用热丝CVD技术制备场发射冷阴极金刚石薄膜

以甲烷和氢气的混合气体为原料,用热丝化学汽相淀积法,在(100)硅衬底上800℃温度时异质生长出适合场发射的金刚石薄膜.然后用扫描电子显微镜、X射线衍射仪、透射电子显微镜和喇曼光谱仪等对其进行了分析,结果表明,所制备的薄膜是多晶金刚石,而且在(111)晶相择优生长.在扫描电子显微镜下(111)晶粒的外形几乎都是四面体结构,具有很多尖端,可以加强一定电压下的电场,所以所制备的薄膜能够满足低压场发射的要求.     

MPCVD金刚石的Raman光谱分析

用微波等离子体化学气相淀积法（MPCVD）在Si基片上生长了金刚石薄膜，通过对其进行Raman光谱分析，一次表征了金刚石的结构，纯度及应力状况等材料性能，同时并研究了生长过程中微波功率与金刚石性质的关系。研究表明，微波等离子体化学气相溶积法生长的金刚石薄膜，除了金刚石成分的生长外，还会有部分非金刚石成分的生长，金刚石的纯度与微波功率的关系不明显，另外此种方法生长的金刚石薄膜主要表现为张应力。     

PLD法制备PZT-YBCO结构的铁电薄膜的研究

本文利用脉冲准分子激光在LaAlO3单晶基片上淀积了YBCO和Zr/Ti为94/6的PZT铁电薄膜,并通过高频溅射将Pt蒸镀在PZT薄膜上作为上电极;用X射线衍射表征了该多层膜的晶相结构,测量了PZT的铁电性能和介电特性,讨论了PZT/YBCO薄膜的制备工艺,以及工艺条件对晶相结构和薄膜性能的影响.     

EACVD金刚石薄膜中氢分解过程的研究

采用蒙特卡罗方法模拟了电子辅助化学气相淀积（EACVD）金刚石薄膜中的氢分解过程,建立了电子碰撞使氢分解的模型,给出了电子能量分布及氢原子数的空间分布,讨论了电偏压和气压对氢分解的影响。这些结果对EACVD制造金刚石薄膜的研究有重要意义。     

电子回旋共振微波等离子体化学气相沉积

本文叙述了电子回旋共振微波等离子体化学气相沉积（ＥＣＲＰＣＶＤ）的工作原理、特点及其应用．ＥＣＲＰＣＶ Ｄ由放电室、淀积室、微波系统、磁场线圈、气路与真空系统组成．处于放电室的等离子体在磁场中做回旋运动，使电子的回旋运动频率与微波频率相同；处于回旋共振条件下的电子有效地吸收微波功率而获得高的能量，从而产生高活性和高密度的等离子体．电离度大于１０％，电子密度为１０１３ｃｍ３．ＥＣＲＰＣＶＤ可在低的气体流量、衬底不加热的情况下高速淀积高质量薄膜．以该技术淀积的Ｓｉ，Ｎ４，ＳｉＯ２薄膜可分别与高温ＣＶＤ的Ｓｉ３Ｎ４高温热氧化的ＳｉＯ２相比拟．ＥＣＲＰＣＶＤ淀积ａ－Ｓｉ：Ｈ淀积速率为通常ＣＶＤ的２０倍，而性能与射频ＣＶＤ淀积的ａ－Ｓｉ：Ｈ相当．ＥＣＲＰＣＶＤ 已成功用于淀积多种薄膜。     

XeCl（308nm）脉冲准分子激光淀积类金刚石薄膜

利用ＸｅＣｌ（３０８ｎｍ）脉冲准分子激光淀积技术在功率密度５×１０８Ｗ／ｃｍ２、室温、真空度１０－３Ｐａ的条件下，制备出不含氢成分的类金刚石薄膜，研究了类金刚石薄膜的特性及其随制备工艺条件的变化规律。研究了激光诱导的碳等离子体发射光谱，探讨了类金刚石薄膜的形成机理。     

