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1.
利用磁控溅射方法改变氧气含量制备了一系列NiO∶Cu/ZnO异质pn结。实验结果表明,氧含量对NiO∶Cu/ZnO异质pn结电学影响很大。相对于纯氩溅射,引入一定氧气(O2/(Ar+O2)比例为30%)后,NiO∶Cu/ZnO异质pn结的整流特性明显得到改善。与此同时,NiO∶Cu/ZnO异质pn结的光透过率也从40%增大到80%。这可能是由于氧气的轻量引入致使NiO∶Cu/ZnO异质pn结的结晶得到改善,薄膜内缺陷减少所致。进一步提高氧气含量,直到O2/(Ar+O2)比例至80%后,异质结的整流特性有所削弱,这可能是由于过多氧气的引入造成薄膜缺陷再次增多,进而影响到异质结的整流特性。这一结论得到了EDS、XRD、AFM和UV结果的支持。  相似文献   

2.
采用常压金属有机化学气相沉积(AP-MOCVD)技术、三步生长法,分别以H2O和N2O为氧源,DEZn为Zn源,N2作载气,在c-Al2O3衬底上生长出了晶体质量较好的ZnO薄膜。用X射线双晶衍射(DCXRD)和光致发光谱对ZnO薄膜的结晶性能和光学性质进行表征。结果显示,ZnO倾斜对称面(10-12)的ω扫描半峰全宽为350″,表明ZnO薄膜结晶性能良好;低温10 K光致发光谱结果表明,N2O为氧源生长的ZnO膜和H2O为氧源生长的ZnO膜的发光特性明显不同,没有观察到与氢有关的中性施主束缚激子对应的3.331 eV双电子卫星峰(TES)。这一结果表明,用N2O为氧源生长的ZnO薄膜中不易引进氢杂质。  相似文献   

3.
磁控溅射制备ZnO薄膜的受激发射特性的研究   总被引:2,自引:0,他引:2  
用射频磁控反应溅射法在二氧化硅衬底上制备ZnO薄膜。得到了在不同温度下ZnO薄膜的吸收与光致发光。观测到了纵光学波 (LO)声子吸收峰与自由激子吸收峰 ;室温 (30 0K)下 ,PL谱中仅有自由激子发光峰。这些结果证实了ZnO薄膜具有较高的质量。探讨了变温ZnO薄膜的发光特性。研究了ZnO薄膜的受激发射特性。  相似文献   

4.
玉米蛋白质基底上射频磁控溅射法制备ZnO薄膜   总被引:2,自引:2,他引:0       下载免费PDF全文
采用射频磁控溅射方法在蛋白质基底上成功地制备了ZnO薄膜,研究了不同靶基距、氩氧比和溅射功率条件对ZnO薄膜性质的影响。结果表明,较小的靶基距有助于ZnO薄膜的c轴择优取向生长。我们还发现,沉积于玉米蛋白质基底的ZnO薄膜存在不同程度的张应力,当Ar/(Ar+O2)为0.7时,ZnO薄膜内的张应力最小。ZnO近带边发光峰有不同程度的红移,我们认为,这是由于晶界势垒和氧空位Vo造成的。随着溅射功率的增大,薄膜生长速率显著加快,晶粒尺寸增大,ZnO的近带边发光峰位逐渐趋向于理论值。  相似文献   

5.
 采用射频反应溅射法在不同衬底上制备Zn3N2薄膜,然后对其原位氧化制备ZnO薄膜。利用X射线衍射分析(XRD)、扫描电子显微镜(SEM)和光致发光谱(PL)等表征技术研究了不同衬底对ZnO薄膜的结晶特性和发光性能的影响。XRD研究结果显示:Zn3N2薄膜在500 ℃原位氧化3 h后完全转变为ZnO薄膜,在玻璃和熔融石英衬底上制备的多晶ZnO薄膜无择优取向,而单晶硅(100)衬底上的多晶ZnO薄膜具有较好的沿(002)方向的择优取向。PL测试结果显示:硅和熔融石英衬底上的多晶ZnO薄膜发光性能良好,激子复合产生的紫外发光峰很强,且半高宽较窄,而来自于深能级发射的绿色发光峰很弱;而玻璃衬底上的多晶ZnO薄膜发光性能较差。  相似文献   

