Diffusion of silicon in titanium nitride films. Efficiency of TiN barrier layers

Two kinds of reactively evaporated titanium nitride films with columnar (B ₀ films) and fine-grained film structure (B ₊ films) have been examined as diffusion barriers, preventing the silicon diffusion in silicon devices. The silicon diffusion profiles have been investigated by 2 MeV ⁴He⁺ Rutherford backscattering spectrometry (RBS) after annealing at temperatures up to 900° C, in view of application of high-temperature processes. The diffusivity from 400 to 900° C: D (m² s^–1)=2.5×10^–18 exp[–31 kJ/mol/(RT)] in B ₀ layers and D (m² s^–1)=3×10^–19 exp[–26 kJ/mol/(RT) in B ₊ TiN layers. The diffusivities determined correspond to grain boundary diffusion, the difference being due to the different microstructure. The very low diffusivity of silicon in B ₊ TiN layer makes it an excellent high-temperature barrier preventing silicon diffusion.     

<Superscript>2</Superscript>H and <Superscript>13</Superscript>C NMR investigation of deuterofullerites C<Subscript>60</Subscript>D<Subscript>x</Subscript>

Deuterofullerites C₆₀D_x have been studied by ²H and ¹³C NMR. These fullerites have two types of carbon–deuterium bonds: C–D terminal bonds, characterized by the quadrupole coupling constant (QCC) of 171 kHz, and –C ··· D ··· C– bridging bonds with a QCC of 56 kHz. The latter is responsible for the rigid lattice found in these fullerites, which is untypical of fullerenes. PACS 81.05.Tp; 82.56.Fk; 61.48.+c; 61.18.Fs; 61.10.Nz     

Diffusion of titanium atoms in Ni-Si-B metallic glass

The diffusion ot Ti atoms in the Ni₇₇Si₃B₂₀ metallic glass was studied by the Auger electron spectroscopy. The temperature dependence of the diffusion coefficient obeys the Arrhenius relation with the activation energyE=1·7 eV and the pre-exponential factorD ₀=0·86 × ×10^–4 m² s^–1. Possible mechanisms of the atomic transport in metallic glasses are discussedThe authors wish to thank Dr. P. Duhaj for providing the metallic glass samples.     

Investigations of the excitation energy transport mechanism in donor-acceptor systems

Measurements of fluorescence quantum yield _D/_oD of Na-fluorescein (donor; D) versus concentration of rhodamine B (acceptor; A) in viscous solutions have been carried out. The donor concentration in these solutions was as follows:C _D=2·10^–2 M (system I), 1.5·10^–2 M (II), 10^–2 M (III), 3·10^–3 M (IV), and 5·10^–5 M (V). The experimental results have been compared with current theories of nonradiative electronic energy transfer (NEET). In the case of very strong migration (systems I, II, and III), a significant influence of correlations (between configurations of D and A molecules in the surroundings of successively excited donors) on quantum yield _D/_oD has been determined. Experimental values have been found to be clearly higher in comparison with those predicted theoretically. The influence of possible factors on the decrease in the effectiveness of excitation energy transport to traps-acceptors in systems of very strong migration has been discussed.Dedicated to Professor A. Kawski on the occasion of his 65th birthday.     

An IR-Radiometer with Internal Signal Modulation

An infrared (IR) radiometer electrical circuit on the basis of photoresistors and photodiodes made of silicon doped with zinc (Si) as well as the narrow bandgap semiconductor alloy Pb_0.78Sn_0.22Te is presented. In the circuit suggested a bridge with the photoreceiver connected to the radiometer input and immediately fed by signal generators functions as a radiation modulator. The threshold sensitivity turned out on a recorder is 2·10^–13 W·Hz^–1/2 (for the n⁺–n–n⁺ structures made of Si, =0.8–l.2m, T=300K); 1.4·10^–15W·Hz^–1/2 (for p⁺–n–n⁺ S-diodes on the basis of Si, =0.8–1.2m, T=300K) and 10^–12W·Hz^1/2 (for photodiodes on the basis of Pb_0.78Sn_0.22Te, =8–13m, T=77K).     