富勒烯作为过渡层生长金刚石薄膜研究

采用微波等离子体化学气相淀积法，以Ｃ６０膜过渡层，在光滑的单晶Ｓｉ衬底（１００）表面的研磨的石英衬底表面等光学衬底上，首次在无衬底负偏压条件下生长出多晶金刚石薄膜，通过扫描电镜观察到生长膜晶粒呈莱花状，生长表面为金刚石（１００）界面。     

脉冲准分子激光淀积薄膜的实验研究

利用两种脉宽 (30ns,5 0 0fs)的KrF准分子激光展开了淀积类金刚石薄膜的实验研究 ,并且成功地制备了大面积不含氢成分的HF DLC薄膜 ,运用时空分辨的等离子体发射光谱诊断系统和离子探针系统研究了等离子体特性对薄膜性能的影响。尝试了利用准分子激光制备非晶硅薄膜 ,研究了实验参数对非晶硅薄膜制备的影响 ,并分析了制备具有良好电学和光学性能的非晶硅薄膜的条件     

脉冲准分子激光淀积薄膜的实验研究

 利用两种脉宽(30ns，500fs)的KrF准分子激光展开了淀积类金刚石薄膜的实验研究，并且成功地制备了大面积不含氢成分的HF-DLC薄膜，运用时空分辨的等离子体发射光谱诊断系统和离子探针系统研究了等离子体特性对薄膜性能的影响。尝试了利用准分子激光制备非晶硅薄膜，研究了实验参数对非晶硅薄膜制备的影响，并分析了制备具有良好电学和光学性能的非晶硅薄膜的条件。     

脉冲激光制备类金刚石薄膜及原位激光等离子体发射光谱

用ＹＡＧ脉冲激光轰击真空室内的石墨靶,可以形成包含碳素的激光等离子体,并在硅或石英衬氏上淀积形成某种类型的碳膜。用光学多道分析仪原位测量了激光等离子体的发射光谱,给出反应空间可能存在的反应基团有碳原子、碳离子、碳分子等,用拉曼光谱研究了薄膜的结构,证明所形成的薄膜为类金刚石膜,并得出碳原子和碳离子与薄膜的类金刚石结构有关。制备过程中,氢的参与有利于薄膜中金刚石成分的形成。空间分辨的原位激光等离子体发射光谱表明,在反应空间存在薄膜形成的最佳位置。     

Development of ZnTe film with high copper doping efficiency for solar cells

Since a hole barrier was formed in back contact due to mismatch of work function, the back contact material for CdTe cell has been a significant research direction. The ZnTe:Cu is an ideal back contact material, which reduces the valence band discontinuity and can be used as the electron back reflection layer to inhibit interface recombination. The conductivity of ZnTe:Cu film is improved by applying RF-coupled DC sputtering and post-deposition heat treatment. The doping efficiency is computed as the ratio of free hole density and copper concentration, which can be correlated with performance for CdTe-based solar cell. The higher doping efficiency means that more copper atoms substitute for Zn sites in ZnTe lattices and less mobilized copper atoms remain which can enter into the CdTe absorber layer. Copper atoms are suspected as dominant element for CdTe-based cell degradation. After optimizing the ZnTe:Cu films, a systematic study is carried out to incorporate ZnTe:Cu film into CdTe solar cell. The EQE spectrum is kept relatively stable over the long wavelength range without decreasing. It is proved that the conduction band barrier of device with ZnTe:Cu/Au contact material has an effect on the EQE response, which works as free electron barrier and reduces the recombination rate of free carrier. According to the dark J—V data or the light J—V data in the linear region, the current indicates that the intercept gives the diode reverse saturation current. The results of ideality factor indicate that the dominant recombination occurs in the space charge region. In addition, the space charge density and depletion width of solar cell can be estimated by C—V profiling.     

Improving the performance of pure sulfide Cu(InGa)S2 solar cells via injection annealing system

In this study, we present an effective method of improving the performance of pure sulfide Cu(InGa)S₂ (CIGS) solar cells via injection annealing system. The injection annealing system can perform annealing at desired temperatures, and therefore, the CIGS thin film passed over the temperature range in which secondary phases occurs. Via the injection annealing system, secondary phase InS_x was effectively removed from the surface of the CIGS thin films at the temperatures over 550°C. This resulted in the formation of good-quality P–N junction CIGS devices, thereby improving significantly the performance of the CIGS solar cell. In addition, the open-circuit-voltage (V_OC) and fill factor (FF) of the CIGS devices increased gradually with increasing annealing temperature in the range of 550–640°C. It is speculated that the bulk defects were decreased as the annealing temperature increased. Finally, via injection annealing system, a pure sulfide CIGS solar cell with an efficiency of 12.16% was achieved.     

