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1.
辛煜  狄小莲  虞一青  宁兆元 《物理学报》2006,55(7):3494-3500
基于单组多匝线圈的小腔体感应耦合等离子体,研究了线圈配置与耦合效率等之间的关联,并将实验结果应用到多组并联螺旋天线感应耦合等离子体放电体系中.采用了改进的朗谬尔探针方法对单源和多源感应耦合等离子体的电参量分别进行了表征.结果表明,使用多螺旋天线并联方式可以产生低气压高密度的感应耦合等离子体放电,通过调整工艺参量,可以将等离子体密度和光刻胶的刻蚀均匀性控制在80%以上. 关键词: 多源感应耦合等离子体 朗谬尔探针 等离子体灰化  相似文献   

2.
首次自行研制了导通电流可达100kA的微秒导通时间POS(等离子体断路开关),并初步开展了等离子体源参数,包括等离子体枪与主回路之间的触发延时、等离子体枪的工作电压以及等离子体枪的数目对开关性能的影响规律研究。  相似文献   

3.
电子回旋共振(Electron Cyclotron Resonance,ECR)等离子体源能产生高电荷态离子、高流强的单电荷态离子,提供稳定的束流和良好的重复性.核心部件的设计对ECR等离子体源是至关重要的,磁场对等离子体的生成和分布有直接影响,良好的磁场可以提高等离子体的性能和效率.采用有限元分析方法对ECR等离子体源磁场进行分析与设计,得到了满足设计需求与目标的磁场位形,通过高斯计对设计的永磁环轴向磁场精确测量,发现磁场仿真结果与实验结果吻合比较好,只是轴向磁场最大值及对应位置上有点偏差.通过集成实验,研究核心部件对离子源引出束流强度的影响,引出束流稳定且强度达到7 m A.  相似文献   

4.
用发射探针降落法测量等离子体空间电位   总被引:2,自引:0,他引:2  
介绍了一种用发射探针测量等离子体空间电位的方法——“降落法”,并利用这种方法测量了双共振腔ECR微波等离子体源的空间电位分布,从中得到该等离子体内部的一些电场信息。给出了不同微波功率和不同压强下Ar等离子体空间电位的分布情况。  相似文献   

5.
给出了一种感应耦合等离子体源的设计,用于等离子体中和枪装置。通过实验方法研究等离子体源的电子引出特性,并结合理论分析了等离子体密度随射频功率的变化关系。研究结果表明等离子体源的电子引出特性与放电腔内气压有关联性,E?H模式转换中电子密度的变化与负载的电感值相关。研究成果对等离子体中和枪的发展有重要的参考价值。  相似文献   

6.
 毛细管放电等离子体是近年来发展起来的一种新型脉冲高能粒子源,可以产生高温、高密和高速等离子体射流,具有推进、发射、加速等功能,可以加热或引燃化学工质,具有广泛的应用前景。介绍了毛细管等离子体的基本原理和特点,综述了国内外研究现状,对毛细管等离子体应用前景进行了展望,以期引起我国对这一技术研究的重视,促进毛细管等离子体技术的发展。  相似文献   

7.
通过测量脉冲磁过滤阴极弧等离子体沉积系统中的基片台悬浮电位,发现了弧源接地方式对基片台悬浮电位与等离子体电位影响很大。当阳极接地时基片台悬浮电位可达-60V,而弧源悬浮时却只有-5V。因此,要获得相似沉积条件的沉积薄膜,弧源接地方式不同,给基片施加偏压也应有所不同。  相似文献   

8.
介绍一种矩形反应腔体结构的表面波等离子体源,通过对垫层介质及天线结构的优化设计,产生了大面积均匀的等离子体.采用静电探针测量了等离子体参数(密度,电子温度)在不同运行条件(气压,功率)下的空间分布;采用扩散模型,数值模拟了等离子体密度在垂直方向上的空间分布,并比较好地解释了实验测量结果. 关键词: 表面波等离子体 狭缝天线 数值模拟 探针测量  相似文献   

9.
林景全 《物理》1998,27(7):431-434
分析了常规金属靶激光等离子体源产生固体碎屑的原因及其对软X射线光学元件的危害,介绍了近年来发展起来的无碎屑激光等离子体软X射线源,归纳了无碎屑激光等离子体软X射线源的几种形式和特点,并且描述了这种新型光源在软X射线显微术及光刻术中的应用.  相似文献   

10.
研究了氮氧源大气压等离子体射流对表面大肠杆菌灭活作用,分析了氮氧源大气压等离子体射流的光谱性质。结果表明,在放电电压为6.8kV,气体流速为4L?min?1,处理3min时,氮氧比为1:4的大气压等离子体射流对大肠杆菌的灭活率达到98.4%,接近氧气源大气压等离子体射流灭菌效果。通过大气压等离子体射流发射光谱(OES)分析了氮氧源大气压等离子体射流中活性物质,进而解释大肠杆菌微生物灭活机理,认为NO?γ、OI、?OH等活性物质在表面大肠杆菌灭活过程中起到了重要作用。这将为大气压氮氧等离子体射流在环境卫生、微生物灭活等方面的应用研究提供实验基础和技术支持。  相似文献   

