射频磁控溅射法生长MgxZn1-xO薄膜的结构和光学特性

用射频磁控溅射法在80℃的衬底温度下制备出Mg_xZn_1-xO(0≤x ≤030)薄膜.x射线 衍射(XRD)结果表明，Mg_xZn_1-xO薄膜为单相六角纤锌矿结构， 没有形成任何显著 的MgO分离相，Mg_xZn_1-xO薄膜的择优取向平行于与衬底垂直的 c轴；c轴晶格常数随着Mg含量的增加逐渐减小.在Mg_xZn_1-xO薄膜的光透射谱中出现 锐利的吸收边，由透 射谱估算出Mg_xZn_1-xO薄膜的带隙宽度由332eV(x=0)线性地 增加到396eV(x=030). 关键词： xZn_1-xO薄膜')" href="#">Mg_xZn_1-xO薄膜 射频磁控溅射 Mg含量     

白宝石衬底上生长的MgxZn1-xO晶体薄膜的结构和光学性能

在白宝石（sapphire）衬底上低温外延生长出了Mg_xZn_1-xO晶体薄膜.x射线衍射（XRD）及能量色散x射线（EDX）分析表明，Mg_xZn_1-xO薄膜的晶体结构依赖于薄膜中Mg的组分x，随着Mg组分的增大，Mg_xZn_1-xO薄膜的结构从与ZnO晶体一致的六方结构转变为与MgO晶体一致的立方结构.对Mg_xZn_1-xO薄膜的紫外透 关键词： 电子束蒸发反应 xZn_1-xO晶体薄膜')" href="#">Mg_xZn_1-xO晶体薄膜 结构和光学性能     

溶胶-凝胶法制备MgxZn1-xO薄膜的结构及光学特性

用溶胶-凝胶法制备了一系列的Mg_xZn_1-xO(0≤x≤0.3)薄膜,并用X射线衍射(XRD)和光致发光(PL)研究了不同的退火温度和Mg的掺杂含量对Mg_xZn_1-xO薄膜的结构和光学性质的影响.研究表明:Mg_xZn_1-xO薄膜为单相六角纤锌矿结构,并且具有沿c轴的择优取向;发现了中间热处理温度为350℃的Mg_xZn_1-xO薄膜退火温度的转折点为700℃,低于这个温度时随退火温度的升高,(002)衍射峰强度增强且掺Mg的薄膜既有紫外光又有绿光发射;800℃退火时,薄膜的(002)衍射峰强度减小,出现了(100)和(101)衍射峰,且掺Mg的薄膜只有紫外发光峰.不同的掺杂浓度对于发光也有影响,低于700℃退火时,ZnO薄膜只出现紫外发光峰,掺Mg的薄膜却出现了紫外和绿光两个发光峰.     

第一性原理的广义梯度近似+U方法的纤锌矿Zn1-xMgxO极化特性与Zn0.75Mg0.25O/ZnO 界面能带偏差研究

在纤锌矿结构Zn_1-xMg_xO/ZnO异质结构中发现了高迁移率的二维电子气(2DEG), 2DEG 的产生很可能是由于界面上存在不连续极化, 而且2DEG通常也被认为是由极化电荷产生的结果. 为了探索2DEG的形成机理及其产生的根源, 研究Zn_1-xMg_xO合金的极化特性与ZnO/Zn_1-xMg_xO超晶格的能带排列是非常必要的. 基于第一性原理广义梯度近似+U方法研究了Zn_1-xMg_xO合金的自发极化随Mg组分x的变化关系, 其中极化特性的计算采用Berry-phase方法. 由于ZnO与Zn_1-xMg_xO 面内晶格参数大小相当, ZnO 与Zn_1-xMg_xO 的界面匹配度优良, 所以ZnO/Zn_1-xMg_xO 超晶格模型较容易建立. 计算了Mg_0.25Zn_0.75O/ZnO超晶格静电势的面内平均及其沿着Z(0001)方向上的宏观平均. (5+3)Mg_0.25Zn_0.75O/ZnO超晶格拥有较大的尺寸, 确保远离界面的Mg_0.25Zn_0.75O与ZnO区域与块体计算情况一致. 除此之外, 基于宏观平均为能量参考, 计算得到Mg_0.25Zn_0.75O/ZnO超晶格界面处价带偏差为0.26 eV, 并且导带偏差与价带偏差的比值处于合理区间, 这与近来实验上报道的结果相符. 除了ZnO在[0001]方向上产生自发极化外, 由于在ZnO中引入Mg杂质会产生应变应力, 导致Mg_xZn_1-xO层产生额外的极化值. 这样必然会在Mg_0.25Zn_0.75O/Zn界面处产生非连续极化现象, 促使单极性电荷在界面处积累, 从而在Mg_0.25Zn_0.75O/Zn超晶格中产生内在电场. 此外, 计算了Mg_0.25Zn_0.75O/ZnO超晶格的能带排列, 由于价带偏差Δ E_V=0.26 eV与导带偏差ΔE_C=0.33 eV, 表明能带遵循I型排列. Mg_0.25Zn_0.75O/ZnO 的这种能带排列方式足以让电子与空穴在势阱中产生禁闭作用. 2DEG在电子学与光电子学领域都有重要应用, 本文的研究结果将对Mg_0.25Zn_0.75O/ZnO 界面2DEG的设计与优化中起到重要作用, 并且可以作为研究其他Mg组分的Mg_xZn_1-xO/ZnO超晶格界面电子气特性的参考依据.     