6.
Ag掺杂对ZnO薄膜的光电性能影响   总被引:4,自引:1,他引:3       下载免费PDF全文
采用超声喷雾热分解法在石英衬底上以醋酸锌水溶液为前驱体,以硝酸银水溶液为Ag掺杂源,以高纯O2为载气生长了Ag掺杂ZnO(ZnO∶Ag)薄膜。研究了Ag掺杂ZnO薄膜的表面结构、电学和光学性质。结果表明所得ZnO∶Ag薄膜表面结构良好,扫描电子显微镜(SEM)测试表明薄膜表面光滑平整,结构致密均匀;在室温光致发光(PL)光谱中检测到很强的近带边紫外发光峰;透射光谱中观测到非常陡峭的紫外吸收截止边和较高的可见光区透过率,表明薄膜具有较高的晶体质量与较好的光学特性;霍尔效应测试表明,在550℃下获得了p型导电的ZnO∶Ag薄膜。  相似文献   

7.
祐卫国  张勇  李璟  杨峰  CHENG C H  赵勇 《发光学报》2010,31(4):503-508
用射频反应磁控溅射法在不同溅射压强和氩氧比下制备了ZnO薄膜,通过X射线衍射(XRD)、扫描电镜(SEM)和光致发光(PL)谱等研究了溅射压强和氩氧比对ZnO薄膜结构和光学性质的影响。测量结果显示,所制备的ZnO薄膜为六角纤锌矿结构,具有沿c轴的择优取向;溅射压强P=0.6Pa,氩氧比Ar/O2=20/5.5sccm时,(002)晶面衍射峰强度和平均晶粒尺寸较大,(O02)XRD峰半峰全宽(FWHM)最小,光致发光紫外峰强度最强。  相似文献   

8.
Ni掺杂ZnO薄膜的结构与光学特性研究   总被引:1,自引:0,他引:1       下载免费PDF全文
兰伟  唐国梅  曹文磊  刘雪芹  王印月 《物理学报》2009,58(12):8501-8505
使用射频磁控溅射法成功制备了不同掺杂浓度(0—7at.%)的ZnO:Ni薄膜.X射线衍射的θ-2θ和摇摆曲线扫描结果表明,5at.%Ni掺杂ZnO薄膜具有沿c轴方向最佳的择优取向生长特性,(002)衍射峰向大角度方向移动揭示了Ni杂质被掺入ZnO晶格中占据Zn位.ZnO:Ni薄膜具有较好的可见光透明特性,拟合发现薄膜的光学带隙随Ni掺杂量的增加由3.272 eV线性降低到3.253 eV.未掺杂薄膜在550 nm处呈现出一个绿色发光峰,掺入Ni杂质后薄膜主要表现了以430 nm为中心的蓝色发光,分析认为它们分别源于薄膜中O空位和Zn填隙缺陷发光. 关键词: ZnO:Ni薄膜 结构特性 光学带隙 光致发光  相似文献   

9.
为研究具有更好材料稳定性的半透明薄膜太阳能电池,本文采用直流磁控溅射技术沉积氧化亚铜(Cu_2O)薄膜和氧化锌(ZnO)薄膜,制备了Cu_2O/ZnO异质结.使用扫描电镜、X射线衍射仪、拉曼光谱仪、薄膜测定系统和太阳能模拟器,研究在不同氩/氧气体流量比的条件下制备的Cu_2O层对异质结的材料特性、光学特性及光电特性的影响.研究结果表明:在一定氩/氧气体流量比范围内制备的Cu_2O/ZnO异质结,在AM1.5的标准模拟太阳光的照射下具有一定的光电转换能力,可作为半透明太阳能电池的换能单元.  相似文献   

