Zn-doped AlInAs grown at high temperature by metalorganic chemical vapor deposition

Zn-doped AlInAs growth at high temperature, mainly at 750°C, by metalorganic chemical vapor deposition is investigated. When introducing DEZn during AlInAs growth, it is necessary to increase the TMAl flow rate in order to make the layer lattice-matched to InP. This is due to the enhanced In incorporation rather than the large covalent radius of Zn. To clarify the electrical characteristics, the dependence of the DEZn flow rate, the V/III ratio, and the growth temperature are investigated using the van der Pauw Hall method. In our growth system, a GaInAs intermediate layer is effective in preventing n-type inversion in Zn-doped AlInAs, which occurs when it is grown directly on an InP buffer layer. In addition, a large DEZn flow rate is effective for reducing carrier compensation in Zn-doped AlInAs layers grown at 750°C. Si impurities are apparently the cause of the type-inversion and compensation in Zn-doped AlInAs.     

The influences of O/Zn ratio and growth temperature on carbon impurity incorporation in ZnO grown by metal-organic chemical vapor deposition

The strong correlations between the O/Zn ratio and carbon impurity incorporation have been observed on the ZnO films grown using N₂O or O₂ as oxygen source in metal-organic chemical vapor deposition (MOCVD). From in-situ mass spectrometric measurements, the O/Zn ratio in the MOCVD reactor is found to decrease to a minimum value as the growth temperature increased till a critical growth temperature T_c, and then increased above T_c due to different dissociation rates of the oxygen and Zn sources. The strongest D and G modes, which are ascribed to carbon clusters sp² related modes, have been observed in Raman scattering spectroscopy for the ZnO samples grown at T_c, indicating the highest incorporation rate of carbon impurity in the samples grown at T_c. Compared with O₂, N₂O has a low dissociation rate and that leads to a lower value of O/Zn ratio, resulting in much stronger D and G modes and higher incorporation rate of carbon impurities in the samples grown at T_c. It is interesting to note that the lowest specific resistances from Hall effect measurements were also obtained on the samples grown at T_c, indicating possible electrical contributions from the formation of carbon clusters, which should be highly conductive regions in ZnO. Furthermore, ionization or addition of H₂ in the case of N₂O can significantly enhance the dissociation of N₂O, with film quality improved significantly. This study shows that a high O/Zn ratio is critical to suppress carbon impurity incorporation and to grow high quality ZnO by MOCVD, especially at low growth temperature.     

Effect of growth parameters on the properties of GaN : Zn epilayers

The vapor-phase HCl/Ga/NH₃ method for deposition of GaN : Zn epilayers on sapphire substrates has been investigated to determine the dependence of epilayer resistivity, cathodoluminescence, and surface quality on the growth parameters. Both nucleation and control of the epilayer properties have been significantly improved by introducing HCl directly into the deposition zone in addition to the HCl that passes over the Ga source to produce GaCl. The effect of annealing on the stability of undoped layers and on the cathololuminescence of Zn-doped layers has also been investigated. Electroluminescent devices with reproducible properties have been obtained by growing structures consisting of an undoped n⁺ layer, a Zn-doped n-type layer, and a very thin, Zn-doped, high-resistivity layer whose growth parameters determine the emission wavelength and electroluminescence efficiency.     

Facilitating growth of InAs–InP core–shell nanowires through the introduction of Al

InAs nanowires were grown on GaAs substrates by the Au-assisted vapour–liquid–solid (VLS) method in a gas source molecular beam epitaxy (GSMBE) system. Passivation of the InAs nanowires using InP shells proved difficult due to the tendency for the formation of axial rather than core–shell structures. To circumvent this issue, Al_xIn_1?xAs or Al_xIn_1?xP shells with nominal Al composition fraction of x=0.20, 0.36, or 0.53 were grown by direct vapour–solid deposition on the sidewalls of the InAs nanowires. Characterisation by transmission electron microscopy revealed that the addition of Al in the shell resulted in a remarkable transition from the VLS to the vapour–solid growth mode with uniform shell thickness along the nanowire length. Possible mechanisms for this transition include reduced adatom diffusion, a phase change of the Au seed particle, and surfactant effects. The InAs–AlInP core-shell nanowires exhibited misfit dislocations, while the InAs–AlInAs nanowires with lower strain appeared to be free of dislocations.     

多晶Si薄膜表面金催化Si纳米线生长

以Au膜作为催化剂和大晶粒多晶Si薄膜为衬底,利用固-液-固生长机制,制备出直径在30～ 100 nm和长度为几百微米的高密度Si纳米线.实验研究了退火温度、生长时间和N2流量对Si纳米线生长的影响.结果表明,随着退火温度的升高,生长时间的延长和N2流量的增加,Si纳米线的长度和密度都显著增加.对不同生长时间下获得的Si纳米线样品进行了X射线衍射测量,结果显示随着生长时间的延长,多晶Si薄膜和表面的Au膜成分都在减少.光致发光谱则显示出弱的蓝光发射和强的红光发射特性,前者应是由非晶SiOx壳层中的氧空位发光中心引起,后者则应归因于Si纳米线芯部与非晶SiOx壳层之间界面区域附近中的Si =O双键态或非桥键氧缺陷中心.     