退火温度对低温生长MgxZn1－xO薄膜光学性质的影响

用射频磁控溅射法在80℃衬底温度下制备出Mg_xZn_1-xO(x=0.16)薄膜，用X射线衍射(XRD)、光致发光(PL)和透射谱研究了退火温度对Mg_xZn_1-xO薄膜结构和光学性质的影响.测量结果显示，Mg_xZn_1-xO薄膜为单相六角纤锌矿结构，并且具有沿c轴的择优取向；随着退火温度的升高，(002)XRD峰强度、平均晶粒尺寸和紫外PL峰强度增大，(002)XRD峰半高宽(F 关键词： xZn_1-xO薄膜')" href="#">Mg_xZn_1-xO薄膜 射频磁控溅射 退火     

m面蓝宝石上外延（110）取向立方MgZnO薄膜及其日盲紫外探测器件研究

由于在日盲紫外探测方面的应用前景,具有合适带隙的MgZnO合金半导体薄膜受到越来越多的关注。获得具有择优取向的单一相MgZnO对提升MgZnO基日盲紫外探测器性能至关重要。本文利用低压金属有机化学气相沉积（LP-MOCVD）方法在m面蓝宝石衬底上制备了一系列不同组分的Mg_xZn_1-xO薄膜。光学和结构特性测试结果表明：Zn摩尔分数达到55%的Mg_0.45Zn_0.55O薄膜依然是单一立方相,其光学带隙可以达到4.7 eV。立方岩盐结构MgZnO与m面蓝宝石衬底的外延结构关系为（110）_MgZnO‖（1010）_sapphire、[001]_MgZnO‖[1210]_sapphire和[110]_MgZnO‖[0001]_sapphire。唯一确定的面内取向有利于薄膜晶体质量的提高。基于（110）取向立方相Mg_0.45Zn_0.55O薄膜制备金属-半导体-金属（MSM）结构器件,获得了光响应峰在260 nm、光响应截止波长278 nm的日盲紫外探测器。     

p型MgxZn1-xO薄膜材料的制备与光学特性

通过金属有机化学汽相沉积(MOCVD)法在GaAs衬底上生长出了Mg_xZn_1-xO薄膜,通过氧气气氛下的高温退火使得衬底中的As原子通过扩散作用进入薄膜形成受主,得到p型的Mg_xZn_1-xO薄膜。退火前后XPS谱中As(3d)峰的对比表明,Mg_xZn_1-xO薄膜中存在As。电学测试结果表明:退火对样品的电阻率和载流子浓度的影响很大。这是长时间的氧气退火使得氧空位数目明显减少,从而使Zn—O键数量显著增加造成的。在样品的X射线衍射(XRD)谱中,p型样品的(002)衍射峰明显弱于n型样品。而在二者的光致发光(PL)谱中,都存在着很强的近带边发射(NBE)峰和较弱的深能级发射(DLE)峰,p型样品的NBE峰明显较弱而DLE峰却很强。这些现象是由于As原子的扩散,使薄膜中产生了新的缺陷能级,导致能级间的激子复合更加复杂。稳定的p型Mg_xZn_1-xO薄膜的获得为制备Mg_xZn_1-xO同质结和发光二极管奠定了基础。     

MgxZn1-xO合金制备及MgZnO/ZnO异质结构的光学性质

利用射频等离子体辅助的分子束外延(P-MBE)技术在c面的蓝宝石衬底上生长了具有不同Mg含量(0≤x≤0.28)的六方相MgZnO合金薄膜,研究了该系列样品Raman频移的幅度与合金组分的对应关系,为MgZnO合金中Mg含量的确定提供了新的方法。在此基础上选择具有合适带宽的MgZnO合金作为垒层,制备了MgZnO/ZnO量子阱结构。在较高的光激发密度下,观测到了发光强度随激发密度的超线性增加,并将之归因于激子-激子碰撞引起的超辐射过程。     

