共查询到19条相似文献,搜索用时 187 毫秒
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基于严格的矢量耦合波理论,优化设计了用于13.4nm软X射线干涉光刻的透射型双光栅掩模版. 采用电子束光刻技术,在国内首次成功制作了周期为100nm的大面积金属型透射光栅.光栅面积为1.5mm ×1.5mm,Cr浮雕厚度为50nm,Gap/period为0.6,衬底Si3N4厚度为100nm. 此光栅将用于上海光源软X射线干涉光刻实验站.利用其1级衍射光和2级衍射光将可以经济高效地制作周期为50和25nm的大面积周期结构.最后,测量了该光栅对波长为13.4nm 同步辐射光的衍射光强度,并且推算得出该光栅的1级和2级衍射效率分别为4.41%和0.49%,与理论设计值比较符合.实验结果与理论模拟结果的对比表明该光栅侧壁陡直,Gap/period的控制也与设计值符合.
关键词:
软X射线金属型透射光栅
严格耦合波方法
衍射效率
软X射线干涉光刻 相似文献
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用X射线运动学理论对软X射线多层膜光栅的衍射特性进行了研究。发现其衍射规律与多层膜的布拉格衍射和普通光栅衍射有本质的区别,可将衍射能量集中于某一衍射级上,同时它又保持了多层膜的高反射率和光栅的高分辨本领等优良特性。 相似文献
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传统光栅的基础研究和应用研究进展一直备受关注。然而,高阶衍射污染使传统光栅获得的光谱纯度受到严重影响。为了抑制高阶衍射贡献,人们提出了许多单级或准单级光栅的设计方案,但它们对高阶衍射的抑制效果不可避免地受到加工精度的限制。提出了一种准周期矩形孔阵列光栅,通过优化矩形孔的概率密度分布函数,获得了比以往设计更大的加工误差宽容度。对这种光栅的衍射特性进行了分析研究。理论计算表明,即使孔径相对误差超过20%,光栅也可以完全抑制二阶、三阶和四阶衍射,五阶衍射效率与一阶衍射效率之比小于0.01%,大大降低了对加工精度的要求。 相似文献
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本文基于Bragg反射光栅是一维光子晶体的一种特例结构, 提出利用一维光子晶体理论进行Bragg衍射光栅的设计并对其性能进行研究分析. 根据一维光子晶体理论, 建立了罗兰圆结构的凹面椭圆Bragg蚀刻衍射光栅, 研究了TE/TM模式下器件的分光特性以及入射角度改变对器件角色散造成的影响; 同时, 文中对比了空气介质型和金属铝线型椭圆Bragg蚀刻衍射光栅的光学性能. 研究结果表明: 选择合适的器件参数, 可以实现TE/TM模式下1.465-1.615 μm范围内波长衍射效率在95% 以上, 且空气介质型结构光栅的通道均匀性要优于金属铝线型结构光栅; 入射角在30°-60°范围内变化时, 相同入射角度下, TM模式下器件角色散大于TE模式. 基于Bragg衍射光栅设计的波分复用器是一种尺寸小、衍射效率高的新型EDG 波分复用器, 为未来密集型EDG波分复用器发展提供了一种新的设计思路. 相似文献
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基于快速傅里叶变换光束传播法,研究了硬X射线光子筛中高高宽比金属结构的波导效应,确定了硬X射线光子筛的物理边界条件,采用角谱法计算了硬X射线光子筛的点扩展函数,并分析了吸收体厚度对聚焦性能的影响.研究结果表明波导效应一定程度上有利于抑制光子筛高级衍射的产生,提高聚焦性能.在同样的特征尺寸下,硬X射线光子筛的空间分辨率优于菲涅尔波带片,其缺点是衍射效率的下降.吸收体厚度的提高有利于提高光子筛的聚焦性能和衍射效率,但是相应的纳米加工工艺难度会增加.