Zn掺杂Z形GaN纳米线的制备及表征

本文以氧化镓、氧化锌和氨气为原料,通过常压化学气相沉积法(APCVD)在Au/Si(100)衬底上成功生长出了Zn掺杂的"Z"形GaN纳米线。利用场发射扫描电镜(FESEM)、X-射线衍射仪(XRD)、透射电子显微镜(TEM)、光致发光谱(PL)等测试方法对样品的形貌、晶体结构及光学性质进行了表征。结果表明:在温度为950℃,氧化镓和氧化锌的质量比为8∶1的条件下,制备出的Zn掺杂Z形GaN单晶纳米线直径为70 nm、长度为数十个微米,生长机理遵循VLS机制。Zn元素的掺杂使GaN纳米线在420 nm处出现了光致发光峰,发光性能有所改善。     

Solvothermal controlled growth of Zn-doped SnO2 branched nanorod clusters

Branched Zn-doped SnO₂ nanorod clusters with tunable size and aspect ratios were prepared by a facile solvothermal process. The introduction of a small quantity of Zn²⁺ proved to play an important role in directing the anisotropic growth of SnO₂ nanocrystals. The as-synthesized products exhibit tetragonal rutile structure and many lattice defects exist in the products. The possible growth mechanism has been proposed. These Zn-doped SnO₂ nanorods exhibited unique Raman spectrum in contrast with the undoped SnO₂ nanostructures. These Zn-doped SnO₂ nanorods showed good sensitivities to ethanol gas, acetone gas, and benzene gas.     

Rapid growth of α-LiIO3 crystal

A fundamental possibility of significantly increasing the growth rate of α-LiIO₃ crystals without the formation of visible defects in them is demonstrated. The corresponding equipment is designed and a technique for obtaining intermediate-size samples is developed. The crystals grown with an average rate of up to 4 mm/days along the Z axis are of high enough quality to be used as materials of optical elements for laser frequency doubling. α-LiIO₃ crystals have been grown both in an open volume via natural faceting and in a rectangular habit, where growth occurs basically through the pyramid (101) face. It is shown that that amount of limiting impurities in the raw material used can be reduced and that the applicability of this material for rapid growth can be verified.     

Suppression of phase separation in InGaN layers grown on lattice-matched ZnO substrates

Sapphire and SiC are typical substrates used for GaN growth. However, they are non-native substrates and result in highly defective materials. The use of ZnO substrates can result in perfect lattice-matched conditions for 22% indium InGaN layers, which have been found to suppress phase separation compared to the same growths on sapphire. InGaN layers were grown on standard (0 0 0 2) GaN template/sapphire and (0 0 0 1) ZnO substrates by metalorganic chemical vapor deposition. These two substrates exhibited two distinct states of strain relaxation, which have direct effects on phase separation. InGaN with 32% indium exhibited phase separation when grown on sapphire. Sapphire samples were compared with corresponding growths on ZnO, which showed no evidence of phase separation with indium content as high as 43%. Additional studies in Si-doping of InGaN films also strongly induced phase separation in the films on sapphire compared with those on ZnO. High-resolution transmission electron microscopy results showed perfectly matched crystals at the GaN buffer/ZnO interface. This implied that InGaN with high indium content may stay completely strained on a thin GaN buffer. This method of lattice matching InGaN on ZnO offers a new approach to grow efficient emitters.     

In situ surface passivation of III–V semiconductors in MOVPE by amorphous As and P layers

A new process for chemical passivation of III–V semiconductor surfaces in metalorganic vapour phase epitaxy (MOVPE) is developed. A passivation layer is deposited directly after growth in the reactor. It consists of amorphous arsenic or a double-layer package of amorphous phosphorus and arsenic, which are grown by photo-decomposition of the group-V hydrides. These layers (caps) serve to protect the surfaces against contamination in air after removing the samples from the MOVPE growth reactor. Such passivation is applicable e.g. for a two-step epitaxy or for further surface characterizations.     