石英玻璃衬底上纤锌矿Mg0.25Zn0.75O薄膜的结构及光学性能

Mg_xZn_1-xO材料是一种新型光电功能材料.采用溶胶凝胶法在石英玻璃上制备了Mg_0.25Zn_0.75O薄膜,理论结合实验研究了Mg_0.25Zn_0.75O薄膜的结构和光学性能.研究表明,石英玻璃衬底上Mg_0.25Zn_0.75O薄膜呈六方纤锌矿结构,薄膜均匀,平均粒径约为20nm.吸收光谱表明吸收带边始于3 关键词： 0.25Zn_0.75O薄膜')" href="#">Mg_0.25Zn_0.75O薄膜 溶胶凝胶法 石英玻璃衬底 紫外发光     

N2流量对N掺杂MgZnO薄膜结构和性能的影响

利用射频磁控溅射方法,使用Mg_{0. 04}Zn_0.96O 陶瓷靶材,选用不同流量比的氮气和氩气混和气体作为溅射气体,在石英基片上生长N掺杂Mg_xZn_1-xO合金薄膜。研究了氮流量比对薄膜组分、结构、形貌、电学性质和拉曼光谱的影响。结果显示：随着溅射气氛中氮流量比的增加,薄膜中Mg含量增加,薄膜表面颗粒尺寸减小,结晶质量变差,电阻率逐渐增大,导电类型发生转变。在氮流量比为20%时,获得了最好的p型导电薄膜。另外,随着氮流量比的增加,拉曼光谱中与N_O相关的位于272 cm^-1、642 cm^-1左右的振动峰逐渐增强,表明N_O的浓度随着氮流量比的加大而有所增加。     

Optical and structural properties of MgZnO/ZnO hetero- and double heterostructures grown by pulsed laser deposition

MgZnO thin films, MgZnO/ZnO heterostructures (HS) and double heterostructures (DHS) have been prepared on a-plane sapphire substrates by means of pulsed laser deposition (PLD). A linear blueshift of the MgZnO emission with increasing Mg content is observed in photoluminescence spectroscopy (PL) at 2 K. Cathodoluminescence measurements verify the spatial homogeneity of the emission properties of the MgZnO films. The film roughness is evaluated from atomic force microscopy scans. In MgZnO/ZnO HS the ZnO grows on all appearing MgZnO facets. PL investigations of such PLD-grown heterostructures show the high optical quality of thin ZnO films (d≤100 nm) grown on MgZnO. Capping those structures with a thin MgZnO layer further improves their luminescence intensity and enhances the emission of free-exciton luminescence from the ZnO layers. MgZnO/ZnO/MgZnO DHS with nominal ZnO layer thicknesses of d_nom≤6 nm show a clear intensification of the ZnO PL. Temperature dependent PL and transmission measurements between 4.4 and 300 K prove the dominating emission to be due to the recombination of excitons localized in the ZnO. At 2 K, due to confinement effects, their emission energy is blueshifted up to 51 meV compared to free excitons in bulk ZnO. PACS 81.15.Fg; 78.66.Hf; 68.37.Ps     

Comparative Study of the Two-Dimensional Plasma Excitations in the Heterostructures ZnO/MgZnO,AlAs/AlGaAs,and GaAs/AlGaAs

The plasma oscillations in new advanced two-dimensional electron systems (2DESs) based on the heterostructures ZnO/MgZnO, AlAs/AlGaAs, and GaAs/AlGaAs are studied and compared. The relaxation times and the effective masses in samples with various electron densities in these 2DESs are found by microwave plasma spectroscopy. The specific features of the plasma oscillations in the AlAs/AlGaAs quantum wells that are induced by the filling of several valleys with electrons are revealed. The possibility of adjusting a plasmon spectrum via changing the electron concentrations in valleys is demonstrated.     

半导体微结构物理效应及其应用讲座第三讲半导体的激子效应及其在光电子器件中的应用

人们对半导体中的电子空穴对在库仑互作用下形成的激子态及其有关的物理性质进行了深入研究.激子效应对半导体中的光吸收、发光、激射和光学非线性作用等物理过程具有重要影响,并在半导体光电子器件的研究和开发中得到了重要的应用.与半导体体材料相比,在量子化的低维电子结构中,激子的束缚能要大得多,激子效应增强,而且在较高温度或在电场作用下更稳定.这对制作利用激子效应的光电子器件非常有利.近年来量子阱、量子点等低维结构研究获得飞速的进展,已大大促进了激子效应在新型半导体光源和半导体非线性光电子器件领域的应用.     