关键词:
菲涅尔波带片
硬X射线光子筛
光束传播法
角谱法 相似文献
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Single order soft X-ray diffraction with quasi-random radius pinhole array spectroscopic photon sieves 下载免费PDF全文
A novel single order diffraction grating in the soft X-ray region, called quasi-random radius pinhole array spectro- scopic photon sieves (QRSPS), is proposed in this paper. This new grating is composed of pinholes on a substrate, whose radii are quasi-random, while their centers are regular. Analysis proves that its transmittance function across the grating bar is similar to that of sinusoidal transmission gratings. Simulation results show that the QRSPS can suppress higher-order diffraction effectively. And the QRSPS would still retain its characteristic of single order diffraction when we take the effect of X-ray penetration into account. These properties indicate that the QRSPS can be used in the soft X-ray spectra measurement. 相似文献
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以北京同步辐射实验室4B7中能束线为光源,在2.1~6.0 keV的范围内对邻苯二钾酸氢铊(TlAP)平面晶体一、二 、三级衍射的积分衍射效率进行了精确的实验标定。标定结果表明:TlAP晶体有较高的峰值衍射率; 其一级衍射的积分衍射效率向低能端有增加的趋势,而在2.6~5.4 keV的范围内大约为1.53×10-4 rad;随着衍射级次的提高,衍射效率逐渐减小,二级衍射的积分衍射效率约为一级衍射效率的1/4,三级衍射结果比一级衍射下降一个量级。实验所标定的TlAP晶体可用于平晶谱仪对激光等离子体X射线光谱的定量分析。 相似文献
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提出了一种准相位型光子筛。该准相位型光子筛通过改变暗环上小孔直径与带宽的比值,对焦点处的相位分布进行调制,使通过亮环和暗环上小孔的光波在焦点处发生相长干涉,生成聚焦光斑。该准相位型光子筛无需对基底进行特殊处理,即可完成相位型光子筛的制作,降低了加工难度。和普通振幅型光子筛相比,在相同最小加工尺寸的条件下,准相位型光子筛具有较大的数值孔径,可降低聚焦光斑尺寸。并且,和多区光子筛相比,在同样的最小加工尺寸及数值孔径的条件下,准相位型光子筛光斑尺寸及质量均优于对方。为大数值孔径光子筛设计提供了一种新的设计方法。 相似文献
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利用标量区衍射理论分析了正交二元矩形软X射线衍射光栅的光学特性,给出了理论设计的初步结果。 相似文献
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In the free-space laser communication, there is sometimes a strong need for reduction of the diffraction spot size in the far field. In this paper, instead of the usage of the larger size aperture lens and super-resolution technology in the free-space laser communication system, we introduce photon sieve to compress the center spot in the diffractive far field, which can decrease the weight of the emitting lens. We have designed the photon sieve and calculated its far-field diffractive intensity. We have also calculated the far field Airy diffractive field intensity. Simulation proves that the photon sieve diffractive spot is smaller than the Airy spot with the same transmit aperture. We have set up an experimental system to simulate the far-field diffraction free-space laser communication. Experimental results are in good agreement with the theoretical results. Detailed experiments are presented. 相似文献
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XDS: a flexible beamline for X‐ray diffraction and spectroscopy at the Brazilian synchrotron 下载免费PDF全文
F. A. Lima M. E. Saleta R. J. S. Pagliuca M. A. Eleotério R. D. Reis J. Fonseca Júnior B. Meyer E. M. Bittar N. M. Souza-Neto E. Granado 《Journal of synchrotron radiation》2016,23(6):1538-1549
The majority of the beamlines at the Brazilian Synchrotron Light Source Laboratory (LNLS) use radiation produced in the storage‐ring bending magnets and are therefore currently limited in the flux that can be used in the harder part of the X‐ray spectrum (above ~10 keV). A 4 T superconducting multipolar wiggler (SCW) was recently installed at LNLS in order to improve the photon flux above 10 keV and fulfill the demands set by the materials science community. A new multi‐purpose beamline was then installed at the LNLS using the SCW as a photon source. The XDS is a flexible beamline operating in the energy range between 5 and 30 keV, designed to perform experiments using absorption, diffraction and scattering techniques. Most of the work performed at the XDS beamline concentrates on X‐ray absorption spectroscopy at energies above 18 keV and high‐resolution diffraction experiments. More recently, new setups and photon‐hungry experiments such as total X‐ray scattering, X‐ray diffraction under high pressures, resonant X‐ray emission spectroscopy, among others, have started to become routine at XDS. Here, the XDS beamline characteristics, performance and a few new experimental possibilities are described. 相似文献
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《中国物理 B》2020,(5)
A single-order diffraction transmission grating named spectroscopic photon sieve(SPS) for soft x-ray region is proposed and demonstrated in this paper. The SPS consists of many circular pinholes located randomly, and can realize both free-standing diffractions and the suppression of higher-order differations. In this paper, the basic concept, numerical simulations, and calibration results of a 1000-lines/mm SPS for soft x-ray synchrotron radiation are presented. As predicted by theoretical calculations, the calibration results of a 1000-lines/mm SPS verify that the higher-order diffractions can be significantly suppressed along the symmetry axis. With the current nanofabrication technique, the SPS can potentially have a higher line density, and can be widely used in synchrotron radiation, laser-induced plasma diagnostics, and astrophysics. 相似文献