Replacement of hydrides by TBAs and TBP for the growth of various III–V materials in production scale MOVPE reactors

Besides the standard group V precursors AsH₃ and PH₃, so-called alternative precursors like TBAs and TBP (tertiary-butyl-arsine and tertiary-butyl-phosphine) are more and more important in today's MOVPE processes. A lot of publications have demonstrated that these precursors can be successfully used for the growth of different III–V materials. In this study we want to demonstrate that TBAs and TBP can be used as the group V precursor in a complete family of production scale reactors. It is shown that these precursors can be used for the growth of InP-based as well as for GaAs-based materials. The reactors that have been employed are medium scale reactors (AIX 200/4; 1 × 2 inch, 3 or 4 inch or 3 × 2 inch capability) and large scale Planetary Reactors®, in particular the AIX 2400 system (15 × 2 inch or 5 × 4 inch). Materials that have been grown are (Al)GaInP on GaAs and GaInAsP on InP. The lower cracking energy of these precursors compared to PH₃ and AsH₃ allows one to use lower growth temperatures and lower V/III ratios, particularly in combination with the high cracking efficiencies of the used reactors. For the growth of GaInAsP on InP, the consumption of TBP and TBAs is up to 8 times lower than using PH₃ and AsH₃. GaInP on GaAs could be grown with a V/III ratio as low as 25 in a Planetary Reactor®. Good crystalline quality is demonstrated by DCXD (e.g. for GaInP: FWHM = 35 arcsec, substrate 32 arcsec). PL intensity and growth rate are not affected by using the alternative precursors. The compositional uniformity is similar to layers grown with arsine and phosphine (e.g. 1.5 nm uniformity for GaInAsP (λ = 1.5 μm) on 2 inch; approximately 1 nm uniformity for GaInP) [1,2]. The purity of the grown layers depends mainly on the quality of the TBP and TBAs. Using high purity TBP, InP revealed background carrier concentration in the mid 10¹⁴ cm⁻³ regime. Our investigation shows that TBP and TBAs can replace phosphine and arsine in state of the art MOVPE reactors. Both for single and multi-wafer production MOVPE reactors these compounds can be used successfully for the growth of the entire material spectrum in the Al---Ga---In---As---P system.     

Influence of oxygen contamination during Si low presure vapour phase epitaxy on epitaxial layer quality

The influence of oxygen contamination on Si low pressure vapour phase epitaxy (LPVPE) at 800°C in the SiCl₂H₂−H₂ system has been investigated. O₂ was added intentionally with partial pressures between 10⁻⁸ and 2×10⁻⁴ mbar. The quality of the epitaxially grown silicon layers was determined by comparing surface morphology, defect density, Schottky diode characteristics and SIMS measurements. These four parameters are correlated and they reveal a drastic decrease in epitaxial layer quality for O₂ pressures above 15×10⁻⁶ mbar. The critical oxygen pressure which has been until now considered as a limit for epitaxial growth can therefore be exceeded by one order of magnitude.     

Growth control of stoichiometry in LaMnO3 epitaxial thin films by pulsed laser deposition

We have studied structural, magnetic, and optical transport properties of LaMnO₃ (LMO) thin films grown on SrTiO₃. While the stoichiometric LMO is an insulating antiferromagnet, it tends to be a ferromagnetic insulator when grown as thin films. By exploring the majority of growth parameters, we have found that the bulk-like electronic and magnetic phases can be stabilized by growing thin films under reducing atmospheres and by using more energetic laser processes. These conditions are found to reduce the La deficiency in the film resulting in the greatly improved cation stoichiometry. Since oxides are prone to reduce the oxygen content and to alter the cation ratio under such growth conditions, it suggests that the cation and oxygen stoichiometries in complex oxide thin films can be improved by properly optimizing the growth parameters.     

Strain relaxation in InGaAs/GaAs quantum wells grown on GaAs (111)A substrates

We have grown In_0.2Ga_0.8As strained quantum wells (SQWs) on GaAs (111)A just and off-angled substrates by molecular beam epitaxy (MBE). The photoluminescence (PL) peak energy of SQWs grown on (111)A related substrates shows a large redshift as compared with the calculated values. The red-shift observed in SQWs grown on a (111)A 5° off toward [001] substrate can be explained by the presence of a built-in electric field E = 154 kV/cm due to piezoelectric effect. The larger red-shift observed in samples grown on the other substrates is partially due to strain relaxation. A strain relaxation mechanism that consists of coherently grown islands when InGaAs growth begins and the generation of misfit dislocations when these islands coalesce, gives a qualitative explanation of the observed results.     

Effect of growth conditions on the functional properties of K2Co(SO4)2·6H2O crystals

K₂Co(SO₄)₂ · 6H₂O single crystals of optical quality have been grown and the effect of solution pH on their solubility and transmission spectra has been investigated. A kinetic growth curve is obtained for the (110) face and the onset temperature of dehydration is established for single-crystal samples. The structural quality of single crystals grown at different supersaturations is analyzed.     

