微波ECR全方位离子注入制备类金刚石碳膜的结构及摩擦学性能研究

利用微波ECR全方位离子注入技术，在单晶硅（100）衬底上制备类金刚石薄膜.分析结果表明，所制备的类金刚石碳膜具有典型的类金刚石结构特征，薄膜均匀、致密，表面粗糙度小，摩擦系数小.其中，薄膜的结构和性能与氢流量比关系密切，随氢流量比的增加，薄膜的沉积速率减小，表面粗糙度降低，且生成sp³键更加趋向于金刚石结构，表面能 更低，从而使摩擦系数大幅降低. 关键词： 全方位离子注入 类金刚石碳膜 拉曼光谱 摩擦磨损     

催化剂对纳米非晶碳膜场发射性能的影响

利用微波等离子体增强化学气相沉积(MPECVD)法,在经处理的单晶硅衬底上沉积了纳米非晶碳薄膜.通过Raman、SEM、XRD表征,研究了催化剂对纳米非晶碳膜的生长速率及场发射性能的影响.结果表明,在制备纳米非晶碳膜时使用FeC13,作为催化剂可大幅提高其生长速率.在相同的制备条件下,与未加FeCl3催化剂制备的纳米非...     

基于PET核孔膜制备有机无机复合纳滤膜（英文）

纳滤膜在海水淡化及饮用水净化领域起着越来越重要的作用，核孔膜作为一种重要的分离材料，具有均匀的孔径、可调的孔密度及无缺陷的表面，在水处理及精确分离应用方面有着潜在的优势，高孔密度的超薄核孔膜在制备高性能纳滤膜上具有很大的潜力。基于此，利用氧化锆作选择层，核孔膜作为支撑层制备出了三层结构的有机无机复合纳滤膜，聚多巴胺(PDA)与聚乙烯亚胺(PEI)中间层促进无机纳米粒子在膜表面形成无机层。制备出的复合膜可实现对不同盐的部分截留，表现出的截留顺序为Na₂SO₄>MgSO₄>MgCl₂>NaCl。     

非平衡磁控溅射制备类石墨碳膜及性能研究

利用中频非平衡磁控溅射技术在单晶硅基底上沉积了类石墨碳膜, 采用Raman光谱、高分辨透射电子显微镜、原子力显微镜分析了薄膜微观结构和表面形貌; 采用纳米压痕仪和CSM摩擦磨损试验机测试了碳膜力学性能和摩擦学性能. 结果表明: 利用中频非平衡磁控溅射技术沉积的碳膜是一种以sp²键合碳为主、结构非晶、硬度适中、应力较低、表面粗糙度较大、摩擦性能优异的薄膜. 脉冲占空比对薄膜微观结构和性能有显著影响, 随着脉冲占空比的增大, Raman光谱D峰和G峰的强度比I_D/I_G先减小后增大, 而硬度随脉冲占空比的增大却呈现出相反的变化趋势, 即先增大后减小; 大气氛围中的摩擦性能测试表明, 本实验制备的薄膜具有优异的抗磨性能(～10^-11 cm³/N^-1. m^-1)和承载能力(～2.5 GPa). 随脉冲占空比的增大, 薄膜摩擦系数变化甚微而磨损率却呈现先显著减小后轻微增大的变化趋势. 类石墨碳膜优异的摩擦学性能主要归因于其独特的结构、较低的内应力及良好的结构稳定性.     