The substitution of Fe2+ ions by Ni2+ ions in green rust one compounds

The oxidation of Fe(OH)₂ in the presence of Cl^– or CO ₃ ^2– ions leads, in the first stage of the reaction, to chloride-containing green rust one (GR1), 3Fe(OH)₂· Fe(OH)₂Cl·nH₂O, or carbonate-containing GR1, 4Fe(OH)₂·Fe₂(OH)₄CO₃·nH₂O, respectively. These GR1 compounds give the ferric oxyhydroxides by further oxidation. If a hydroxide Ni _x Fe_1–x (OH)₂ is initially precipitated, the reaction leads to a nickelous-ferric compound isomorphous to the ferrous-ferric GR1, but stable with respect to the oxidizing action of air. Similarly, the oxidation of a nickelous-ferrous hydroxide, in the presence of excess OH^– ions, leads to a nickelous-ferric GR1, a layered hydroxide with anionic interlayers made of OH^– ions and water molecules. The Mössbauer spectra of these nickelousferric GR1 display two ferric doublets, D₀ withIS=0.34 mm/s andQS=0.45 mm/s and D₁ withIS=0.36 mm/s andQS=0.86 mm/s. The existence of a ferrous-ferric GR1 incorporating OH^– ions, a compound never observed so far, is strongly suspected.     

Diffusion coefficient of selenium in indium antimonide

The diffusion of selenium in indium antimonide has been studied in the temperature range 400–490°C, by the method of removing layers. Two regions have been distinguished in the donor distribution profiles. The first has a low diffusion coefficient and a high surface concentration, near to the limit of solubility of selenium (8·10¹⁸ cm^–3). In the second region, a much larger diffusion coefficient and a surface concentration lower by two orders of magnitude (8·10¹⁶ cm^–3) with weak temperature dependence are found. The temperature dependences of the diffusion coefficients of the first and second regions can be described by the expressions: D=4.8·10¹³ exp(–4.1 eV/kT) cm²/sec, D₂=1.9·10¹³ exp(–3.9 eV/kT) cm²/sec.Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 11, pp. 40–43, November, 1991.     

Electrical properties of p-type ZnGeP2 irradiated by H+ ions

The properties of p-type ZnGeP₂ [p₀=(5–10)·10¹⁰ cm^–3, ₀=(2–5)·10^–7 (·cm)^–1], irradiated with H⁺ ions [E=5 MeV, T_irr=300 K, D=(1·10¹²–1.7·10¹⁶) cm^–2] are studied. An increase in the resistivity (to gr_max - 5·10¹¹ ·cm) and subsequent reduction in for large currents of H⁺ ions ( - 9·10⁸ ·cm for D - 1.7·10¹⁶ cm^–2), is observed in irradiated crystals. The resistivity of irradiated p-type ZnGeP₂ is found to be very sensitive to hydrostatic pressure [(4–5)·10^–5 bar^–1]. The annealing of radiation defects in the temperature interval (20–600) °C is examined.Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 10, pp. 91–93, October, 1991.     

Effect of deep dislocation levels in silicon on the properties of p-n junctions

We present the results of studies on the influence of deep levels, due to dislocations in electronic-grade silicon, on the lifetime of minority carriers and on the current-voltage and capacitance-voltage characteristics of p-n junctions. The parameters of the deep levels were determined by means of dynamic spectroscopy. The carrier lifetime in the high-resistance region of the p-n junction correlates well with the dislocation density and varies from 10^–7 sec to 3 · 10^–8 sec when the dislocation density N_d varies from 10⁷ cm^–2 to 5 · 10³ cm^–2. The voltage across the p-n junction at a high level of injection varies 1.6 to 6.2 v as a function of N_d. The ionization energy of deep levels associated with dislocation in silicon is 0.44 and 0.57 eV, measured from the bottom of the conduction band.Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 1, pp. 81–84, January, 1988.     

Practical separation of silicon isotopes by IRMPD of Si2F6

Large-scale silicon isotope separation based on the IRMPD of natural Si₂F₆ has been carried out using a commercially available high power CO₂ TEA laser and a flow reaction system. The decomposition product SiF₄ containing 19–33% of ³⁰Si was obtained at a production rate of 1.5×10^–2–2.6×10^–2 mol·h^–1, depending on experimental parameters such as laser wavelength, laser fluence, pressure, and flow rate. SiF₄ containing 12% of ²⁹Si was obtained under slightly different conditions, i.e., at a shorter wavelength than that for ³⁰Si. When 39% of Si₂F₆ was decomposed at a slow flow rate, residual Si₂F₆ was found to have 99.7% of ²⁸Si. The production rate was 4.2×10^–2 mol·h^–1.     

