改进热交换法生长蓝宝石晶体的气泡研究

采用改进的热交换法生长的蓝宝石晶体,气泡是其主要缺陷之一.本文采用数值模拟研究了晶体生长过程中氦气流量对坩埚内温场、固液界面形状的影响.并结合晶体生长实验结果,分析了在实际的晶体生长过程中,氦气流量的线性增加对晶体内气泡的尺寸、形态和分布的影响.     

Transient analysis of the cooling process and influence of bottom insulation on the stress in the multicrystalline silicon ingot

Directional solidification is one of the most popular techniques for massive production of multicrystalline silicon. After growth and annealing, the ingot is cooled down by a designed cooling process, which is initialized by descending bottom insulation, and then is controlled both by power ramp‐down rate and by motion of the bottom insulation. Thermal stress is piled up during cooling, and associated crystal defects, such as dislocation and micro‐cracks, may generate and propagate in the ingot. In the paper, transient modeling is applied to study the effect of bottom insulation on the cooling process. Temperature, velocity and thermal stress fields are obtained with linear, parabolic and sinusoidal motions of the insulation. The measured and predicted temperatures at two points of the ingot are found consistent. Distributions of von Mises stress in the ingot at different cooling time are obtained, and the maximum von Mises stresses are presented as a function of the cooling time. Specifically, dislocation‐free regions, evaluated by the critical resolved shear stress model, at certain cooling time, and area fractions of the regions as a function of the cooling time are proposed. The linear motion is further discussed with different moving rates, considering its wide applications in the current industry and convenient realization in control.     

硅酸镥闪烁晶体的生长与缺陷研究

本文采用提拉法生长出了硅酸镥闪烁晶体,讨论了晶体生长中遇到的问题,所生长的硅酸镥晶体有开裂、解理、多晶、回熔现象等宏观生长缺陷和包裹物、位错等微观缺陷.开裂是由热应力和晶体解理两种因素引起的,其中热应力是导致开裂的主要因素,优化生长工艺条件可完全避免开裂.晶体中存在两种包裹物,成份分别为氧化镥和坩埚材料铱,氧化镥很可能是未参加反应的原料,也有可能是氧化硅挥发而导致氧化镥析出.     

Temperature field design,process analysis and control of SAPMAC method for the growth of large size sapphire crystals

In this paper, the relationship between quality of sapphire crystal and growing parameters of SAPMAC (Sapphire growth technique with micro‐pulling and shoulder‐expanding at cooled center) method was discussed. Optimized temperature distribution and technique control were proposed by theoretical analysis, numerical simulation computation and experimental validation to obtain large size sapphire crystals. For a‐axis crystallized direction, with 1.0‐5.0mm/h growth velocity and 10‐30K/h temperature decreasing speed, large sapphire single crystal (∅︁240mm×210mm, 27.5kg) having high optical quality was successfully grown. The absorption spectrum of standard samples was measured as well. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Global heat loss and thermal stress analysis in Czochralski crystal growth

Based on our invention of an energy‐efficient Czochalski crystal growth furnace, a 2D‐axisymmetric numerical simulation model of LiNbO₃ crystal growth is developed. The heat transfer, melt and gas flow, radiation and the interface deflection have been examined. Heat losses in the furnace and the insulator, as well as the heating power and thermal stress distribution at three stages of crystal growth are calculated in detail. It is found that a large proportion of heat dissipates through the water‐cooling system, and at the steel shell of the furnace, gas convection heat transfer is the major cooling mechanism. Less heat dissipation by radiation and more heat flux by gas convection to the crystal sidewall results in a larger concentrated thermal stress, which may induce large crystal cracks in the growth process. The simulation results of heating power are in coincidence with the actual power of our furnace, which verifies the feasibility of our model. The detailed information with respect to the device obtained from simulation can help to optimize the energy‐saving design and growth process.     