基于BiFeO_3/ITO复合膜表面钝化的黑硅太阳电池性能研究

采用金属银辅助化学刻蚀法在制绒的硅片表面刻蚀纳米孔形成微纳米双层结构,以期获得高吸收率的太阳能电池用黑硅材料.鉴于微纳米结构会在晶硅表面引入大量的载流子复合中心,利用磁控溅射技术在黑硅太阳电池表面制备了BiFeO_3/ITO复合膜,并对其表面性能和优化效果进行了探索.实验制备的具有微纳米双层结构的黑硅纳米线长约180—320 nm,在300—1000 nm波长范围内入射光反射率均在5%以下.沉积BiFeO_3/ITO复合薄膜后的黑硅太阳能电池反射率略有提高,但仍然具有较强的光吸收性能;采用BiFeO_3/ITO复合膜的黑硅太阳能电池开路电压和短路电流密度分别由最初的0.61 V和28.42 mA/cm~2提升至0.68 V和34.57 mA/cm~2,相应电池的光电转化效率由13.3%上升至16.8%.电池综合性能的改善主要是因为沉积BiFeO_3/ITO复合膜提高了电池光生载流子的有效分离,从而增强了黑硅太阳电池短波区域的光谱响应,表明具有自发极化性能的BiFeO_3薄膜对黑硅太阳能电池的表面性能可起到较好的优化作用.     

利用胶体小球掩蔽刻蚀技术制备的半导体纳米阵列的场电子发射特性

利用胶体小球掩蔽刻蚀技术,制备了单晶硅纳米阵列,利用原子力显微镜观察了硅阵列的表面形貌,实验结果表明,硅柱阵列具有高密度和较好的均匀性。同时研究了单晶硅纳米阵列的场电子发射特性。为了提高样品的场发射性能,在所制备的单晶硅有序纳米阵列上生长了一层非晶碳薄膜。与单晶纳米硅柱阵列相比,覆盖有非晶碳膜的样品的场电子发射特性有了明显的改善,表现在场发射的开启电场下降,同时场发射增强因子得到增加。结果表明非晶碳膜确实能够降低电子发射的表面有效势垒,从而增强了场电子发射特性。     

压力对纳米金刚石膜生长的影响

纳米金刚石膜具有高耐磨能力和低摩擦系数,在多个领域有广阔的应用前景。纳米金刚石膜可通过热丝化学气相沉积方法进行制备。其中,系统压力是关键的参数,适当的压力下可生长纳米金刚石膜,而改变压力则金刚石膜的表面形态将发生变化。实验通过不同压力下制备金刚石膜,采用扫描电镜进行形貌观察,并通过拉曼光谱确定纳米金刚石结构。实验表明,金刚石膜形态随压力变化而改变,一定压力下生长出纳米金刚石膜,降低压力则晶体颗粒变粗。分析其原因是与氢原子的运动密切相关。     

压力对纳米金刚石膜生长的影响（英文）

纳米金刚石膜具有高耐磨能力和低摩擦系数,在多个领域有广阔的应用前景。纳米金刚石膜可通过热丝化学气相沉积方法进行制备。其中,系统压力是关键的参数,适当的压力下可生长纳米金刚石膜,而改变压力则金刚石膜的表面形态将发生变化。实验通过不同压力下制备金刚石膜,采用扫描电镜进行形貌观察,并通过拉曼光谱确定纳米金刚石结构。实验表明,金刚石膜形态随压力变化而改变,一定压力下生长出纳米金刚石膜,降低压力则晶体颗粒变粗。分析其原因是与氢原子的运动密切相关。     

PPy/Nafion(R)复合膜的制备及性能表征

用0.5mol·L-1的FeCl3溶液作引发剂,采用原位化学聚合法将吡咯单体聚合在Nafion(R)117膜基体中.复合膜的红外光谱图中出现明显聚吡咯(PPy)的特征吸收峰,说明吡咯单体聚合在Nafion(R)117膜中.机械性能测试表明复合膜的拉伸强度比Nafion(R)117膜提高了.热重测试表明复合膜具有更高的热稳定性能.对复合膜进行了甲醇渗透性能的测试,结果表明复合膜具有明显的阻醇作用,PPy/NF-3膜的甲醇渗透率值是5.9×10-7cm2·s-1,和Nafion(R)117膜相比降低了53%.     