11.
Cyclic competition game models, particularly the “rock–paper–scissors” model, play important roles in exploring the problem of multi-species coexistence in spatially ecological systems. We propose an extended “rock–paper–scissors” game to model cyclic interactions among five species, and find that two of the five can coexistent when biodiversity disappears, which is different from the “rock–paper–scissors” game. As the number of fingers is five, we named the new model the “fingers” game, where the thumb, forefinger, middle finger, ring finger, and little finger cyclically dominate their subsequent species and are dominated by their former species. We investigate the “fingers” model in two ways: direct simulations and nonlinear partial differential equations. An important finding is that the number of species in a cyclic competition game has an influence on the emergence of biodiversity. To be specific, the “rock–paper–scissors” model is in favor of maintaining biodiversity in comparison with the “fingers” model when the variables (population size, reproduction rate, selection rate, and migration rate) are the same. It is also shown that the mobility and reproduction rate can promote or jeopardize biodiversity.  相似文献   

12.
The differences of the pitch and duration of Chinese syllables between Putonghua (PTH) and Taiwan Mandarin (TM) were studied. The speech materials to be used are not only isolated syllables, but also sentences. The results reveal that: For the isolated syllables, T1 and T2 in TM are influenced by Minnan dialect, therefore their pitch are lower than those in PTH. T3 is fall-rise in PTH, while it is fall in TM. Moreover, the syllable duration sequence for different tone is T3〉T2〉T1〉T4 in PTH, while it is T1〉T2〉T3〉T4 in TM. For the syllables in sentences, T2 is mid-rise in PTH, while it is mid-level in TM. And the T3 is longer than T4 but shorter than T1 or T2 in PTH, while it is the shortest in TM. Furthermore the effects of prosodic phrase boundary on duration for different tones are almost the same in PTH, but the lengthening part of T1 or T2 is longer than that of T3 or T4 in TM.  相似文献   

13.
Downstep in pitch contour of Chinese Putonghua is examined using subtly designed sentences by controlling tone combinations. The results show both automatic and nonautomatic downstep phenomena exist in Chinese. In non-automatic downstep, low tones compress downwards the pitch range of the following syllables. and the main influence of downstep is on topline. Low tone not only lower the topline behind it, but also raise the high tones before it, the effects are compatible with each other. In automatic downstep, the topline of pitch contour in intonational phrase is presented as a linear downtrend, but it differs among speakers due to the effect of personal stress practice. In comparison with downstep phenomenon in other tone or non-tone languages, the downstep ratio in Chinese is not constant, and the domain of downstep is not limited within the adjacent tones.  相似文献   

14.
It is shown that SU(2) QCD admits an dual Abelian-Higgs phase, with a Higgs vacuum of a type-Ⅱ superconductor. This is done by using a connection decomposition for the gluon field and the random-direction approximation. Using a bag picture with soft wall, we presented a calculational procedure for the glueball energy based on the recent proof for wall-vortices [Nucl. Phys. B 741(2006)1].  相似文献   

15.
16.
Based on the research in Ref. [5][Materials Science and Engineering, 1989; A122: 57 63], an improved model of heat source is set up, the different modes of Lamb wave in an isotropic sample generated by a chopped electron beam at frequency f are obtained with integral transform and normal function expansion method, and the output signal of PZT coupled at the back surface of the sample is found out. The generation mechanism of SEAM (Scanning Electron Acoustic Microscopy) signal is discussed. It shows that the SEAM is a near field imaging technique with high spatial resolution and its best lateral spatial resolution is about 2√2α (α is the radius of the focused electron beam). Some of experimental results of SEAM images are presented in the paper and it shows that the spatial resolution of SEAM is better than 0.5 μm and smaller than the thermal diffusion length of the sample. Therefore the character of near field imaging in SEAM is also proved experimentally.  相似文献   

17.
Transmission spectra of coupled cavity structures (CCSs) in two-dimensional (2D) photonic crystals (PCs) are investigated using a coupled mode theory, and an optical filter based on CCS is proposed. The performance of the filter is investigated using finite-difference time-domain (FDTD) method, and the results show that within a very short coupling distance of about 3λ, where λ is the wavelength of signal in vacuum, the incident signals with different frequencies are separated into different channels with a contrast ratio of 20 dB. The advantages of this kind of filter are small size and easily tunable operation frequencies.  相似文献   

18.
The key to the restoration of rotational motion blurred image is how to restore the image under a low cost and to correct the irreversibility of the degradation function matrix.Based on the special qualities of degradation function matrix and precise deduction in space-domain, we present a new approach using gradient-loading for restoration of rotational blurred image.By easily adding a gradient operator, the irreversibility of the original matrix is corrected and can be applied for inverse filtering then.Gradientloading is the optimized approach which combines the advantages of both the approaches using constrained least square filtering and traditional diagonal-loading.Compared with the approach using least square filtering, its peak signal-to-noise ratio (PSNR) is improved from 3.18 to 6.46dB, while the computing time is reduced to 1/2-1/3.Experimental results demonstrate the effectiveness, noise-resistibility, robustness, and low complexity of this approach, which make it more suitable for real-time environment.  相似文献   

19.
We propose an all-optical logic device made of a bent tapered Y-junction waveguide with a Kerr-type nonlinear interface. It could provide an AND gate, OR gate, and exclusive-OR (XOR) gate. We could obtain different transmission results by adjusting the bending angle. The numerical simulation results show that the device functions as AND, OR, and XOR gates.  相似文献   

20.
Real-time, continuous-wave terahertz imaging by a pyroelectric camera   总被引:1,自引:0,他引:1  
Real-time, continuous-wave terahertz (THz) imaging is demonstrated. A 1.89-THz optically-pumped farinfrared laser is used as the illumination source, and a 124 × 124 element room-temperature pyroelectric camera is adopted as the detector. With this setup, THz images through various wrapping materials are shown. The results show that this imaging system has the potential applications in real-time mail and security inspection.  相似文献   

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