减反膜对单晶硅太阳能电池性能的影响分析

在太阳能电池效率的评价中，电池材料、掺杂浓度、扩散长度等都是比较重要的参数，合理地改变相关参数可以优化太阳能电池的性能，提高电池效率。此外，在太阳能电池表面镀一层具有减反作用的光学薄膜（简称减反膜）也是提高电池效率的重要手段。以提高电池效率为目标，对单晶硅太阳能电池的掺杂浓度和扩散长度等微观参数进行计算优化，分析了掺杂浓度和扩散长度变化对电池效率的影响。并在此基础上分析了不同类型的减反膜对于电池效率的影响，给出了最佳减反膜材料及其膜系厚度，并且结合镀膜后电池量子效率的变化验证了其准确性。结果表明，在优化电池掺杂浓度和扩散长度的基础上，选择合适的减反膜，电池效率最高可达20.35%，相比于优化前提高了8.25%。     

Enhanced broadband light absorption in silicon film by large-size lumpy silver particles

Broadband light absorption enhancement in crystalline silicon thin-film solar cells by rear-located 400 nm lumpy silver particles has been studied, based on the theoretical simulations of 3D finite-difference time-domain method. By simulations, we have investigated the light scattering properties of 400 nm lumpy Ag particles and put it to silicon thin-film solar cells. In addition, the varying rear-located Ag particles coverage and two surface situations of silicon films, which could influence on the light absorption of solar devices, have also been comprehensively considered. The results have shown that rear-located 400 nm lumpy Ag particles would enhance the absorption in silicon films in a broadband range. And it has been proved that 20 % coverage density of rear-located Ag particles is optimal for improving the light absorption of smooth silicon thin-film solar devices. When we create rough surface on one or both sides of silicon films, the absorbed light would further increase, and the theoretical maximum enhancement is 15.1 % compared with the smooth silicon thin-film solar cell without Ag particles.     

Nanoimprint texturing of transparent flexible substrates for improved light management in thin‐film solar cells

We present a nanoimprint based approach to achieve efficient light management for solar cells on low temperature transparent polymer films. These films are particularly low‐priced, though sensitive to temperature, and therefore limiting the range of deposition temperatures of subsequent solar cell layers. By using nanoimprint technology, we successfully replicated optimized light trapping textures of etched high temperature ZnO:Al on a low temperature PET film without deterioration of optical properties of the substrate. The imprint‐textured PET substrates show excellent light scattering properties and lead to significantly improved incoupling and trapping of light in the solar cell, resulting in a current density of 12.9 mA/cm², similar to that on a glass substrate. An overall efficiency of 6.9% was achieved for a flexible thin‐film silicon solar cell on low cost PET substrate. (© 2015 WILEY‐VCH Verlag GmbH &Co. KGaA, Weinheim)     

Crystalline Si thin-film solar cells: a review

The present review summarizes the results of research efforts in the field of crystalline silicon thin-film solar cells on foreign substrates. The large number of competing approaches can be broadly classified according to the grain size of the crystalline Si films and the doping of the crystalline absorber. Currently, solar cells based on microcrystalline Si films on glass with an intrinsic or moderately doped absorber film achieve efficiencies around 10%, whereas thin-film cells fabricated from large-grained polycrystalline Si on high-temperature-resistant substrates have efficiencies in the range of 15%. The paper discusses the limitations of various approaches and describes recent developments in the area of thin, monocrystalline Si films that may open the way towards 20% efficient thin-film Si solar cells. Received: 1 March 1999 / Accepted: 28 March 1999 / Published online: 24 June 1999     

Effect of hydrogen on surface texturing and crystallization of a-Si:H thin film irradiated by excimer laser

