The dynamic behavior of MEMS arch resonators actuated electrically

In this paper, we investigate the dynamic behavior of clamped-clamped micromachined arches when actuated by a small DC electrostatic load superimposed to an AC harmonic load. A Galerkin-based reduced-order model is derived and utilized to simulate the static behavior and the eigenvalue problem under the DC load actuation. The natural frequencies and mode shapes of the arch are calculated for various values of DC voltages and initial rises. In addition, the dynamic behavior of the arch under the actuation of a DC load superimposed to an AC harmonic load is investigated. A perturbation method, the method of multiple scales, is used to obtain analytically the forced vibration response of the arch due to DC and small AC loads. Results of the perturbation method are compared with those obtained by numerically integrating the reduced-order model equations. The non-linear resonance frequency and the effective non-linearity of the arch are calculated as a function of the initial rise and the DC and AC loads. The results show locally softening-type behavior for the resonance frequency for all DC and AC loads as well as the initial rise of the arch.     

Nonlinear modal coupling in a T-shaped piezoelectric resonator induced by stiffness hardening effect

The nonlinear modal coupling in a T-shaped piezoelectric resonator, when the former two natural frequencies are away from 1:2, is studied. Experimentally sweeping up the exciting frequency shows that the horizontal beam exhibits a nonlinear hardening behavior. The first primary resonance of the vertical beam, owing to modal coupling, exhibits an abrupt amplitude increase, namely the Hopf bifurcation. The frequency comb phenomenon induced by modal coupling is measured experimentally. A Duffing-Mathieu coupled model is theoretically introduced to derive the conditions of the modal coupling and frequency comb phenomenon. The results demonstrate that the modal coupling results from nonlinear stiffness hardening and is strictly dependent on the loading range and sweeping form of the driving voltage and the frequency of the piezoelectric patches.

     

An image encryption algorithm based on compound homogeneous hyper-chaotic system

A new dynamic model of a rotating flexible beam with a concentrated mass located in arbitrary position is derived based on the absolute nodal coordinate formulation, and its modal characteristics are investigated in this paper. To consider the concentrated mass at an arbitrary location of the beam, a Dirac’s delta function is used to express the mass per unit length of the beam. Based on the proposed dynamic model, the frequency analysis is performed. The nonlinear equation is transformed into the linear one via employing the linear perturbation analysis method. The stiffness matrix of static equilibrium of the system under the deformed condition is obtained, in which the effect of coupling between the longitudinal deformation and transversal deformation is included. This means even if only the chordwise bending equation is solved, the longitudinal vibration effect can be still considered. As we know, once the longitudinal deformation is large, it will significantly affect the chordwise bending vibration. So the proposed model in this paper is more accurate than the traditional dynamic models which are usually lack of the coupling terms between the longitudinal deformation and transversal deformation. In fact, the traditional dynamic models for the chordwise vibration analysis in the existing literature are usually linear due to neglecting the coupling terms, and consequently, they are only suitable for the modal characteristic analysis of a beam under small deformations. In order to get some general conclusions of the natural frequencies and mode shapes, the equation which governs the chordwise bending vibration of the rotating beam is transformed into a dimensionless form. The dynamic model presented in this paper is nonlinear and can be conveniently used to analyze the modal characteristics of a rotating flexible beam with large deformations. To demonstrate the power of the new dynamic model presented in this paper, the dynamic simulations involving the comparisons between the different frequencies obtained using the model proposed in this paper and the models in the existing literature and the investigating in frequency veering and mode shift phenomena are given. The simulation results show that the angular velocity of the flexible beam will give rise to the phenomena of the natural frequency loci veering and the associated mode shift which is verified in the previous studies. In addition, the phenomena of the natural frequency loci veering rather than crossing can be observed due to the changing of the magnitude of the concentrated mass or of the location of the concentrated mass which are found for the first time. Furthermore, there is an interesting phenomenon that the natural frequency loci will veer more than once due to different types of mode coupling between the bending and stretching vibrations of the rotating beam. At the same time, the mode shift phenomenon will occur correspondingly. Additionally, the characteristics of the vibration nodes are also investigated in this paper.     

