5 showed an efficiency of up to 13.5% (AM 1.5). It is proposed that Multi-Peeled Film Technology will give numerous GaAs thin films by selective etching of (GaAl)As/GaAs multi-layered structures.     

Shallow donors and deep levels in GaAs grown by atomic layer molecular beam epitaxy

We correlate the Si concentration measured by secondary ion mass spectrometry (SIMS) and the net donor concentration in GaAs:Si grown by atomic layer molecular beam epitaxy (ALMBE); Si was supplied during: (a) both the As and the Ga subcycles, (b) the As subcycle, and (c) the Ga subcycle; the layers were grown at temperatures in the 300-530°C range. The results show that Si incorporation and its compensation depend on the Si-supply scheme and that the extent of compensation decreases with the growth temperature. We also study the deep levels in the ALMBE GaAs grown under the above conditions. Our results show the occurrence of M1, M3 and M4 levels with concentrations that are: (i) essentially independent of both the Si supply scheme and the ALMBE growth temperature, (ii) close to those of MBE GaAs grown at 600°C, and (iii) up to 2 orders of magnitude lower than that of GaAs prepared by molecular beam epitaxy (MBE) at similar temperatures.     

Metamorphic growth of tensile strained GaInP on GaAs substrate

Optical and structural properties of tensile strained graded Ga_xIn_1−xP buffers grown on GaAs substrate have been studied by photoluminescence, X-ray diffraction, atomic force microscopy, and scanning electron microscopy measurements. The Ga composition in the graded buffer layers was varied from x=0.51 (lattice matched to GaAs) to x=0.66 (1% lattice mismatch to GaAs). The optimal growth temperature for the graded buffer layer was found to be about 80–100 °C lower than that for the lattice matched GaInP growth. The photoluminescence intensity and surface smoothness of the Ga_0.66In_0.34P layer grown on top of the graded buffer were strongly enhanced by temperature optimization. The relaxation of tensile GaInP was found to be highly anisotropic. A 1.5 μm thick graded buffer led to a 92% average relaxation and a room temperature photoluminescence peak wavelength of 596 nm.     

Structural and electrophysical analysis of MHEMT In0.70Al0.30As/In0.75Ga0.25As nanoheterostructures with different strain distributions in metamorphic buffer

A complex structural and electrophysical analysis of MHEMT In_0.70Al_0.30As/In_0.75Ga_0.25As nanoheterostructures grown on (100)GaAs substrates using two radically new designs of metamorphic buffer (providing different internal-strain distributions) has been performed. The lattice parameters of the constant-composition layers entering the metamorphic buffer have been determined by X-ray diffraction using symmetric and asymmetric (400) and (422) reflections. It is shown that, having chosen a proper design of metamorphic buffer in nanoheterostructures on GaAs substrates, it is possible to obtain electron mobility and concentration comparable with those for nanoheterostructures on InP substrates. The compositions of smoothing layers, determined from the peaks on rocking curves, are found agree well with the process values.     

HigHighly strained InGaAs/GaAs quantum wells emitting beyond 1.2 µm

Highly strained In_xGa_1–xAs quantum wells (QWs) with GaAs barriers emitting around 1.2 µm are grown on GaAs substrates by metal organic vapour phase epitaxy (MOVPE) at low growth temperatures using conventional precursors. The effects of growth temperature, V/III ratio and growth rate on QW composition and luminescence properties are studied. The variation of indium incorporation with V/III ratio at a growth temperature of 510 °C is found to be opposite to the results reported for 700 °C. By an appropriate choice of the growth parameters, we could extend the room temperature photoluminescence (PL) wavelength of InGaAs/GaAs QWs up to about 1.24 µm which corresponds to an average indium content of 41% in the QW. The results of the growth study were applied to broad area laser diodes emitting at 1193 nm with low threshold current densities. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Thermodynamic analysis of vapor-phase epitaxial growth of GaAsN on Ge

In this paper, we use thermodynamic analysis to determine how the nitrogen (N) ratio in the source gases affects the solid composition of coherently grown GaAs_1?xN_x(x～0.03). The source gases for Ga, As, and N are trimethylgallium ((CH₃)₃Ga), arsine (AsH₃), and ammonia (NH₃), respectively. The growth occurs on a Ge substrate, and the analysis includes the stress from the substrate–crystal lattice mismatch. Calculation results indicate that to have just a few percent N incorporation into the grown solid, the V/III ratio in the source gases should be several thousands and the input-gas partial-pressure ratio NH₃/(NH₃+AsH₃) should exceed 0.99. We also find that the lattice mismatch stress from the Ge substrate increases the V/III source–gas ratio required for stable growth, whereas an increase in input Ga partial pressure ratio has the opposite effect.     

