静电负刚度调谐加速度计的力平衡闭环检测控制方法

静电负刚度调谐加速度计(EFMA)在设计原理上具有兼顾电容式加速度计和谐振式加速度计相关优点的潜力。然而由于静电刚度对应的极板位移具有明显的非线性效应,使得EFMA在大量程应用中标度因数非线性较差,成为了当前制约EFMA量程提升的重要因素。基于EFMA频率输出的特点,推导了力平衡控制量并开展了力平衡控制环路的设计与研究;结合EFMA敏感器件完成实验室样机的调试与性能测试,对比了有、无力平衡闭环检测电路的量程与标度因数非线性,在保证EFMA零偏稳定性、标度因数稳定性不受影响的情况下将其标度因数从5 Hz/g提升到了24.5 Hz/g,量程从±1 g提升到了±25 g,结果验证了基于频率检测的力平衡闭环检测控制方法的可行性和优越性。     

静电力平衡式微型硅加速度计方案分析

静电力平衡式微型硅加速度计是一种新型加速度计。本文对这种加速度计的３种典型方案进行了分析，导出静电力（力矩）、静电力平衡回路刚度（角刚度）及加速度测量范围的表达式。有关结果可为这种加速度计参数设计提供理论依据。     

硅微静电加速度计的支承刚度特性

静电加速度计通过降低带宽和量程在空间微重力环境下可以实现极高的分辨率。设计了一种采用玻璃-硅-玻璃"三明治"结构、平行六面体状检验质量、体硅加工工艺的三轴硅微静电加速度计,推导并讨论了静电支承回路的典型刚度特性与控制参数之间的关系式。采用基于DSP的数字控制器,实现了敏感质量的六自由度稳定支承,在大气环境下测试了静电支承回路的主要性能。分析与测试结果表明,在支承系统频带内,支承刚度特性与控制器参数及气膜阻尼系数密切相关;同时,改变预载电压可以在较大范围内在线调整加速度计的量程和支承刚度等指标。     

三轴硅微静电加速度计的实验研究

静电加速度计依靠可控静电力将敏感质量无接触地悬浮在电极腔内,在空间微重力环境下通过降低带宽和量程可以实现极高的分辨率.设计了一种采用玻璃硅-玻璃“三明治”结构、环形敏感质量、体硅加工工艺的三轴硅微静电加速度计,对加速度计的力/力矩平衡回路进行了分析.采用基于DSP的数字控制器,实现了环形敏感质量的五自由度稳定悬浮,在大...     

六轴硅微静电加速度计的悬浮回路设计

传统的静电加速度计在空间微弱加速度测量方面可以获得极高的分辨率。提出了一种采用静电悬浮、可实现六轴加速度测量的微静电加速度计。敏感组合件采用玻璃-硅-玻璃三层键合结构、体硅加工工艺;检测质量采用"回"字形结构,以提高加速度计的径向量程和刚度。利用有限元软件分析了大气环境下检验质量的气模阻尼特性,对六自由度静电悬浮回路进行了建模与分析,提出了实现六轴加速度检测的控制方案。给出了静电悬浮回路的仿真结果,评估了六轴加速度计的性能。     

双光纤Fabry-Perot干涉仪差动检测静电伺服硅微加速度计

详细介绍了一种新型的基于双光纤Fabry-Perot干涉式（以下简称DFPI）差动检测的静电伺服硅微加速度计的设计。通过结构建模以及模型仿真得到该加速度计的分辨率为0.2ug，测量范围为0．2ug～1g。     

大量程石英加速度计二元调宽再平衡回路的设计与应用

二元调宽再平衡回路具有施矩功率恒定，转换精度高，易于同计算机通讯等一系列优点，因而在惯性元件伺服回路中得到广泛应用。中介绍了二元调宽再平衡回路在大量程石英加速度计线路上的应用，通过理论设计和试验，选择合理电参数，并取得了满意的结果。     