Nonlinear damping in a micromechanical oscillator

Nonlinear elastic effects play an important role in the dynamics of microelectromechanical systems (MEMS). A Duffing oscillator is widely used as an archetypical model of mechanical resonators with nonlinear elastic behavior. In contrast, nonlinear dissipation effects in micromechanical oscillators are often overlooked. In this work, we consider a doubly clamped micromechanical beam oscillator, which exhibits nonlinearity in both elastic and dissipative properties. The dynamics of the oscillator is measured in both frequency and time domains and compared to theoretical predictions based on a Duffing-like model with nonlinear dissipation. We especially focus on the behavior of the system near bifurcation points. The results show that nonlinear dissipation can have a significant impact on the dynamics of micromechanical systems. To account for the results, we have developed a continuous model of a geometrically nonlinear beam-string with a linear Voigt–Kelvin viscoelastic constitutive law, which shows a relation between linear and nonlinear damping. However, the experimental results suggest that this model alone cannot fully account for all the experimentally observed nonlinear dissipation, and that additional nonlinear dissipative processes exist in our devices.     

Coupling between high-frequency modes and a low-frequency mode: Theory and experiment

An analytical and experimental investigation into the response of a nonlinear continuous system with widely separated natural frequencies is presented. The system investigated is a thin, slightly curved, isotropic, flexible cantilever beam mounted vertically. In the experiments, for certain vertical harmonic base excitations, we observed that the response consisted of the first, third, and fourth modes. In these cases, the modulation frequency of the amplitudes and phases of the third and fourth modes was equal to the response frequency of the first mode. Subsequently, we developed an analytical model to explain the interactions between the widely separated modes observed in the experiments. We used a three-mode Galerkin projection of the partial-differential equation governing a thin, isotropic, inextensional beam and obtained a sixth-order nonautonomous system of equations by using an unconventional coordinate transformation. In the analytical model, we used experimentally determined damping coefficients. From this nonautonomous system, we obtained a first approximation of the response by using the method of averaging. The analytically predicted responses and bifurcation diagrams show good qualitative agreement with the experimental observations. The current study brings to light a new type of nonlinear motion not reported before in the literature and should be of relevance to many structural and mechanical systems. In this motion, a static response of a low-frequency mode interacts with the dynamic response of two high-frequency modes. This motion loses stability, resulting in oscillations of the low-frequency mode accompanied by a modulation of the amplitudes and phases of the high-frequency modes.     

Dynamic response of slacked single-walled carbon nanotube resonators

This paper presents an investigation of the dynamics of electrically actuated single-walled carbon nanotube (CNT) resonators including the effect of their initial curvature due to fabrication (slack). A nonlinear shallow arch model is utilized. A perturbation method, the method of multiple scales, is used to obtain analytically the forced vibration response due to DC and small AC loads for various slacked CNTs of higher and lower aspect ratio. Results of the perturbation method are verified with those obtained by numerically integrating the equations of a multi-mode reduced-order model based on the Galerkin procedure. The effective nonlinearity of the CNT is calculated as a function of the slack level and the DC load. To handle computational problems associated with CNTs of small radiuses, results based on a nonlinear cable model are also demonstrated. The results have indicated that the quadratic nonlinearity due to slack has dominant effect on the dynamic behavior of the CNT.     

具有初始构型的MEMS驱动器的跳跃和吸合现象研究

在曲梁变形后以弧长为参数的自然坐标系中,利用曲梁大变形分析理论,建立了具有任意初始构型的微电驱动器大变形电动力学分析的数学模型,并采用微分求积法(DQM)进行空间离散,得到了一组具有强非线性的微分-代数系统方程,运用Petzold-Gear BDF方法进行时间域内的求解。研究了MEMS驱动器在电场力作用下的瞬态动力学特性,包括跳跃(snap-through)和吸合(pull-in)现象,并与已有实验结果进行了比较。     