Molecular structure of [(tBu)2Al(3,5-Me2py)]2(μ-O): Preferential hydrolysis of an aluminum-aryl over an aluminum-alkyl

The structure of [(^tBu)₂Al(3,5-Me₂py)]₂(μ-O) has been determined as a consequence of the preferential hydrolytic cleavage of an Al–O versus an Al–C bond from the hydrolysis of the quinone bridged compound, [(^tBu)₂Al(3,5-Me₂py)]₂(μ-OC₆H₄O). The Al–O distance is 1.710(1) Å and the Al–O–Al angle is 180° because of crystallographic symmetry. Crystal data: triclinic, P $\overline 1$ , a = 9.334(2) Å, b = 10.639(2) Å, c = 10.661(2) Å, α = 112.65(3)°, β = 93.84(3)°, γ = 115.84(3)°, V = 843.4(3) ų, Z = 1, R = 0.0581, R _w = 0.1674.     

Selective area growth of GaAs using a Ga beam with a step-function lateral intensity profile

Selective area growth of GaAs has been carried out in order to investigate the surface diffusion of Ga atoms using molecular beam epitaxy (MBE) with the aid of a Ga beam with a lateral step-function intensity profile. This step-function profile was obtained using a closely fitted GaAs shadow mask. When the mask edge was parallel to [01 ], a (311)A facet was typically observed near the edge of the Ga beam, while in the case of the mask edge parallel to [011], a (111)B facet was formed. MBE growth simulation based on the diffusion model was carried out in order to understand the mechanism of this selective area growth. The calculated results were in good agreement with the experimental results, and the diffusion lengths of Ga atoms were determined to be 0.10 μm along [011] direction on the (100) GaAs surface, 0.37 μm along [233] direction on the (311)A GaAs surface and 0.17 μm along [21 ] direction on the (111)B GaAs surface during MBE growth. These diffusion lengths seem to be smaller than those previously observed, which is probably due to a large V/III ratio in the region of the substrate close to the mask edge.     

Micro-structural studies of GeSe2–Ga2Se3–MX (MX = CsI and PbI2) glasses using Raman spectra

Microstructure of the chalcohalide glasses: GeSe₂–Ga₂Se₃–CsI and GeSe₂–Ga₂Se₃–PbI₂ ternary system were investigated by Raman spectra, lifetime of Dy³⁺ infrared emission and glass transition temperature (T_g). The evolution of the Raman spectra shows that the fundamental structural groups of these studied glasses consist of [Ge(Ga)Se₄] tetrahedral and some complex structure units [Ge(Ga)I_xSe_4?x](x = 1–4). The x value varied when the different iodide was added in Ge–Ga–Se matrix. For GeSe₂–Ga₂Se₃–CsI glasses, the [Ge(Ga)I_xSe_4?x](x = 1–4) mixed-anion tetrahedral and [Ga₂I₇]^? units occurred. For GeSe₂–Ga₂Se₃–PbI₂ glasses, the [Ge(Ga)I₂Se₂], [Ge(Ga)I₃Se] units can be formed. The changes of Dy³⁺ infrared emission lifetime and T_g support the results. Additionally, [PbI_n] structural units will be formed in GeSe₂–Ga₂Se₃–PbI₂ glasses due to high form-ability of these units when the PbI₂ content is high.     

As-rich reconstruction stability observed by high temperature scanning tunnelling microscopy

Atomic resolution scanning tunnelling microscopy (STM) has been used to study in-situ the As-terminated reconstructions formed on GaAs(0 0 1) surfaces in the presence of an As₄ flux. The reconstructions c(4×4), (2×4) and (3×1) are long established for GaAs(0 0 1) between 400 and 600 °C for varying Ga and As flux, however the stoichiometry of incommensurate transient reconstructions is still uncertain. By performing high temperature STM on an initial (2×4) surface between 250 and 450 °C in the absence of an As flux, small domains with varying reconstruction are observed in a similar manner to the InAs/GaAs(0 0 1) wetting layer. The local storage of excess Ga in Ga-rich domains could provide insight into sub ML homo- and hetero-epitaxial growth.