Growth and interface study of 2 in diameter CdZnTe by THM technique

Growth interface of large diameter CdZnTe ingots grown from Te solution by travelling heater method have been studied. Both macroscopic and microscopic investigations were carried out. The results indicated that the shape of the interface strongly governs the grain growth on the ingot, while the microscopic morphology of the growth interface is responsible for Te inclusions in the grown crystal.     

Growth of benzophenone single crystals from solution: A novel approach with 100% solute ‐ crystal conversion efficiency

An unidirectional 60mm diameter benzophenone single crystal was successfully grown by utilizing a novel crystal growth method at room temperature. <110> oriented single crystal ingots were grown out of xylene as solvent and by fixing a seed at the bottom of the ampoule. The obtained benzophenone ingots with the sizes of 10mm, 25mm and 60mm diameter evident that ease in increasing the diameter of the ingot. The orientation of the ingot and the crystalline quality were justified by X‐ray studies. TG and DTA evaluated the thermal properties of the grown crystal. The optical transmission study and the powder SHG measurement show the suitability of the ingot for nonlinear optical applications. The achieved solute‐crystal conversion efficiency of hundred percent shows vital advantage of this technique for cost effectiveness. The microbial growth as in the case of amino acid based growth solutions can be more effectively controlled in the present method since the freshly prepared growth solution can be constantly made available to the growing crystal. © 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim     

热屏间距对泡生法蓝宝石单晶生长影响研究

太空、军事和科研等高科技领域的持续发展极大促进了对蓝宝石晶体的需求,泡生法是蓝宝石晶体的主要制造方法之一;热场结构对所得蓝宝石晶体的质量具有重要影响.本文对采用泡生法工艺制造蓝宝石单晶过程中,具有内置7层氧化锆外置8层钼金属的新型热屏结构间距进行研究.通过数值模拟考察热屏间距对单晶炉功率、固-液界面形状和晶体热应力的影响确定了合理的热场结构;并与试验生产结果进行对比验证.结果表明:热屏间距增大使得单晶炉功率明显提升,并引起固-液界面凸度增大;而蓝宝石晶体热应力出现减小.综合考察三个影响因素的影响,最后确定热屏间距为5 mm时单晶炉能耗较低,可用于制造高质量的蓝宝石晶体.     

基于迁移学习的大尺寸铸锭晶体硅热场设计

不同尺寸的铸锭晶体硅生长过程具有相似性,小尺寸晶体的生长规律可以迁移至大尺寸。本文采用迁移学习(TL)对G8型铸锭炉进行热场设计,设计对象为侧、顶加热器位置及体积、侧隔热笼分区块高度,主要设计目标为减少晶体内部的位错缺陷、抑制硅锭边缘多晶且使晶体生长界面微凸。首先使用神经网络对已有的G7铸锭炉建立热场几何参数与热场评价参数间的映射模型,然后将该模型迁移至G8铸锭炉,对比不同模型结构对迁移过程的影响,采用Dropout分析模型是否存在过拟合,并使用遗传算法(GA)结合聚类算法(CA)对热场几何参数进行优化,以上为G8热场设计过程。最后对优化结果采用数值模拟方法研究其在晶体生长过程中的温度分布、固液界面形状等,最终选定的优化方案能够实现较高质量的长晶。将该方案同时应用于G7和G8热场并进行对比,结果表明G8在硅熔体和硅晶体中的轴向温度梯度均小于G7,在晶体生长界面沿径向的温度梯度也小于G7,这有利于减小晶体内部的热应力。     

Redistribution of thermoelastic stresses in shaped crystals: Numerical simulation

The shape of crystals was considered for the first time as an important factor controlling thermoelastic stresses during crystal growth. It was found on the basis of numerical simulation that thermoelastic stresses can be redistributed by varying the shape of a crystal during growth. In this way, large weakly stressed regions can be obtained in the crystal owing to the formation of locally stressed regions. As an example, a model of a sapphire ribbon (50 × 175 mm²) divided by waists into three plates (50 × 50 mm²) is discussed. Different crystallographic orientations and slip systems are considered.     