液相电化学法制备类金刚石薄膜及其摩擦性能研究

采用自行设计的液相法沉积装置,以甲醇有机溶剂作为碳源,利用液相电化学沉积技术在不锈钢及Si基底上制备了类金刚石薄膜;用扫描电镜、Raman光谱仪表征了沉积薄膜的表面形貌和结构;用UMT-2M摩擦磨损试验机对两种沉积薄膜进行了摩擦性能测试。结果表明:经电化学沉积的类金刚石薄膜均匀、致密,表面粗糙度小;Raman光谱在1 332cm-1处有强的谱峰,与金刚石的特征峰相吻合,其中不锈钢基底上薄膜的sp3含量更高;不锈钢基底沉积膜的摩擦系数为0.12,Si片基底沉积膜的摩擦系数为0.10;不锈钢基底沉积膜的耐磨性较Si片沉积膜高。     

Tribological properties of chemically bonded polyimide films on silicon with polyglycidyl methacrylate brush as adhesive layer

Polyimide thin films, which possess good stability and film uniformity, are successfully fabricated on single crystal silicon wafers coated with a thin polymer brush by suface-initiated polymerization (SIP) as an adhesive layer. The growth kinetic of polyglycidyl methacrylate (PGMA) brush was studied by the means of ellipsometry. The nano-scale morphology and chemical composition of PGMA brush and polyimide film were studied with atomic force microscopy (AFM), Fourier transform infrared spectrum (FT-IR), and X-ray photoelectron spectroscopy (XPS). The tribological behaviors of the thin films sliding against AISI-52100 steel ball were examined on a static-dynamic friction precision measurement apparatus and UMT-2MT tribometer. The worn surface of the polyimide thin films was investigated with scanning electron microscopy (SEM). The results indicated that the chemically bonded polyimide films exhibited better friction reduction and antiwear behavior compared to the polymide films on bare silicon surface. At a load of 0.5 N and sliding speed of 20 mm s⁻¹, the durability life of the polyimide thin films is over 25,000 sliding cycles and the friction coefficient is about 0.08.     

Self-Lubricating Ultrahigh Molecular Weight Polyethylene Thin Films with Excellent Wear Resistance at Light Friction Loads on Glass and Silicon

Thin films of ultrahigh molecular weight polyethylene (UHMWPE) were prepared on glass and silicon using a dip-coating technique, followed by removal of the decahydronaphthalene solvent at 140?°C for 20?hours and cooling in the oven in air. The wetting ability of the films was investigated by a contact angle method. The tribological behavior of the films was investigated using a ball-on-disk configuration in reciprocating mode. The reciprocating frequency of 4?Hz and single sliding distance of 5?mm used corresponded to a sliding speed of 40?mm/s. The counterface was a GCr15 steel ball with diameter of 3?mm and the normal frictional loads were 10–300?g. The worn surfaces on the films and wear scars on the steel ball were observed and analyzed by scanning electron microscopy (SEM). It was found that the surface morphologies of the films on glass and silicon were different, which is ascribed to the difference in thermal conductivity of the glass and silicon. Evaporation of the solution caused micro-orifices in the films on glass. The water contacting angle of about 87° on the films on the two substrates was similar to that of bulk UHMWPE. Their friction coefficient of about 0.1–0.2 indicated the films were self-lubricating. The wear life of the films decreased quickly with the increase of friction load. At light friction loads, the films showed excellent wear resistance. Extrusion was believed to be the main wear mechanism of the films.     

Tribological behaviors of self-assembled 3-aminopropyltriethoxysilane films on silicon

3-Aminopropyltriethoxysilane (APTES) thin films were prepared on the hydroxylated silicon substrate by a self-assembling process from formulated solution. Chemical compositions of the films were detected by X-ray photoelectron spectrometry (XPS). The thickness of the films was determined with an ellipsometer, while the morphologies of the original and worn surfaces of the samples were analyzed by means of atomic force microscopy (AFM) and scanning electron microscopy (SEM), respectively. The tribological properties of APTES thin films sliding against GCr15 steel ball were evaluated on a UMT-2MT reciprocating friction and wear tester. It was found that the macroscopic friction coefficients for coating times more than 1 h ranged from 0.177 to 0.3 whereas the value for short coating time was as high as 0.8. It was also found that the tribological behaviors of APTES films were sensitive to normal load and sliding velocity. SEM observation of the morphologies of worn surfaces indicates that the wear of silicon is characteristic of brittle fracture and severe abrasion. Differently, abrasion and micro-crack dominate the wear of APTES–SAM. The superior friction reduction and wear resistance of APTES films compared to the silicon substrate are attributed to good adhesion of the films to the substrate.     