10.
O484.1 2005010443 热退火对ZnO薄膜表面形貌与椭偏特性的影响=Thermal annealing effect on characteristics of surface morphology and ellipsometric of zinc oxide film[刊,中]/刘磁辉(中国科学技术大学物理系.安徽,合肥(230026)).林碧霞…∥发光学报.-2004,25(2).-151-155 利用原子力显微镜(AFM)和椭偏仪对溅射制备的硅基ZnO薄膜的热退火表面形貌与椭偏特性进行了研究。  相似文献   

11.
Deposition of ZnO Films on Freestanding CVD Thick Diamond Films   总被引:5,自引:0,他引:5       下载免费PDF全文
For ZnO/diamond structured surface acoustic wave (SAW) filters, performance is sensitively dependent on the quality of the ZnO films. In this paper, we prepare highly-oriented and fine grained polycrystalline ZnO thin films with excellent surface smoothness on the smooth nucleation surfaces of freestanding CVD diamond films by metal organic chemical vapour deposition (MOCVD). The properties of the ZnO films are characterized by x-ray diffraction (XRD), scanning electron microscopy (SEM), and photoluminescence (PL) spectrum. The influences of the deposition conditions on the quality of ZnO films are discussed briefly. ZnO/freestanding thick-diamond-film layered SAW devices with high response frequencies are expected to be developed.  相似文献   

12.
超分子有机薄膜   总被引:1,自引:0,他引:1  
李亚军 《发光学报》2003,24(1):I001-I002
利用超分子有机薄膜技术能制成新的传感分子电子器件、光学器件和生物分子器件等,受到跨学科高技术研究领域的重视。本文描述了超分子有机薄膜的制备方法以及在各应用领域的研究状况。重点介绍了我们研究组在近20年工作中,利用LB膜技术,在光电器件、气体传感技术和光学非线性,特别是在生物传感技术方面的研究成果。按照生物体系提供的信息,模拟合成功能分子,建造有组织的分子组装体,以便用来研究依赖于分子排列的生物物理化学效应。  相似文献   

13.
Prefer-oriented and fine grained polycrystalline GaN films are prepared by plasma enhanced metal organic chemical vapour deposition on nucleation surfaces of freestanding thick diamond films. The characteristics of the GaN films are characterized by x-ray diffraction, reflection high energy electron diffraction and atomic force microscopy. The results indicate that the structure and morphology of the films are strongly dependent on the deposition temperature. The most significant improvements in morphological and structural properties of GaN films are obtained under the proper deposition temperature of 400°C.  相似文献   

14.
Silver films(Ag) and silver-gold films(Ag-Au) with thickness ~15nm are coated on Bk7 glasses through thermal evaporation.After doping gold of 5.2%,the grain size of the Ag film reduces from 13.6nm to 9.1nm,also the surface roughness decreases from 1.45 nm to 0.94 nm.A UV lamp is used as the irradiation light source to accelerate the corrosion process in the atmosphere.After 17 h irradiation,the pure silver film surface turns dark,and the transmittances reduce from 350 nm to 500 nm,while the Ag-Au film degrades much less,almost negligibly after UV radiation.Additional x-ray photoelectron spectroscopy and atomic force micrographs data are provided to show atomic content of Sims and their surface morphologies.It is suggested that small grain size and high packing density of alloy film prevent reaction of silver with oxygen in the atmosphere,which leads to high stability of the Ag-Au Elm.  相似文献   