蓝宝石晶体热性能的各向异性对SAPMAC法晶体生长的影响

采用有限元法对冷心放肩微量提拉法蓝宝石晶体生长过程中晶体内的温度、应力分布进行了模拟计算,结合实验结果讨论了蓝宝石晶体热性能的各向异性对晶体生长的影响.研究结果表明,对于冷心放肩微量提拉蓝宝石晶体生长系统,较大的轴向热导率有利于提高晶体的生长速率和界面稳定性,而稍大的径向热导率则有利于保持微凸的生长界面.晶体内的热应力受径向热膨胀系数的影响显著,随着径向热膨胀系数的增大而增大,最大热应力总是出现在籽晶与新生晶体的界面区域.在实验中选α轴为结晶取向,成功生长出了直径达230mm、高质量蓝宝石晶体.     

冷心放肩微量提拉法大尺寸蓝宝石单晶生长过程的模拟分析

利用数值模拟方法计算了冷心放肩微量提拉法(SAPMAC)蓝宝石晶体生长过程.结合晶体直径变化、裂纹出现位置与延续方向、晶体透明性等实验现象,通过与提拉法、温梯法、坩埚移动法等相对比,分析了冷心放肩微量提拉法晶体生长各阶段的工艺特点,并根据模拟计算结果对晶体生长系统和晶体生长控制工艺进行了改进.分别利用增大热交换器的散热参数、降低加热温度、改进降温曲线、调节外加轴向和径向温度梯度的方式来实现对晶体生长的引晶、放肩、等径和收尾控制.通过实验比较证明了改进后的晶体生长系统和晶体生长控制工艺能够生长出性能较好的大尺寸蓝宝石晶体.     

Influence of furnace design on the thermal stress during directional solidification of multicrystalline silicon

Directional solidification is one of the most popular techniques for massive production of multicrystalline silicon (mc-Si). Dislocation is one of the major defects that significantly affect the photovoltaic performance. For the analysis and optimization of stress-induced dislocation, a computational tool has been developed to investigate thermal stress distribution during directional solidification process of multicrystalline silicon. Temperature distribution in the furnace, S/L interface shape and melt flow are simulated. Parametric studies are further conducted to evaluate the effect of furnace design on the interface shape and on the maximum von Mises stress in the growing ingot. To consider the effects of the crucible geometry qualitatively, three-dimensional modeling of the thermal stress is performed with or without the constraint of the crucible. The regions of dislocation multiplication are evaluated by comparing von Mises stress to critical resolved shear stress (CRSS). The results imply that the dislocation in the growing ingot can be reduced by optimizing the design of the directional solidification furnace.     

导模法生长六片片状蓝宝石晶体的研究

采用导模法生长出六片片状蓝宝石晶体,单片尺寸为350 mm×80 mm×2 mm.通过CGSim模拟软件模拟计算和实验验证,确定了合适的生长温场为横向温梯2.9~4.6 K/mm,生长速度控制在5~10 mm/h之间.对晶体进行双晶摇摆曲线测试,峰强度很高且对称性良好,摇摆曲线的半高宽FWHM=16.946″,证明晶体的结晶完整性很高.采用化学腐蚀法对六片晶体进行位错密度的检测,计算出晶体的位错密度都在103量级,中间晶体位错密度小于两边晶体的位错密度.测试了六片晶体的弯曲强度,最高强度达1583 MPa,中间晶体强度大于两边.     