参数激励下静电驱动MEMS共振传感器的非线性动力特性研究

静电驱动微机电系统(MEMS)共振传感器因其结构简单、应用广泛等优点引起了研究人员广泛的关注,共振传感器件耦合系统在非线性静电力、压膜阻尼、参数激励下呈现出较复杂的非线性振动、不稳定性、分岔与混沌行为.提出参数激励作用下静电驱动微机电系统中梁式微结构共振传感器的动力学模型,采用多尺度方法对微系统的动力学方程进行摄动分析,探讨直流偏置电压、压膜阻尼和交流激励电压幅值对系统频率响应、共振频率的影响规律,结果表明:直流偏置电压和交流电压幅值都具有软化效应,且使共振频率漂移到较小的数值范围,压膜阻尼对共振频率的影响较小,但是增大压膜阻尼会使稳态振幅的峰值明显下降,为静电驱动微机电系统共振传感器的动力学分析与设计提供参考.     

力反馈式加速度计动态特性分析及重要参数选择

力反馈式微机械加速度计闭环系统的静电反馈力可以等效成一个与反馈电压成正比的负反馈力和一个与其平方成正比的负刚度,这使得加速度输入不同时,可以等效成不同参数的线性系统.首先,通过系统的等效开环数学模型的分析,提出静电反馈力的负刚度给整个系统带来的影响;然后在保证系统稳定性和其它性能的同时,以满足整个量程内的动态性能指标为目的,提出校正方案以及机械刚度的取值;接着对校验方案以及所选取参数进行了稳定性仿真和动态特性仿真;最后通过不同刚度和校正参数的两个加速度计的对比实验证明:适当提高系统机械刚度并合理选择校正参数能够在几乎不影响系统阈值的情况下提高系统的动态特性和稳定性.     

一种谐振式微加速度计表芯非线性动力学分析及实验

在研制基于静电刚度谐振式微加速度计过程中,发现增大激励电压可以提高输出信噪比,但响应的振动幅度将不稳定,同时谐振频率也将会出现漂移。针对上述问题,建立了静电驱动微机械谐振系统等效行为模型,非线性动力学理论分析结果与实验现象一致,总结出需要从加速度计结构参数优化和减小激励电压两个方面来减小频率漂移和提高分辨率。将结构优化准则应用到制造的微加速度计上,实验结果表明:在5 V敏感电压下,闭环条件下单梁加速度计灵敏度为58 Hz/g,分辨率为3.5 mg。     

横向交流电场下液膜参数不稳定性分析

当将运动的平面液膜置于横向的交流电场之间时会产生参数振荡现象.为了得到交流电场下平面液膜的色散关系并为液膜的破碎行为分析提供理论基础,本文基于漏电介质模型对液体的电学特性进行假设,对平面液膜在直流和交流电场下的参数不稳定性进行了分析.由于主流是基于时间的流动, 在稳定性分析中引入了Floquet理论. 在文中,将电场定义为部分交流电场和部分直流电场共同耦合后的混合型电场. 最后,波数和不稳定增长率之间的无量纲色散方程可由矩阵的形式表示.本文考虑了多种参数对不稳定的影响, 包括气液密度比、韦伯数、雷诺数、欧拉数、 松弛时间以及衡量交流电场占比的参数及频率参数,并得知欧拉数同时影响毛细不稳定性及参数不稳定性,交流电场占比对不稳定性的影响体现在恒定电场力上, 而交流电场频率主要影响参数不稳定性. 为了在实验中更容易地寻求参数振荡现象,增大电欧拉数及减小交流电场频率是有效的方法.      