15.
通过热氧化氟化锌(ZnF2)薄膜的方法制备出氟掺杂的多晶ZnO薄膜,ZnF2薄膜是利用电子束蒸发方法沉积在Si(100)衬底得到的。利用X射线衍射和X射线电子能谱研究了ZnF2薄膜向ZnO的转变过程。实验结果表明,在400℃退火30min的条件下能够获得六方纤锌矿结构的ZnO:F薄膜。对ZnO:F薄膜的室温光致发光谱可以观察到位于379nm、半峰全宽为73meV的紫外发射峰,而相应于缺陷的深能级发射则完全猝灭。表明ZnO中残留的F能够有效地增强激子的发光,同时使缺陷发光强度明显降低。对F掺杂对ZnO的发光性能的影响进行了讨论。  相似文献   

16.
Fabrication techniques of ultra-thin optical polarizing films using gold island films have been investigated for the near-infrared region. The polarizing films are fabricated by stretching the periodic multilayers consisting of gold island layers and glass layers. We have experimentally investigated the optimum fabricating conditions necessary to induce large optical anisotropy into the gold island layers and have formed submicrometer-thick polarizing films with an extinction ratio of ≥20 dB in a near-infrared region longer than 800 nm. These polarizing films could be useful micro-polarizers for fiber-embedded in-line optical devices, micro-optics, and hybrid integrated optics.  相似文献   

17.
Multiply-alkylated cyclopentanes (MACs) with different molecular structure were deposited on single crystal silicon wafers coated with a thin aminopropyltrimethoxylsilane (APS) film as an adhesive layer to form MACs-APS films. The thickness, wetting behavior and nano-scale morphologies of the films were characterized by means of ellipsometry, contact angle measurement, and atomic force microscopy (AFM). The friction and wear behaviors of the thin films sliding against a Si3N4 ball were examined on a UMT-2MT tribometer in a ball-on-disk contact mode. The worn surfaces of the MACs-APS films and the counterpart Si3N4 balls were investigated with a scanning electron microscope (SEM). It was found that the water contact angles on the MACs-APS film increased with the MACs alkyl chain-length. The MACs-APS film exhibited higher load-carrying capacity and better friction reduction and anti-wear behavior as compared with the APS film. This is suggested to occur because the APS acts as a strongly bonded lubricant phase and MACs as a mobile lubricant phase in the MACs-APS film. The increase of the chain-length of the alkyl substituent in the MACs compounds resulted in improved tribological properties of MACs-APS film. It is suggested that the longer alkyl chains are much more flexible and can dissipate the mechanical energy during the shearing process more easily than the short chain compounds. MACs with the longer chains have stronger chain-chain interactions and the larger MAC molecules have stronger intermolecular interactions, resulting in the good tribological properties of MACs-APS film.  相似文献   

18.
氮化钛薄膜的光学性能分析   总被引:4,自引:4,他引:0  
利用磁控溅射法,在不同的工艺条件下制备氮化钛薄膜。详细分析了不同工艺条件下薄膜的光谱选择特性以及相应的光学常数,通过俄歇电子能谱对薄膜的不同深度的元素成分进行了分析,由原子力显微镜测量并处理得到氮化钛薄膜的表面形貌图。结果表明,氮化钛薄膜的光学性能严格依赖于氮和钛原子数比,符合化学计量比的TiN薄膜具有良好的光谱选择性。基底加负偏压溅射可进一步改善薄膜的性能。  相似文献   

19.
薄膜的光谱发射率   总被引:1,自引:0,他引:1  
本文讨论了薄膜内的多次反射对低吸收薄膜光谱发射率的影响。这里推导出的薄膜发射率的表达式与薄膜厚度d和其光学常数n(λ)和k(λ)有关。在d→∞的特殊情况下,薄膜发射率与大块材料发射率相等。给出了实际数值评价及发射率与d、n(λ)和k(λ)相互关系的更为精确的数值结果。  相似文献   

20.
We study the topological structure of the vortex system in a superfiuid film. Explicit expressions for the vortex density and velocity field as functions of the superfluid order parameter are derived. The evolution of vortices is also studied from the topological properties of the superfluid order parameter field.  相似文献   

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