基于神经网络和遗传算法的铸锭晶体硅质量控制及工艺优化

铸锭晶体硅是太阳能级晶硅材料的重要来源之一,为了进一步降低硅片成本,需要在保证晶体质量的同时发展大尺寸铸锭晶硅。影响铸造晶体硅质量的热场控制核心参数包括晶体生长速度与生长界面温度梯度之比V/G、壁面热流q、生长界面高度差Δh和硅熔体内部温差ΔT等。针对铸锭晶体硅生长过程中的质量控制问题,本研究基于人工神经网络(ANN)模型对晶体生长过程建立了工艺控制优化方法,利用实验测量数据和数值仿真模拟结果构建铸锭晶体硅生长过程的工艺控制数据集,以底部隔热笼开口和侧、顶加热器功率比作为主要工艺控制参数,V/G、|q|、|Δh|和ΔT为优化目标,建立用于研究晶体生长工艺控制参数和热场参数之间映射关系的神经网络模型。使用训练完成的模型分析底部隔热笼开口及侧、顶加热器功率比对晶体生长过程热场的影响规律,并采用遗传算法(GA)对铸锭晶体硅生长过程的工艺控制参数以提高晶体质量为目标进行优化,最后结合实际生产中的检测图像讨论了V/G对晶体质量的影响。研究表明晶体生长中期的V/G沿横向变化较平缓,对应缺陷较少且分布均匀,因此增大V/G在横向上的均匀度也是提高晶体质量的一个重要因素。     

High‐temperature infrared and dielectric properties of large sapphire crystal for seeker dome application

In this paper, large‐sized (∅︁230 mm × 210 mm, 27.5 kg) sapphire was successfully grown by SAPMAC (sapphire growth technique with micro‐pulling and shoulder‐expanding at cooled center) method; and hemisphere dome (140 mm diameter, 5 mm thickness) was fabricated from as‐grown boule. Also, its high temperature infrared transmission (2∼7 µm, 20–800°C) and microwave dielectric properties (8–16.5 GHz, 30–1300°C) were investigated. The experimental results show that sapphire crystal exhibits high infrared transmittance (3 μm, 80–86%), essentially negligible dielectric loss (4.9×10^‐5–3.7×10^‐4), but fairly high dielectric constants (ε=9.4–12.5) in the temperature range of 30–1300°C. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Atomic force microscopy studies on liquid inclusions and induced defects of cadmium mercury thiocyanate crystal

Liquid inclusions and various defects accordingly induced on a nonlinear optical material of CMTC crystal were investigated by atomic force microscopy. Liquid inclusions are chiefly caused by formation of macrosteps, which result from impurity‐induced inhibiting of step growth and meeting of step trains advancing along different directions. Liquid inclusions induce generation of dislocations and even cracks within the crystal by three‐dimensional nucleation growth. Liquid inclusions also provide screw dislocation growth sources, leading to formation of spiral hillock trains with ridged tails. Etching experiments reveal circular hollow cores, indicative of screw dislocation growth, and negative crystals resulting from further crystallization in the liquid inclusions. (© 2003 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

CZ法生长参数对TeO2晶体质量的影响

本文主要讨论CZ法生长TeO2晶体中温度梯度、拉速、转速等工艺参数对晶体质量的影响,分析了晶体开裂、包裹物等宏观缺陷以及位错等微观缺陷的形成机理.从晶体形态、包裹体和位错密度变化等方面探讨了晶体生长参数与晶体缺陷之间的内在关系.     

温梯法白宝石晶体的缺陷研究

采用导向温梯法(TGT)生长出[0001]方向直径为76mm的白宝石晶体.利用扫描电子显微镜(SEM)观察晶体(0001)面的腐蚀坑形态,并对晶体内部的包裹物进行了能谱(EDS)分析.白宝石晶体中的生长缺陷主要为位错和包裹体等.Al2O3晶体(0001)面的位错腐蚀坑呈六角形,并且有台阶状结构.分析了(0001)面内的位错类型.确定了TGT法生长的白宝石内部的包裹物的主要成分为碳.     

Single‐crystal sapphire microstructure for high‐resolution synchrotron X‐ray monochromators

We report on the growth and characterization of sapphire single crystals for X‐ray optics applications. Structural defects were studied by means of laboratory double‐crystal X‐ray diffractometry and white‐beam synchrotron‐radiation topography. The investigations confirmed that the main defect types are dislocations. The best quality crystal was grown using the Kyropoulos technique. Therein the dislocation density was 10²–10³ cm⁻² and a small area with approximately 2*2 mm² did not show dislocation contrast in many reflections. This crystal has suitable quality for application as a backscattering monochromator. A clear correlation between growth rate and dislocation density is observed, though growth rate is not the only parameter impacting the quality.