A multi-sensing scheme based on nonlinear coupled micromachined resonators

A new multi-sensing scheme via nonlinear weakly coupled resonators is introduced in this paper, which can simultaneously detect two different physical stimuli by monitoring the dynamic response around the first two lowest modes. The system consists of a mechanically coupled bridge resonator and cantilever resonator. The eigenvalue problem is solved to identify the right geometry for the resonators to optimize their resonance frequencies based on mode localization in order to provide outstanding sensitivity. A nonlinear equivalent model is developed using the Euler–Bernoulli beam theory while accounting for the geometric and electrostatic nonlinearities. The sensor's dynamics are explored using a reduced-order model based on two-mode Galerkin discretization, which reveals the richness of the response. To demonstrate the proposed sensing scheme, the dynamic response of the weakly coupled resonator is investigated by tuning the stiffness and mass of the bridge and cantilever resonators, respectively. With its simple and scalable design, the proposed system shows great potential for intelligent multi-sensing detection in many applications.

     

Effect of electromagnetic actuations on the dynamics of a harmonically excited cantilever beam

The influence of electromagnetic actuators (EMAs) on the frequency response of a harmonically excited cantilever beam is investigated analytically, numerically and experimentally in this paper. Specifically, the intensity of the current generating the EMAs force is varied and its effect on the dynamic behavior of the system is analyzed. Analytical treatment based on perturbation analysis is performed on a simplified equation modeling the one mode vibration of the cantilever beam. Results indicated that EMAs produce a softening behavior in the system. Further, it is shown that as the current intensity of EMAs increases, the resonance curve shifts toward smaller values of frequency and the non-linear characteristic of the system becomes softer. The analytical predictions have been verified numerically and confirmed experimentally using a test rig.     

Non-linear interactions in imperfect beams at veering

Non-linear interactions in a hinged-hinged uniform moderately curved beam with a torsional spring at one end are investigated. The two-mode interaction is a one-to-one autoparametric resonance activated in the vicinity of veering of the frequencies of the lowest two modes and results from the non-linear stretching of the beam centerline. The excitation is a base acceleration that is involved in a primary resonance with either the first mode only or with both modes. The ensuing non-linear responses and their stability are studied by computing force- and frequency-response curves via bifurcation analysis tools. Both the sensitivity of the internal resonance detuning—the gap between the veering frequencies—and the linear modal structure are investigated by varying the rise of the beam half-sinusoidal rest configuration and the torsional spring constant. The internal and external resonance detunings are varied accordingly to construct the non-linear system response curves. The beam mixed-mode response is shown to undergo several bifurcations, including Hopf and homoclinic bifurcations, along with the phenomenon of frequency island generation and mode localization.     

Mechanical behaviors of electrostatic microresonators with initial offset imperfection: qualitative analysis via time-varying capacitors

This paper investigates analytically and numerically the effect of initial offset imperfection on the mechanical behaviors of microbeam-based resonators. Symmetry breaking of DC actuation, due to different initial offset distances of microbeam to lower and upper electrodes, is concerned. For qualitative analysis, time-varying capacitors are introduced and a lumped parameter model, considering nonlinear electrostatic force and midplane stretching of microbeam, is adopted to examine the system statics and dynamics. The Method of Multiple Scales (MMS) is applied to determine the primary resonance solution under small vibration assumption. Meanwhile, the Finite Difference Method (FDM) combined with Floquet theory is utilized to generate frequency response curves for medium- and large-amplitude vibration simulations. Static bifurcation, phase portrait and Hamiltonian function are firstly investigated to examine the system inherent behaviors. Besides, basins of attraction are briefly depicted to grasp the effects of initial offset and AC excitation on the system global dynamics. Then, variation of equivalent natural frequency versus DC voltage is analyzed. Results show that initial offset may induce complex frequency rebound phenomenon as well as a separate frequency branch under secondary pull-in condition. In what follows, emergences of softening, linear and hardening vibration are classified through discussing a key parameter obtained from the frequency response equation. New linear behavior induced by initial offset imperfection is found, which exhibits much higher sensitivity to DC voltage. Medium- and large-amplitude in-well motions are also investigated, indicating the existence of alternations of softening and hardening behaviors. Finally, lumped parameters are deduced via Galerkin procedure, and case studies are provided to illustrate the effectiveness of the whole analysis.     

Local nonlinear dynamics of MEMS arches actuated by fringing-field electrostatic actuation

Nonlinear Dynamics - The nonlinear dynamic behavior of a resonant MEMS arch microbeam actuated by fringing electric actuation is investigated in this paper. The arch microbeam is loaded with DC and...     