Hydrogenated amorphous silicon (a-Si:H) thin films have been considered for use in solar cell applications because of their significantly reduced cost compared to crystalline bulk silicon. However, their overall efficiency and stability are lower than that of their bulk crystalline counterpart. Limited work has been performed on simultaneously solving the efficiency and stability issues of a-Si:H. Previous work has shown that surface texturing and crystallization on a-Si:H thin film can be achieved through a single-step laser processing, which can potentially alleviate the disadvantages of a-Si:H in solar cell applications. In this study, hydrogenated and dehydrogenated amorphous silicon thin films deposited on glass substrates were irradiated by KrF excimer laser pulses and the effect of hydrogen on surface morphologies and microstructures is discussed. Sharp spikes are focused only on hydrogenated films, and the large-grained and fine-grained regions caused by two crystallization processes are also induced by presence of hydrogen. Enhanced light absorptance is observed due to light trapping based on surface geometry changes of a-Si:H films, while the formation of a mixture of nanocrystalline silicon and original amorphous silicon after crystallization suggests that the overall material stability can potentially improve. The relationship between crystallinity, fluence and number of pulses is also investigated. Furthermore, a step-by-step crystallization process is introduced to prevent the hydrogen from diffusing out in order to reduce the defect density, and the relationship between residue hydrogen concentration, fluence and step width is discussed. Finally, the combined effects show that the single-step process of surface texturing and step-by-step crystallization induced by excimer laser processing are promising for a-Si:H thin-film solar cell applications.     

Preparation of chemically deposited thin films of CdS/PbS solar cell

The present paper reports the preparation of a solar cell which has a cross-sectional scheme: ITO/CdS/PbS, containing a commercially transparent conductive ITO; chemically deposited n-type CdS (340 nm) and absorbed layer of p-type PbS (1400 nm). The structural and optical properties of the constituent films are presented. X-ray diffraction showed that all of the thin films are polycrystalline. Using scanning electron microscopy, the present study revealed that the films have uniform surface morphology over the substrate. The solar cell was characterized by determining the open circuit voltage, short-circuit current density, and J–V under 40 mW/cm² solar radiation. The efficiency of the solar cells was 1.35%, which is much higher (0.041, 0.5 and 0.1–0.4%) and slightly smaller (1.65%) than some solar cells reported in the literature.     

Giant photovoltaic effect

A giant photovoltaic effect was revealed in silicon-type photoelectronic converters (solar cells) coated with specific antireflecting films developed by our research group. More specifically, it was found that the ratio of photoconversion efficiency for a solar cell with such an antireflective film on its surface to the efficiency for a solar cell without the film equals a second power of relation of photoelectromotive force of a converter with the film to the photoelectromotive force of a converter without the film. The film comprises an antireflecting coating that is high-efficient in the wavelength range of 450 to 1000 nm and that is synthesized on the basis of novel nanomaterials that provide the quasi-zero average complex refractive index of nanocomposite film.     

Investigation of CdS and CdTe thin films and influence of CdCl2 on CdTe/CdS structure

CdTe/CdS heterojunction solar cell structure has been fabricated using simple, easy and low-cost methods. To fabricate this structure, CdS and CdTe thin films are deposited onto FTO-coated conducting glass substrates by chemical bath deposition (CBD) and electrodeposition method, respectively. The optimized growth conditions are chosen for both CdS and CdTe films by investigating the optical, structural and morphological properties of both the as-deposited and annealed films. Optical measurement showed that CdS films have higher transmittance and lower absorbance, and CdTe films have lower transmittance and higher absorbance in the near infrared region. The band gap of CdS films is estimated to lie in the range 2.29–2.41 eV and that of CdTe films is in the range 1.53–1.55 eV. X-ray diffraction (XRD) study reveals that CdS and CdTe films are polycrystalline with preferential orientation of (1 1 1) plane. Scanning electron microscopy (SEM) study reveals that both films are smooth, void-free and uniformly distributed over the surface of the substrate. Fabricated CdTe/CdS structure showed the anticipated rectifying behaviour, and the rectifying behaviour is observed to improve due to CdCl₂ treatment.