利用Al/AlAs中间层调控GaAs在Si(111)上外延生长的研究

为了实现Ⅲ-V器件在硅基平台上单片集成,近年来Ⅲ-V半导体在硅衬底上的异质外延得到了广泛研究。由于Ⅲ-V半导体与Si之间大的晶格失配以及晶格结构不同,在Si上生长的Ⅲ-V半导体中存在较多的失配位错及反相畴,对器件性能造成严重影响。而Si(111)表面的双原子台阶可以避免Ⅲ-V异质外延过程中形成反相畴。本文利用分子束外延技术通过Al/AlAs作为中间层首次在Si(111)衬底上外延生长了GaAs(111)薄膜。通过一系列对比实验验证了Al/AlAs中间层的插入对GaAs薄膜质量的调控作用,并在此基础上通过低温-高温两步法优化了GaAs的生长条件。结果表明Al/AlAs插层可以为GaAs外延生长提供模板,并在一定程度上释放GaAs与Si之间的失配应力,从而使GaAs薄膜的晶体质量得到提高。以上工作为Ⅲ-V半导体在硅上的生长提供了新思路。     

Growth and property of Zn-doped near-stoichiometric LiTaO3 crystal

Near-stoichiometric LiTaO₃ (SLT) and Zn-doped near-stoichiometric LiTaO₃ (Zn:SLT) crystals with 10–15 mm in diameter and 10 mm in length were grown by using TSSG technique with K₂O as the flux. The effect of adding amount of K₂O was discussed in the growing process. The crystals were characterized by inductively coupled plasma-optical emission (ICP-OES), X-ray diffraction (XRD) and differential thermal analysis (DTA). The lattice constants of Zn:SLT were smaller than those of SLT and Curie temperature was higher than that of SLT. It was found that Zn doping is an efficient way to improve the optical damage resistance ability of SLT crystal. Compared with SLT crystal, Zn:SLT exhibited a much higher optical damage threshold, more than 500 MW/cm², which was attributed to Zn self-compensated effect that formed the charge compensated complexes, (Zn_Ta)³⁻–3(Zn_Li)⁺ in SLT crystal.     

Effect of a static magnetic field on silicon transport in liquid phase diffusion growth of SiGe

Liquid phase diffusion experiments have been performed without and with the application of a 0.4 T static magnetic field using a three‐zone DC furnace system. SiGe crystals were grown from the germanium side for a period of 72 h. Experiments have led to the growth of single crystal sections varying from 0 to 10 mm thicknesses. Examination of the processed samples (single and polycrystalline sections) has shown that the effect of the applied static magnetic field is significant. It alters the temperature distribution in the system, reduces mass transport in the melt, and leads to a much lower growth rate. The initial curved growth interface was slightly flattened under the effect of magnetic field. There were no growth striations in the single crystal sections of the samples. (© 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Growth of undoped and Zn-doped GaN nanowires

Undoped and Zn-doped GaN nanowires were synthesized by chemical vapor deposition (CVD), and the effects of substrates, catalysts and precursors were studied. A high density of GaN nanowires was obtained. The diameter of GaN nanowires ranged from 20 nm to several hundreds of nm, and their length was about several tens of μm. The growth mechanism of GaN nanowires was discussed using a vapor–liquid–solid (VLS) model. Furthermore, room-temperature cathodoluminescence spectra of undoped and Zn-doped GaN nanowires showed emission peaks at 364 and 420 nm, respectively.     

Use of V/III ratio to produce heterostructures in ordered GaInP

Compositional ordering in Ga_0.52 In_0.48 P results in a significant reduction in bandgap energy. The degree of order is known to be a strong function of the input partial pressure of the P precursor during growth due to the effect of this parameter on the surface reconstruction. This raises the possibility of producing heterostructures by simply changing the flow rate of the P precursor during growth. The change in bandgap energy at order/disorder (O/D) heterostructures formed by decreasing the P partial pressure during the OMVPE growth cycle is graded over several thousands of Å when PH₃ is used as the P precursor. Examination of the transmission electron microscope image and the photoluminescence (PL) spectrum reveals that the ordered structure in the lower layer persists far into the upper layer. Similarly, disorder/order (D/O) structures produced in this way yield PL spectra indicative of graded composition at the heterostructure when the P precursor is PH₃. The abruptness is not affected by interruptions in the growth cycle for as long as one hour. Similar heterostructures produced using tertiarybutylphosphine (TBP) as the P precursor are distinctly different. Both D/O and O/D heterostructures can be produced by abruptly increasing the TBP flow rate during the growth cycle. PL studies show two distinct peaks closely corresponding to those observed for single layers grown using these conditions. Surface photoabsorption spectroscopy was used to monitor the transition in surface reconstruction. The change was found to be limited by the dynamics of the mass flow controller. The only difference detected which might explain the difference in behavior between PH₃ and TBP is that atomic force microscopy scans show the layers grown using TBP are covered by monolayer and bilayer (6 Å in height) steps. Growth under similar conditions using PH₃ produces bunched steps, much larger than 6 Å in height.