Nonlinear dynamic behavior of a microbeam array subject to parametric actuation at low,medium and large DC-voltages

The dynamic response of parametrically excited microbeam arrays is governed by nonlinear effects which directly influence their performance. To date, most widely used theoretical approaches, although opposite extremes with respect to complexity, are nonlinear lumped-mass and finite-element models. While a lumped-mass approach is useful for a qualitative understanding of the system response it does not resolve the spatio-temporal interaction of the individual elements in the array. Finite-element simulations, on the other hand, are adequate for static analysis, but inadequate for dynamic simulations. A third approach is that of a reduced-order modeling which has gained significant attention for single-element micro-electromechanical systems (MEMS), yet leaves an open amount of fundamental questions when applied to MEMS arrays. In this work, we employ a nonlinear continuum-based model to investigate the dynamic behavior of an array of N nonlinearly coupled microbeams. Investigations focus on the array’s behavior in regions of its internal one-to-one, parametric, and several internal three-to-one and combination resonances, which correspond to low, medium and large DC-voltage inputs, respectively. The nonlinear equations of motion for a two-element system are solved using the asymptotic multiple-scales method for the weakly nonlinear system in the afore mentioned resonance regions, respectively. Analytically obtained results of a two-element system are verified numerically and complemented by a numerical analysis of a three-beam array. The dynamic behavior of the two- and three-beam systems reveal several in- and out-of-phase co-existing periodic and aperiodic solutions. Stability analysis of such co-existing solutions enables construction of a detailed bifurcation structure. This study of small-size microbeam arrays serves for design purposes and the understanding of nonlinear nearest-neighbor interactions of medium- and large-size arrays. Furthermore, the results of this present work motivate future experimental work and can serve as a guideline to investigate the feasibility of new MEMS array applications.     

Nonlinear vibration analysis of piezoelectric bending actuators: Theoretical and experimental studies

Piezoelectric bimorph actuators are used in a variety of applications, including micro positioning, vibration control, and micro robotics. The nature of the aforementioned applications calls for the dynamic characteristics identification of actuator at the embodiment design stage. For decades, many linear models have been presented to describe the dynamic behavior of this type of actuators; however, in many situations, such as resonant actuation, the piezoelectric actuators exhibit a softening nonlinear behavior; hence, an accurate dynamic model is demanded to properly predict the nonlinearity. In this study, first, the nonlinear stress–strain relationship of a piezoelectric material at high frequencies is modified. Then, based on the obtained constitutive equations and Euler–Bernoulli beam theory, a continuous nonlinear dynamic model for a piezoelectric bending actuator is presented. Next, the method of multiple scales is used to solve the discretized nonlinear differential equations. Finally, the results are compared with the ones obtained experimentally and nonlinear parameters are identified considering frequency response and phase response simultaneously. Also, in order to evaluate the accuracy of the proposed model, it is tested out of the identification range as well.     

Active boundary control of vibrating marine riser with constrained input in three-dimensional space

In this paper, the effects of initial deflection on the static and dynamic behaviors of circular capacitive transducers are experimentally investigated. The obtained results are in good agreement with numerical simulations. It is shown that the initial deflection has a major impact on the static response of the resonator by shifting the pull-in voltage, and on its dynamic response by increasing the resonance frequency and modifying the bifurcation topology from softening to hardening behavior. Moreover, the dynamic behavior of the microplate may display nonlinear periodic and quasiperiodic responses due to geometric and electrostatic nonlinearities.