Direct and spatially indirect excitons in GaAs/AlGaAs superlattices in strong magnetic fields

Luminescence and luminescence excitation spectra are used to study the energy spectrum and binding energies of direct and spatially indirect excitons in GaAs/AlaAs superlattices, with different widths of the electron and hole minibands, located in a high magnetic field perpendicular to the heterolayers. It is found that the ground state of the indirect excitons formed by electrons and holes and spatially separated between neighboring quantum wells lies between the ls ground state of the direct excitons and the continuum threshold for dissociated exciton states in the minibands. Indirect excitons in superlattices have a significant oscillator strength when the binding energy of the exciton exceeds the order of the width of the resulting miniband. The behavior of the binding energy of direct and indirect heavy hole excitons during changes in the tunneling coupling between the quantum wells is established. It is shown that a strong magnetic field, which intensifies the Coulomb interaction between the electron and hole in an exciton, weakens the bond in a system of symmetrically bound quantum wells. The spatially indirect excitons studied here are analogous to first order Wannier-Stark localized excitons in superlattices with inclined bands (when an electrical bias is applied), but in the present case the localization is of purely Coulomb origin. Zh. éksp. Teor. Fiz. 112, 1106–1118 (September 1997)     

Exciton states and interband optical transitions in ZnO/MgZnO quantum dots

Within the framework of the effective-mass approximation, the exciton states confined in wurtzite ZnO/MgZnO quantum dot (QD) are calculated using a variational procedure, including three-dimensional confinement of carriers in the QD and the strong built-in electric field effect due to the piezoelectricity and spontaneous polarizations. The exciton binding energy and the electron-hole recombination rate as functions of the height (or radius) of the QD are studied. Numerical results show that the strong built-in electric field leads to a remarkable electron-hole spatial separation, and this effect has a significant influence on the exciton states and optical properties of wurtzite ZnO/MgZnO QD.     

Comparative study on beryllium and magnesium as a co-doping element for ZnO:N

Stable nitrogen doping is an important issue in p-type ZnO research for device applications.In this paper,beryllium and magnesium are systematically compared as a dopant in ZnO to reveal their nitrogen-stabilizing ability.Secondary ion mass spectrum shows that Be and Mg can both enhance the stability of nitrogen in ZnO while Be has a better performance.Zn 2p and O 1s electron binding energies change in both MgZnO and Be ZnO thin films.Donor-acceptor luminescence is observed in the BeZnO samples.We conclude that Be is a better co-doping element than Mg for p-type ZnO:N.     

Observation of Electron Spin Resonance in the Microwave-Induced Photovoltage

JETP Letters - The microwave-induced photovoltage in two-dimensional electron systems in an AlAs quantum well and a ZnO/MgZnO heterojunction under the conditions of the quantum Hall effect is...     

Crystal orientation effects on electronic and optical properties of wurtzite ZnO/MgZnO quantum well lasers

Crystal orientation effects on electronic and optical properties of ZnO/MgZnO QW structures are investigated by taking into account the non-Markovian gain model with many-body effects. These results are compared with those for GaN-based QW structures. In a range of small crystal angles, ZnO/MgZnO QW structures have a lower internal field than GaN/AlGaN and InGaN/GaN QW structures. However, ZnO/MgZnO QW structures show a larger internal field than GaN-based QW structures at crystal angles near ${\theta =50^{\circ}}$ . The WZ ZnO/MgZnO QW structures are shown to have much larger optical gain than the GaN-based QW structures for small crystal angles. This is because WZ ZnO/MgZnO QW structures have larger matrix element and smaller effective masses than InGaN/GaN QW structures near the (0001) crystal orientation. On the other hand, in the case of the (10 ${\bar{1}}$ 0) crystal orientation, the optical gain of ZnO/MgZnO QW structures becomes smaller than that of InGaN/GaN QW structures due to the increase of the effective mass. In addition, the ZnO/MgZnO QW structures have a maximum in the optical gain near ${\theta =50^{\circ}}$ , which can be explained by the fact that the average hole effective mass increases although the matrix element at high carrier density is improved with increasing crystal angle.     

Low-threshold ZnO random lasing in a homojunction diode with embedded double heterostructure

An electrically pumped random laser diode was fabricated with a MgZnO/ZnO/MgZnO double heterostructure embedded in a ZnO pn junction. Gain can be achieved at very low-threshold current owing to exciton processes. Light closed loops are formed by random multiple scattering on vertical column boundaries in the thin film. The tilted and rough mesa edge planes serve as refraction mirrors, giving rise to surface emission.