Influence of temperature on structure as well as adhesion and friction and wear behavior of hydrogenated carbon nitride films prepared on silicon substrate

Hydrogenated-carbon nitride (CN_x:H) films were synthesized on silicon substrate in a large quantity by the pyrolysis of ethylenediamine in a temperature range of 700-950 °C. The influence of temperature on the morphology, structure, adhesion to substrate, and friction and wear behavior of CN_x:H films was investigated. It has been found that CN_x:H films obtained at 700 °C and 800 °C are amorphous, and those prepared at 900 °C and 950 °C consist of carbon nitride nanocrystal. Besides, CN_x:H film sample obtained at 700 °C has the maximum N content of 9.1 at.% but the poorest adhesion to Si substrate, while the one prepared at 900 °C has the lower N content and the highest adhesion to substrate. As a result, nanocrystalline CN_x:H (nc-CN_x:H) film synthesized at 900 °C possesses the best wear resistance when slides against stainless steel counterpart. N atom is incorporated into the graphitic network in three different bonding forms, and their relative content is closely related to temperature, corresponding to different adhesion as well as friction and wear behavior of the films obtained at different temperatures. Furthermore, the friction coefficient and antiwear life of as-deposited CN_x:H films vary with varying deposition temperature and thickness, and the film with thickness of 1.3 μm, obtained at 900 °C, has the longest antiwear life of over 180,000 s.     

Tribological Behavior of Multiply-Alkylated Cyclopentanes (MACs)-Cu Nanoparticles Composite Thin Film

Multiply-alkylated cyclopentanes (MACs) composite thin films containing Cu nanoparticles are fabricated on the octadecyltrichlorosilane (OTS)-modified substrate by a spin-coating technique. The thickness, wetting behavior, and nanoscale morphologies of the films are characterized by means of ellipsometry, contact angle measurement, and atomic force microscope (AFM). The friction and wear behaviors of the thin films sliding against Si₃N₄ ball are examined on a UMT-2MT tribometer in a ball-on-disk contact mode. The worn surfaces of the OTS-MAC-Cu composite film and the counterpart Si₃N₄ balls are investigated with a scanning electron microscope. Water contact angle on OTS-MAC-Cu composite film is higher than that of OTS-MAC film. OTS-MAC-Cu composite film exhibits higher load-carrying capacity and better friction reduction and antiwear behavior as compared with OTS-MAC film. This may be attributed to the load-carrying and self-repairing property of the Cu nanoparticles in the composite film and the formation of a transfer layer composed of OTS, MAC, and Cu on the rubbing surface of the counterpart ball.     

掺硅类金刚石薄膜摩擦过程的分子动力学模拟

掺硅类金刚石(Si-DLC) 薄膜表现出优异的摩擦学性能, 在潮湿空气和高温中显示出极低的摩擦系数和很好的耐磨性, 但是许多实验表明Si-DLC膜的摩擦性能受其硅含量的影响很大. 因此, 本文采用分子动力学模拟的方法分别研究干摩擦和油润滑两种情况下不同硅含量的Si-DLC膜的摩擦过程. 滑移结果表明干摩擦时DLC膜和掺硅DLC膜之间生成了一层转移膜, 而油润滑时则为边界膜. 因此干摩擦时的摩擦力明显大于油润滑时的摩擦力. 少量添加硅确实能降低DLC膜的摩擦力, 但是硅含量大于20%后对DLC膜的摩擦行为几乎无影响. 干摩擦时硅含量对转移膜内键的数量影响很大, 转移膜内CC键和CSi键都先增加后减少, 滑移结束时几乎不含CSi键.     