     

索-梁组合结构的建模及面内动力特性分析

利用哈密顿变分原理以及结构动静态构型的影响,建立了索-梁组合结构的约化运动学控制方程。考虑到边界条件和耦合连接条件,我们研究了体系的面内特征值问题。根据求解得到的面内特征值方程,并通过分段函数的引入,结构的模态函数可以被直接确定。随后,我们研究了参数垂跨比f,刚度比和质量比对面内固有频率的影响。研究发现从结构的频率谱图中可以看出频率跳跃现象是存在的,另外,频率穿越现象也是十分明显。随后 ,考虑到局部模态和整体模态,结合之前确定的特征值方程及分段振型函数,我们研究了索-梁组合结构可能的模态形状。最后,我们讨论了索-梁组合结构可能发生的内共振形式,比如面内1:1内共振形式以及1:2内共振形式。研究表明梁的静态构型不仅直接影响到耦合力连接条件,还将影响索-梁组合结构频率的确定。     

A micromechanical mass sensing method based on amplitude tracking within an ultra-wide broadband resonance

We propose a mass sensing scheme in which amplitude shifts within a nonlinear ultra-wide broadband resonance serve as indicators for mass detection. To achieve the broad resonance bandwidth, we considered a nonlinear design of the resonator comprised of a doubly clamped beam with a concentrated mass at its center. A reduced-order model of the beam system was constructed in the form of a discrete spring-mass system that contains cubic stiffness due to axial stretching of the beam in addition to linear stiffness (Duffing equation). The cubic nonlinearity has a stiffening effect on the frequency response causing nonlinear bending of the frequency response toward higher frequencies. Interestingly, we found that the presence of the concentrated mass broadens the resonant bandwidth significantly, allowing for an ultra-wide operational range of frequencies and response amplitudes in the proposed mass sensing scheme. A secondary effect of the cubic nonlinearity is strong amplification of the third harmonic in the beam’s response. We computationally study the sensitivity of the first and third harmonic amplitudes to mass addition and find that both metrics are more sensitive than the linearized natural frequency and that in particular, the third harmonic amplitude is most sensitive. This type of open-loop mass sensing avoids complex feedback control and time-consuming frequency sweeping. Moreover, the mass resolution is within a functional range, and the design parameters of the resonator are reasonable from a manufacturing perspective.     

Nonlinear Longitudinal Vibrations of Transversally Polarized Piezoceramics: Experiments and Modeling

Nonlinear behavior of piezoceramics at strong electric fields is a well-known phenomenon and is described by various hysteresis curves. On the other hand, nonlinear vibration behavior of piezoceramics at weak electric fields has recently been attracting considerable attention. Ultrasonic motors (USM) utilize the piezoceramics at relatively weak electric fields near the resonance. The consistent efforts to improve the performance of these motors has led to a detailed investigation of their nonlinear behavior. Typical nonlinear dynamic effects can be observed, even if only the stator is experimentally investigated. At weak electric fields, the vibration behavior of piezoceramics is usually described by constitutive relations linearized around an operating point. However, in experiments at weak electric fields with longitudinal vibrations of piezoceramic rods, a typical nonlinear vibration behavior similar to that of the USM-stator is observed at near-resonance frequency excitations. The observed behavior is that of a softening Duffing-oscillator, including jump phenomena and multiple stable amplitude responses at the same excitation frequency and voltage. Other observed phenomena are the decrease of normalized amplitude responses with increasing excitation voltage and the presence of superharmonics in spectra. In this paper, we have attempted to model the nonlinear behavior using higher order (quadratic and cubic) conservative and dissipative terms in the constitutive equations. Hamilton's principle and the Ritz method is used to obtain the equation of motion that is solved using perturbation techniques. Using this solution, nonlinear parameters can be fitted from the experimental data. As an alternative approach, the partial differential equation is directly solved using perturbation techniques. The results of these two different approaches are compared.     

Nonlinear resonance of a subsatellite on a short constant tether

The nonlinear resonant behavior of a subsatellite on a short constant tether during station-keeping phase is investigated in this paper. The nonlinear dynamic equations of in-plane motion of the system are derived based on Kane’s method first. Then an approach of multiple scales expressed in matrix form is employed in solving the simplified nonlinear system of cubic nonlinearity near its local equilibrium position. Analysis shows that there exists a three-to-one resonance in such a nonlinear system with two degrees of freedom. Afterward, the approximate solution up to third order determined analytically by the Weierstrass elliptic function is obtained and the comparison between the approximate and numerical solutions presented as well. The results show that the approximate solution is coincide well with the numerical solution of original system. The nonlinear resonance of the subsatellite on short tether exhibits coexistent quasiperiodic motions or a quasiperiodic oscillation near local equilibrium position.