Nuclear orientation study of the decay of204BiFe

The decay of²⁰⁴Bi nuclei (I =6⁺, T_1/2=11·22 h) oriented in an iron host was investigated on the JINR low-temperature nuclear orientation facility SPIN. The orientation parameterB ₂=1·17 (6) was obtained from the analysis of six prominent E1 gamma-transitions. From the measured normalized intensities of the gamma-rays observed some 70 values of multipole mixing ratios for the gamma-transitions in²⁰⁴Pb nucleus were determined for the first time. The spins 6, 6, 5 and 4 could be uniquely assigned to the²⁰⁴Pb negative parity levels at 3891·5 keV, 3768·4 keV, 3301·5 keV and 2338·2 keV, respectively. The spin-parity assignments of the levels at 4183·8 keV, 4094·2 keV, 3782·0 keV, 2506·9 keV and 2065·1 keV were confirmed as 6^–, 6^–, 5^–, 5^– and 5⁺, respectively. For the level at 3105·1 keV spin-parity 5^– was suggested and spinparity 7^– of the level at 2696·4 keV was called in question. The possible placements of the gammatransitions 3 1351·7 keV and 1353·4 keV in the decay scheme is discussed. The reorientation parameters for the long-living levels at 2264·2 keV (T _1/2=0·45 s) and 1273·9 keV (T _1/2= =265 ns) were determined asG ₂=0·41 (14) andG ₂=0·60 (17), respectively. For the isomeric level at 2185·7 keV (T _1/2=67·2 min) the value ofG ₂=0·88 (49) was proposed.The authors would like to express their thanks to T. I. Kracíková and M. Trhlík for the valuable discussions in the course of the evaluation of the experimental data.     

Pitfalls in the Use of Common Luminescent Probes for Oxidative and Nitrosative Stress

Lucigenin (LC²⁺, bis-N-methylacridinium) and 2,7-dichlorofluorescin (DCFH₂) are widely used as chemiluminescent or fluorescent probes for cellular oxidative stress, to reflect levels of superoxide (O₂ ^·–) and hydrogen peroxide, respectively. We report mechanistic studies that add to the growing evidence for the unsuitability of either probe except in very well-defined circumstances. The ability for lucigenin to generate superoxide via reduction of LC²⁺ to LC^·+ and redox cycling with oxygen depends on the reduction potential of the LC²⁺/LC^·+ couple. Redox equilibrium between LC^·+ and the redox indicator benzyl viologen is established in microseconds after generation of the radicals by pulse radiolysis and indicated E(LC²⁺/LC^·+) –0.28 V vs. NHE. Reaction of LC^·+ with O₂ to generate O₂ ^·– was also observed directly similarly, occurring in milliseconds, with a rate constant k 3 × 10⁶ M ^–1 s^–1. Quinones act as redox mediators in LC^·+/O₂ redox cycling. Oxidation of DCFH₂ to fluorescent DCF is not achieved by O₂ ^·– or H₂O₂, but NO₂ ^·) reacts rapidly: k 1 × 10⁷ M ^–1 s^–1. Oxidation by H₂O₂ requires a catalyst: cytochrome c (released into the cytosol in apoptosis) is very effective (even 10 nM). Fluorescence reflects catalyst level as much as O₂ ^·–) production.     

Anomalous plasma phenomena of hollow cathode arc discharge

Magnetically confined argon plasma produced by hollow cathode arc discharge has been studied in different experimental conditions, with discharge current from 10–50 A, vessel argon pressure between 10^–3 and 10^–4 torr (1 torr=133·32 Pa) and axial magnetic field up to 0·12 T. The plasma density measured by a cylindrical Langmuir probe is found to be 10¹⁹ to 4 × 10¹⁹ m^–3 and the electron temperatureT _e varies between 2·5 and 4·8 eV. When an external axial magnetic field is applied the plasma temperature decreases with the increase in the magnetic field intensity until it reaches a minimum value at 0·075T and then increases with the same rate. This has been interpreted as high frequency waves excitation due to electron beam-plasma interaction, which explains the electron density jumps with the magnetic field intensity. Enhanced plasma transport across the magnetic field is studied and classified as anomalous diffusion.     

The dependence of the neutron temperature on the geometric parameter for water and loose diphenyl

The dependence of the neutron temperatureT _n on the geometric parameterB ² was measured by the pulse method in water and loose diphenyl. The measurements were made on a moderator poisoned by cadmium sulphate, a substance whose absorption cross-section is non 1/v.The following results were obtained: For waterT _n [eV]=–(0·00391±0·00045)B ² [cm^–2]+(0·02537±0·00035) for loose diphenyl:T _n [eV]=–(0·01014±0·00152)B ² [cm^–2]+(0·02518±0·00054).We are indebted to J. Jirou and J. Jadavan for their assistance in the measurements, the accelerator operation and electronic apparatus maintenance.     

