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为获得高质量纯铅表面,采用化学机械抛光(CMP)的方法并辅以自制抛光液,研究了胶体二氧化硅抛光颗粒的形状、粒径和浓度、加载压力、抛光头与抛光盘转向和转速、抛光液流量等工艺参数对铅片表面材料去除率和粗糙度的影响. 研究表明:小粒径异形(眉形)胶体二氧化硅抛光颗粒相较于大粒径球形颗粒更有利于铅片抛光,抛光颗粒的粒径和浓度对纯铅抛光性能的影响主要取决于铅片表面与胶体二氧化硅颗粒以及抛光垫表面丝绒的耦合作用关系. 随着加载压力、抛光头与抛光盘转向和转速、抛光液流量的改变,铅片表面和抛光垫之间驻留的层间抛光液的厚度以及状态发生改变,从而直接影响抛光液的流动性、润滑性和分散性,以及影响抛光颗粒和化学试剂与铅片表面的机械化学作用,进而影响抛光质量和材料去除率. 通过对工艺参数影响的研究和对工艺参数的优化,最终获得了表面粗糙度Ra为1.5 nm的较为理想的超光滑纯铅表面,同时材料去除率能够达到适中的380 ?/min. 相似文献
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CMP流场的数值模拟及离心力影响分析 总被引:1,自引:0,他引:1
化学机械抛光(chemical mechanical polishing,
CMP)是一项融合化学分解和机械力学的工艺, 其中包含了流体动力润滑的作用.
在已有润滑方程的基础上, 提出并分析了带有离心力项的润滑方程.
利用Chebyshev加速超松弛技术对有离心力项的润滑方程进行求解,
得到离心力对抛光液压力分布的影响. 数值模拟结果表明,
压力分布与不带离心力项的润滑方程得出的明显不同;
无量纲载荷和转矩随中心膜厚、转角、倾角、抛光垫旋转角速度等参数的变化趋势相同,
但数值相差较大, 抛光垫旋转角速度越大差别越大. 相似文献
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氨基乙酸-H2O2体系抛光液中铜的化学机械抛光研究 总被引:1,自引:0,他引:1
在CP-4型CMP试验机上采用5μm厚的铜镀层片研究了氨基乙酸-H2O2体系抛光液中铜的化学机械抛光行为,分别采用Sartorius 1712MP8型电子天平和WYKO MHT-Ⅲ型光干涉表面形貌仪检测抛光去除率和抛光后表面粗糙度,用CHI660A型电化学工作站的动电位极化扫描技术和PHI-5300ESCA型X射线光电子能谱仪分析抛光液中氧化剂和络合剂等化学组分对铜的作用机制.结果表明,由于氧化剂H2O2对铜的氧化作用使得氨基乙酸对铜的络合速率从1.4 nm/min提高到47 nm/min,进而提高了铜的化学机械抛光去除率.当抛光压力≤10.35 kPa时,抛光后铜表面出现腐蚀坑,腐蚀坑面积比率随抛光过程相对运动速度的增大而减小;当抛光压力≥17.25 kPa时,铜表面腐蚀坑消失,在相对运动速度≥1 m/s条件下,表面粗糙度为3-5 nm;当抛光压力〉6.9 kPa,在相对运动速度≤1 m/s条件下,随着相对运动速度增大,机械作用增强,抛光去除率增大;当相对运动速度〉1 m/s时,抛光界面区抛光液润滑效应增强,抛光去除率有所降低,化学机械抛光过程中这一临界相对运动速度为1 m/s. 相似文献
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本文研究了过氧化氢(H2O2)抛光液体系中金属钌的化学机械抛光行为,采用电化学分析方法和X射线光电子能谱仪(XPS)分析了氧化剂和络合剂对腐蚀效果的影响,利用原子力显微镜(AFM)观察抛光表面的微观形貌.结果表明:在过氧化氢抛光液体系中,金属钌表面钝化膜的致密度和厚度与醋酸(CH3COOH)和H2O2的浓度有关.抛光液中醋酸主要通过促进阳极反应的进行从而增强抛光液对金属钌的化学作用,CH3COOH作为络合剂比三乙醇胺(TEA)或酒石酸(C4H6O6)得到的抛光速率更高.低浓度H2O2通过增强抛光液对金属钌的化学腐蚀,抛光速率增大,较高浓度H2O2可能通过在金属表面形成较厚的氧化膜,抛光速率下降.XPS图谱说明钌片浸泡在含醋酸介质过氧化氢体系抛光液后,钌、氧原子相对含量之比约为2∶3,而且金属钌被氧化到四价和八价,这可能是因为金属钌表面生成RuO2和RuO4.抛光后的金属钌表面在5μm×5μm范围内平均粗糙度Sa由抛光前的33 nm降至6.99 nm. 相似文献
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对《力学》中的物体自由度进行多方面分析,以深化教学、提高学生正
确分析物理问题的能力.使用实际教学分析的研究方法,在《力学》范围内讨论自由度与坐标、
自由与约束的关系并得以下结论:
(1) 同一物体的自由度随其所在的``空间'不同而不同, 不因坐标系的选取不同而
异, 在同类参考系中不因参考系的动静而有别;(2)自由度遵循叠加原理.
讨论了质点系的总自由度及相关计算问题,并指出研究《力学》中自由度的意义. 相似文献
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Tibor Javor 《Experimental Mechanics》1968,8(4):171-176
The present paper deals with development and design of new methods utilizing Wiedemann's effect for determination of state of strain in building structures. Wiedemann's effect and some features of torsional strain of magnetic field are the basis of new experimental method. Especially the point electromagnetic strain gages using the effect of pure torsion of electromagnetic field to enable universal examination. For strain-gage measurements, almost all physical quantities are used which can be related to the variation in length of the structures. From the electric strain measurements, the most commonly used methods are the measurements by resonance-wire strain gages or by electric-resistance strain gages. In this paper, electromagnetic strain gages are discussed using the Wiedemann effect, and the author describes some new measuring equipment and his own suggestions and methods based on an application of this effect. 相似文献
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It is well known that the problem on nonseparating potential flow of an incompressible fluid about an array of profiles reduces to an integral equation for a certain real function, determined on the contours of the profiles of the array. As such a function one can take, as was done, for instance, in [1–5], the relative velocity of the fluid on the profiles of the array. For arrays of profiles of arbitrary shape it is necessary to solve the corresponding integral equation numerically. In the particular examples of the calculation of aerodynamic arrays that are available [1–3] the numerical methods used were based on the approximate evaluation of contour integrals by rectangle formulas. As investigations showed, sizeable errors arose thereby in the approximate solution obtained, these being especially significant in the case of curved profiles of relatively small bulk. In the present paper a method for the numerical solution of the integral equation obtained in [5] is proposed. The method is based on the replacement of a profile of the array with an inscribed N polygon, the length of whose sides is of the order N–1 and whose internal angles are close to . Convergence with increasing N of the numerical solution to an exact solution of the integral equations at the reference points is demonstrated. Examples of the calculation are given.Novosibirsk. Translated from Izvestiya Akademii Nauk SSSR. Mekhanika Zhidkosti i Gaza, No. 2, pp. 105–112, March–April, 1972. 相似文献
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