Comparative study of titanium carbide and nitride coatings grown by cathodic vacuum arc technique

Titanium nitride (TiN), titanium carbide (TiC) thin films and TiC/TiN bilayers have been deposited on AISI 304 stainless steel substrates by plasma assisted physical vapor deposition technique—reactive pulsed vacuum arc method. The coatings were characterized in terms of crystalline structure, microstructure and chemical nature by X-ray diffraction and X-ray photoelectron spectroscopy, respectively. Tribological behavior was investigated using ball on disc technique. The average coefficient of friction was measured, showing lower values for the TiN/TiC bilayer. Dynamic wear curves were performed for each coating, observing a better wear resistance for TiN/TiC bilayers, compared to TiN and TiC monolayers. On the other hand, the TiCN formation in the TiN/TiC bilayer was observed, being attributed to the interdiffusion between TiN and TiC at the interface. Moreover, the substrate temperature influence was analysing observing a good behavior at T_S = 115 °C.     

Tribological Properties of MACs-APS Films

Multiply-alkylated cyclopentanes (MACs) with different molecular structure were deposited on single crystal silicon wafers coated with a thin aminopropyltrimethoxylsilane (APS) film as an adhesive layer to form MACs-APS films. The thickness, wetting behavior and nano-scale morphologies of the films were characterized by means of ellipsometry, contact angle measurement, and atomic force microscopy (AFM). The friction and wear behaviors of the thin films sliding against a Si₃N₄ ball were examined on a UMT-2MT tribometer in a ball-on-disk contact mode. The worn surfaces of the MACs-APS films and the counterpart Si₃N₄ balls were investigated with a scanning electron microscope (SEM). It was found that the water contact angles on the MACs-APS film increased with the MACs alkyl chain-length. The MACs-APS film exhibited higher load-carrying capacity and better friction reduction and anti-wear behavior as compared with the APS film. This is suggested to occur because the APS acts as a strongly bonded lubricant phase and MACs as a mobile lubricant phase in the MACs-APS film. The increase of the chain-length of the alkyl substituent in the MACs compounds resulted in improved tribological properties of MACs-APS film. It is suggested that the longer alkyl chains are much more flexible and can dissipate the mechanical energy during the shearing process more easily than the short chain compounds. MACs with the longer chains have stronger chain-chain interactions and the larger MAC molecules have stronger intermolecular interactions, resulting in the good tribological properties of MACs-APS film.     

铁基合金激光熔覆层的高温磨损性能

 为提高40Cr钢表面耐磨性,采用预置激光熔覆法在40Cr基体表面制备Fe基涂层,利用HT-500摩擦磨损实验机测定干摩擦条件下,基体和熔覆层的摩擦因数随温度变化的规律。利用表面粗糙度轮廓仪测量磨痕的深度和宽度,SEM观察熔覆层以及磨痕的显微组织形貌,使用HV-1000型显微硬度仪检测基体和熔覆层结合部分的硬度。研究结果表明:熔覆层平均显微硬度值达到373.8HV(0.2);显著高于基体硬度198.4HV(0.2)。在干摩擦条件下,随着温度升高,磨损过程逐渐变平缓,平均摩擦因数降低,磨损率增加,耐磨性下降;在350~400 ℃之间,熔覆层磨损性能优于基体。     

Preparation and tribological tests of thin fluoroorganic films

Adhesion, friction and consequent wear of sliding surfaces are the basic problems that limit the performance and reliability of microelectromechanical devices. Lubrication of these nano- and microscale contacts is different from traditional lubricants. Self-assembled monolayers (SAMs) chemically bonded to the substrate are considered to be the best solution of lubrication. The majority of these monolayers are hydrophobic providing low friction, adhesion and wear.Chemical vapor deposition was used to grow a fluorosilane film on silicon Si(1 0 0) and a condensed monolayer of 3-mercaptopropyltrimethoxysilane (MPTMS) on Au(1 1 1). The films were characterized by means of a contact angle analyzer for hydrophobicity, and time-of-flight secondary ion mass spectrometry (ToF-SIMS) for identification of thin fluoroorganic monolayers deposited on silica surfaces and condensed monolayer MPTMS. Adhesion and friction measurements were performed using atomic force microscopy (AFM) and compared with measurements performed using a microtribometer operating in millinewton (mN) normal load range. Nanotribological measurements indicated that silica and MPTMS modified by fluorosilanes have the lowest friction coefficient and indicated a decrease friction coefficient with increasing fluoric alkyl chain length.