Inclusive production of φ-mesons in neutron-proton interaction at 30–70 GeV/c

A signal of the-K⁺K^– decays has been observed in neutron-hydrogen interactions at energies of 30–70 GeV in an experiment using the BIS-2 spectrometer. The longitudinal momentum spectrum in the forward region,x _F<0·1 atp _T<1 GeV/c, can be well described by a power law dependence (1–x _F)^N withN=4·28±0·42. Thep _T ² -spectrum has been parametrized by the exp(–Bp _T ² ) law with the exponentB=(3·02±0·55) (GeV/c)^–2. The extrapolation of the measured cross section to the full kinematic region yields a value of (220±85) b in agreement with measurements from the proton beams.     

Optical and Photoelectric Inhomogeneity of CdTe:V Crystals

The optical and photoelectric properties of CdTe:V crystals with the doping impurity concentration N _V = 5·10¹⁸–5·10¹⁹ cm^–3 are investigated and the possibility of their use as a photorefractive material is considered. As is seen from the spectra of optical transmission, the crystals of both types possess high transparency (50–65%), which for CdTe:V specimens with N _V = 5·10¹⁹ cm^–3 decreases sharply and in the range 12–14 m does not exceed 5%, whereas for CdTe:V crystals with vanadium concentration of 5·10¹⁸ cm^–3 such a value of transmission remains unchanged up to 25 m, implying a good optical quality of the latter crystals and their possible application in the spectral range 1.06–1.25 m in modern fiber-optic communication lines.     

Properties of MOS-structures based on anode-oxidized CdSnAs2

The properties of metal (Al, Au)-anodic oxide-CdSnAs₂ monocrystal structures are studied. It is established that MOS-structures using undoped CdSnAs₂ crystals show a high positive fixed charge in the anodic oxide (N_S 5·10¹² cm^–2) and high surface state density on the oxide-CdSnAs₂ boundary surface (N_SS 2·10¹³ cm^–2·eV^–1). In MOS-structures using diffusion-doped (copper) crystals the sign of the fixed charge is negative (N_S 10¹¹ cm^–2, N_SS 2·10¹² cm^–2·eV^–1). The latter structures show a definite photosensitivity and photomemory. The possibility of effective control of the fixed charge value within the oxide by illumination is shown. The surface state distribution over energy, time constant, and capture section is determined.Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 9, pp. 90–93, September, 1982.     

The ESR spectrum of oxygen vacancies in sodium tellurite glasses

A theoretical analysis is presented for the shape of the ESR spectrum of the radiation-induced centers of oxygen vacancy type in sodium tellurite glasses. It is found that a qualitative agreement between the theoretical and observed curves can be obtained only if one assumes a completely anisotropic g factor and an inhomogeneous structure for the paramagnetic centers, whose parameters are found as g_x = 1.930; g_y = 1.971; g_z = 2.046; x ² >=4–10^–4-2.5·10^–3; y ² > = 4.9·10^–8-1·10^–6; z ² > = 2.2·10^–4-9·10^–4; d ² > = 36–100 G². It is concluded that the glass composition affects the center nonuniformity.Translated from Izvestiya VUZ, Fizika, No. 3, pp. 63–68, March, 1973.     

Solubility of Na2Co3 in NaCl:CaCl2 crystals

Measurements of electrical conductivity of NaCl 10^–5 molar fr. CaCl2 (1–80)×10^–5 molar fr. Na₂CO₃ crystals have been used to determine the temperature dependence of the solubility of CO₃-ions over the temperature range from 75 to 530 °C. The total solubility of CO₃-ions and that of [CO ₃ ^2– -vacancy] complexes may be expressed by simple relationships andc _ka=3·19× 10^–2 exp (–0·25 eV/kT), resp. The heat of solution of complexes is equal to 0·25 eV and that of free CO ₃ ^2– ions is higher than 1·2 eV. Under conditions of the thermal equilibrium between the solid solution and precipitate, the ratio of Na₂CO₃ and CaCO₃ components in the precipitate has been calculated at various temperatures and CO₃ concentrations.     

Heterodiffusion of Cr in molten Fe in the temperature range 1800 to 1970 K

Heterodiffusion of Cr has been studied using the method of thin layer and the radionuclide⁵¹Cr. The diffusion characteristics determined from the experimental results in the temperature range 1800 KT1970 K areD _o=1·59×10^–2 cm²/s andE=22·3±1·6 kcal/mol. The experimental method is discussed in detail and the results are compared with those of other authors.