Dynamic analysis of a novel wide-tunable microbeam resonator with a sliding free-of-charge electrode

In this paper, a MEMS-based resonator with a novel effective stiffness tunability is presented. The performance of the proposed resonator is based on the transversal vibration of the two porous cantilever microbeams with a rectangular microplate at the end of the structure. The microplate as a free-of-charge slider electrode is in contact with two other fixed substrate electrodes via the thin layer of dielectric material. Applying a constant DC voltage to the two fixed electrodes leads to the movement of free electrons in the slider and eventually to the formation of two series capacitors. As a result, the slider meets a nonlinear electrostatic force proportional to the square of the applied DC voltage. It will act as a nonlinear spring with a tunable stiffness during the oscillation of the resonator. The coupled nonlinear equations governing the longitudinal and transversal vibration of the resonator are extracted in the presence of the nonlinear voltage-sliding spring. Its steady-state solution is obtained based on a physically based learning method that makes it possible to obtain frequency response for the first harmony as well as for the higher harmonies and to predict primary and secondary resonances in different harmonies of the response. The effect of the applied tuning DC voltage, the geometrical parameters of the resonator, and the cantilever's porosity on the dynamic response of the resonator are investigated. It is shown that the tuning stiffness of this voltage-sliding spring provides a highly effective solution to realize an extreme tunable range. In the end, a modified tunable structure is introduced in which the folded beams are replaced with common ones. The modified resonator by making the nonlinear behavior of the resonator least can improve its performance significantly.

     

Application of piezoelectric actuation to regularize the chaotic response of an electrostatically actuated micro-beam

The impetus of this study is to investigate the nonlinear chaotic dynamics of a clamped–clamped micro-beam exposed to simultaneous electrostatic and piezoelectric actuation. The micro-beam is sandwiched with piezoelectric layers throughout its length. The combined DC and AC electrostatic actuation is imposed on the micro-beam through two upper and lower electrodes. The piezoelectric layers are actuated via a DC electric voltage applied in the direction of the height of the piezoelectric layers, which produces an axial force proportional to the applied DC voltage. The governing differential equation of the motion is derived using Hamiltonian principle and discretized to a nonlinear Duffing type ODE using Galerkin method. The governing ODE is numerically integrated to get the response of the system in terms of the governing parameters. The results show that the response of the system is greatly affected by the amounts of DC and AC electrostatic voltages applied to the upper and lower electrodes. The results show that the response of the system can be highly nonlinear and in some regions chaotic. Evaluating the K–S entropy of the system, based on several initial conditions given to the system, the chaotic response is distinguished from the periodic or quasiperiodic ones. The main objective is to passively control the chaotic response by applying an appropriate DC voltage to the piezoelectric layers.     

Analysis of nonlinear dynamic behavior of electrically actuated micro-beam with piezoelectric layers and squeeze-film damping effect

An analytical model based on a nonlinear deflection equation and the Reynolds equation is proposed to describe the dynamic behavior of an electrically actuated micro-beam with two piezoelectric layers. The proposed model takes explicit account of the fringing field effect, the axial stress effect, the residual stress effect, and the squeeze-film damping effect between the micro-beam and the lower electrode. The nonlinear governing equation of the micro-beam is solved using a hybrid computational scheme comprising the differential transformation method and the finite difference method. The validity of the analytical model and numerical solution procedure is demonstrated by comparing the result obtained for the pull-in voltage of a micro-beam actuated by a DC voltage only with that presented in the literature. It is shown that the nonlinear dynamic response of the micro-beam can be controlled using a combined driving scheme consisting of both the magnitude and the frequency of the AC actuating voltage and a DC driving voltage. The effects of the AC/DC actuating conditions, micro-beam geometry parameters, and squeeze-film damping force on the center-point displacement of the micro-beam are systematically examined. In addition, the actuating conditions which ensure the stability of the micro-beam are identified by means of phase portraits and Poincaré maps. In general, the results show that the analytical model and hybrid numerical scheme provide a feasible means of analyzing the dynamic response of a variety of electrostatically-actuated microstructures.     

Dynamic pull-in phenomenon in MEMS resonators

We study the pull-in instability in microelectromechanical (MEMS) resonators and find that characteristics of the pull-in phenomenon in the presence of AC loads differ from those under purely DC loads. We analyze this phenomenon, dubbed dynamic pull-in, and formulate safety criteria for the design of MEMS resonant sensors and filters excited near one of their natural frequencies. We also utilize this phenomenon to design a low-voltage MEMS RF switch actuated with a combined DC and AC loading. The new switch uses a voltage much lower than the traditionally used DC voltage. Either the frequency or the amplitude of the AC loading can be adjusted to reduce the driving voltage and switching time. The new actuation method has the potential of solving the problem of high driving voltages of RF MEMS switches.     

梳齿式微机械加速度计静态模型的辨识

讨论了一种梳齿式微机械加速度计的静态模型。从加的静态输入入手，求得加速度计平衡的输出关系式，还讨论了敏感输入轴垂直的横向加速度输入分量对输出的影响。在理论分析的基础上，根据离心机试验结果求得加速度计的静态模型。     

The effect of time-delayed feedback controller on an electrically actuated resonator

This paper presents a study of the effect of a time-delayed feedback controller on the dynamics of a Microelectromechanical systems (MEMS) capacitor actuated as a resonator by DC and AC voltage loads. A linearization analysis is conducted to determine the stability chart of the linearized system equations as a function of the time delay period and the controller gain. Then the method of multiple-scales is applied to determine the response and stability of the system for small vibration amplitude and voltage loads. It is shown that negative time-delay feedback control gain can lead to unstable responses, even if AC voltage is relatively small compared to the DC voltage. On the other hand, positive time delay can considerably strengthen the system stability even in fractal domains. We also show how the controller can be used to control damping in MEMS, increasing or decreasing, by tuning the gain amplitude and delay period. Agreements among the results of a shooting technique, long-time integration, basin of attraction analysis with the perturbation method are achieved.     

Enhancing flutter and buckling capacity of column by piezoelectric layers

This paper illustrates the use of a pair of piezoelectric layers in increasing the flutter and buckling capacity of a column subjected to a follower force. The column is fixed at one end while the other one is free to rotate but constrained transversely by a spring. The mathematical formulation is presented and solved numerically. The effect of the spring stiffness on the capacity and type of instability of the column is first illustrated numerically for the case without any piezoelectric actuators. A transition value for the stiffness can be identified, below which the column fails by flutter and above which the column buckles. Next, an external voltage is applied on the piezoelectric layers bonded on the surfaces of the column, which induces locally a pair of tensile follower force. This has the effect of increasing the capacity of the column as the voltage increases while the transition stiffness remains virtually unchanged for a given size and location of piezoelectric actuators. It is also shown that the capacity of the column increases with longer layers for a fixed voltage. However, the location of the layers along the column determines the transition stiffness and hence has an effect on the type of failure for a fixed spring constant. Positioning towards the fixed end increases the flutter capacity whereas positioning away will result in an increase in buckling capacity.     

Pull-in instability of a typical electrostatic MEMS resonator and its control by delayed feedback

Pull-in instability of the electrostatic microstructures is a common undesirable phenomenon which implies the loss of reliability of micro-electromechanical systems. Therefore, it is necessary to understand its mechanism and then reduce the phenomenon. In this work, pull-in instability of a typical electrostatic MEMS resonator is discussed in detail. Delayed position feedback and delayed velocity feedback are introduced to suppress pull-in instability, respectively. The thresholds of AC voltage for pull-in instability in the initial system and the controlled systems are obtained analytically by the Melnikov method. The theoretical predictions are in good agreement with the numerical results. It follows that pull-in instability of the MEMS resonator can be ascribed to the homoclinic bifurcation inducing by the AC and DC load. Furthermore, it is found that the controllers are both good strategies to reduce pull-in instability when their gains are positive. The delayed position feedback controller can work well only when the delay is very short and AC voltage is low, while the delayed velocity feedback will be effective under a much higher AC voltage and a wider delay range.